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Cumpson PJ, Jaskiewicz M, Kim WK. Argon cluster‐ion sputter yield: Molecular dynamics simulations on silicon and equation for estimating total sputter yield. SURF INTERFACE ANAL 2021. [DOI: 10.1002/sia.6996] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- Peter J. Cumpson
- NEXUS laboratory, School of Engineering Newcastle University Newcastle upon Tyne UK
- Now at Mark Wainwright Analytical Centre University of New South Wales Sydney New South Wales Australia
| | - Mieszko Jaskiewicz
- NEXUS laboratory, School of Engineering Newcastle University Newcastle upon Tyne UK
| | - Woo Kyun Kim
- Department of Mechanical and Materials Engineering University of Cincinnati Cincinnati Ohio USA
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2
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Kański M, Postawa Z. Effect of the Impact Angle on the Kinetic Energy and Angular Distributions of β-Carotene Sputtered by 15 keV Ar 2000 Projectiles. Anal Chem 2019; 91:9161-9167. [PMID: 31194505 DOI: 10.1021/acs.analchem.9b01836] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
Molecular dynamics (MD) computer simulations are used to model ejection of particles from β-carotene samples bombarded by 15 keV Ar2000. The effect of the incidence angle on the angular and kinetic energy distributions is investigated. It has been found that both of these distributions are sensitive to the variation of the incidence angle, particularly near the normal incidence. For impacts along the surface normal, material ejection is azimuthally symmetric, and a significant emission occurs along the surface normal. The kinetic energy distribution of intact molecules has a maximum near 1 eV and terminates below approximately 2 eV. An increase of the incidence angle breaks the azimuthal symmetry. Most of the intact molecules become ejected in the forward direction. The maximum in the polar angle distribution shifts toward large off-normal angles. In addition, the most probable kinetic energy of ejected molecules is significantly increased. The mechanisms of molecular emission responsible for the observed changes are delineated. The implications of the observed ejection characteristics for the utilization of large gas cluster projectiles in secondary neutral mass spectrometry are discussed.
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Affiliation(s)
- Michał Kański
- Smoluchowski Institute of Physics , Jagiellonian University , S. Lojasiewicza 11 , Kraków , Poland
| | - Zbigniew Postawa
- Smoluchowski Institute of Physics , Jagiellonian University , S. Lojasiewicza 11 , Kraków , Poland
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3
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Sheraz S, Tian H, Vickerman JC, Blenkinsopp P, Winograd N, Cumpson P. Enhanced Ion Yields Using High Energy Water Cluster Beams for Secondary Ion Mass Spectrometry Analysis and Imaging. Anal Chem 2019; 91:9058-9068. [DOI: 10.1021/acs.analchem.9b01390] [Citation(s) in RCA: 18] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/14/2023]
Affiliation(s)
- Sadia Sheraz
- School of Mechanical and Systems Engineering, University of Newcastle, Newcastle NE1 7RU, United Kingdom
| | - Hua Tian
- Department of Chemistry, Pennsylvania State University, State College, Pennsylvania 16802, United States
| | - John C. Vickerman
- School of Mechanical and Systems Engineering, University of Newcastle, Newcastle NE1 7RU, United Kingdom
- Manchester Institute of Biotechnology, University of Manchester, Manchester M1 7DN, United Kingdom
| | | | - Nicholas Winograd
- Department of Chemistry, Pennsylvania State University, State College, Pennsylvania 16802, United States
| | - Peter Cumpson
- School of Mechanical and Systems Engineering, University of Newcastle, Newcastle NE1 7RU, United Kingdom
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4
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Improved mass resolution and mass accuracy in TOF-SIMS spectra and images using argon gas cluster ion beams. Biointerphases 2016; 11:02A321. [PMID: 26861497 DOI: 10.1116/1.4941447] [Citation(s) in RCA: 21] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022] Open
Abstract
The popularity of argon gas cluster ion beams (Ar-GCIB) as primary ion beams in time-of-flight secondary ion mass spectrometry (TOF-SIMS) has increased because the molecular ions of large organic- and biomolecules can be detected with less damage to the sample surfaces. However, Ar-GCIB is limited by poor mass resolution as well as poor mass accuracy. The inferior quality of the mass resolution in a TOF-SIMS spectrum obtained by using Ar-GCIB compared to the one obtained by a bismuth liquid metal cluster ion beam and others makes it difficult to identify unknown peaks because of the mass interference from the neighboring peaks. However, in this study, the authors demonstrate improved mass resolution in TOF-SIMS using Ar-GCIB through the delayed extraction of secondary ions, a method typically used in TOF mass spectrometry to increase mass resolution. As for poor mass accuracy, although mass calibration using internal peaks with low mass such as hydrogen and carbon is a common approach in TOF-SIMS, it is unsuited to the present study because of the disappearance of the low-mass peaks in the delayed extraction mode. To resolve this issue, external mass calibration, another regularly used method in TOF-MS, was adapted to enhance mass accuracy in the spectrum and image generated by TOF-SIMS using Ar-GCIB in the delayed extraction mode. By producing spectra analyses of a peptide mixture and bovine serum albumin protein digested with trypsin, along with image analyses of rat brain samples, the authors demonstrate for the first time the enhancement of mass resolution and mass accuracy for the purpose of analyzing large biomolecules in TOF-SIMS using Ar-GCIB through the use of delayed extraction and external mass calibration.
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5
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Razo IB, Sheraz SNR, Henderson A, Lockyer NP, Vickerman JC. Mass spectrometric imaging of brain tissue by time-of-flight secondary ion mass spectrometry--How do polyatomic primary beams C₆₀⁺, Ar₂₀₀₀⁺, water-doped Ar₂₀₀₀⁺ and (H₂O)₆₀₀₀⁺ compare? RAPID COMMUNICATIONS IN MASS SPECTROMETRY : RCM 2015; 29:1851-62. [PMID: 26411506 PMCID: PMC4989468 DOI: 10.1002/rcm.7285] [Citation(s) in RCA: 10] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2015] [Revised: 07/14/2015] [Accepted: 07/15/2015] [Indexed: 05/11/2023]
Abstract
RATIONALE To discover the degree to which water-containing cluster beams increase secondary ion yield and reduce the matrix effect in time-of-flight secondary ion mass spectrometry (TOF-SIMS) imaging of biological tissue. METHODS The positive SIMS ion yields from model compounds, mouse brain lipid extract and mouse brain tissue together with mouse brain images were compared using 20 keV C60(+), Ar2000(+), water-doped Ar2000(+) and pure (H2O)6000(+) primary beams. RESULTS Water-containing cluster beams where the beam energy per nucleon (E/nucleon) ≈ 0.2 eV are optimum for enhancing ion yields dependent on protonation. Ion yield enhancements over those observed using Ar2000(+) lie in the range 10 to >100 using the (H2 O)6000 (+) beam, while with water-doped (H2O)Ar2000(+) they lie in the 4 to 10 range. The two water-containing beams appear to be optimum for tissue imaging and show strong evidence of increasing yields from molecules that experience matrix suppression under other primary beams. CONCLUSIONS The application of water-containing primary beams is suggested for biological SIMS imaging applications, particularly if the beam energy can be raised to 40 keV or higher to further increase ion yield and enhance spatial resolution to ≤1 µm.
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Affiliation(s)
- Irma Berrueta Razo
- Manchester Institute of Biotechnology, The University of Manchester, Manchester, M13 9PL, UK
- School of Chemistry, The University of Manchester, Manchester, UK
| | - Sadia née Rabbani Sheraz
- Manchester Institute of Biotechnology, The University of Manchester, Manchester, M13 9PL, UK
- School of Chemical Engineering and Analytical Science, The University of Manchester, Manchester, UK
| | - Alex Henderson
- Manchester Institute of Biotechnology, The University of Manchester, Manchester, M13 9PL, UK
- School of Chemical Engineering and Analytical Science, The University of Manchester, Manchester, UK
| | - Nicholas P Lockyer
- Manchester Institute of Biotechnology, The University of Manchester, Manchester, M13 9PL, UK
- School of Chemistry, The University of Manchester, Manchester, UK
| | - John C Vickerman
- Manchester Institute of Biotechnology, The University of Manchester, Manchester, M13 9PL, UK
- School of Chemical Engineering and Analytical Science, The University of Manchester, Manchester, UK
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6
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Barnett CJ, Kryvchenkova O, Smith NA, Kelleher L, Maffeis TGG, Cobley RJ. The effects of surface stripping ZnO nanorods with argon bombardment. NANOTECHNOLOGY 2015; 26:415701. [PMID: 26390967 DOI: 10.1088/0957-4484/26/41/415701] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
ZnO nanorods are used in devices including field effects transistors, piezoelectric transducers, optoelectronics and gas sensors. However, for efficient and reproducible device operation and contact behaviour, surface contaminants must be removed or controlled. Here we use low doses of argon bombardment to remove surface contamination and make reproducible lower resistance contacts. Higher doses strip the surface of the nanorods allowing intrinsic surface measurements through a cross section of the material. Photoluminescence finds that the defect distribution is higher at the near-surface, falling away in to the bulk. Contacts to the n-type defect-rich surface are near-Ohmic, whereas stripping away the surface layers allows more rectifying Schottky contacts to be formed. The ability to select the contact type to ZnO nanorods offers a new way to customize device behaviour.
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Affiliation(s)
- Chris J Barnett
- Multidisciplinary Nanotechnology Centre, College of Engineering, Swansea University, Singleton Park, Swansea SA2 8PP, UK
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7
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Paruch RJ, Postawa Z, Garrison BJ. Seduction of Finding Universality in Sputtering Yields Due to Cluster Bombardment of Solids. Acc Chem Res 2015; 48:2529-36. [PMID: 26248727 DOI: 10.1021/acs.accounts.5b00303] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Abstract
Universal descriptions are appealing because they simplify the description of different (but similar) physical systems, allow the determination of general properties, and have practical applications. Recently, the concept of universality has been applied to the dependence of the sputtering (ejection) yield due to energetic cluster bombardment versus the energy of the incident cluster. It was observed that the spread in data points can be reduced if the yield Y and initial projectile cluster kinetic energy E are expressed in quantities scaled by the number of cluster atoms n, that is, Y/n versus E/n. The convergence of the data points is, however, not perfect, especially when the results for molecular and atomic solids are compared. In addition, the physics underlying the apparent universal dependence in not fully understood. For the study presented in this Account, we performed molecular dynamics simulations of Arn cluster bombardment of molecular (benzene, octane, and β-carotene) and atomic (Ag) solids in order to address the physical basis of the apparent universal dependence. We have demonstrated that the convergence of the data points between molecular and atomic solids can be improved if the binding energy of the solid U0 is included and the dependence is presented as Y/(E/U0) versus (E/U0)/n. As a material property, the quantity U0 is defined per the basic unit of material, which is an atom for atomic solids and a molecule for molecular solids. Analogously, the quantity Y is given in atoms and molecules, respectively. The simulations show that, for almost 3 orders of magnitude variation of (E/U0)/n, there are obvious similarities in the ejection mechanisms between the molecular and atomic solids, thus supporting the concept of universality. For large (E/U0)/n values, the mechanism of ejection is the fluid flow from a cone-shaped volume. This regime of (E/U0)/n is generally accessed experimentally by clusters with hundreds of atoms and results in the largest yields. For molecular systems, a large fraction of the total energy E is consumed by internal excitation and molecular fragmentation, which are energy loss channels not present in atomic solids. For small (E/U0)/n values, the cluster deforms the surface and the ejection occurs from a ring-shaped ridge of the forming crater rim. This regime of (E/U0)/n is generally accessed experimentally by clusters with thousands of atoms and results in the smallest yields. For the molecular systems, there is little or no molecular fragmentation. The simulations indicate, however, that the representation which includes U0 as the only material property cannot be completely universal, because there are other material properties which influence the sputtering efficiency. Furthermore, neither the Y/n nor Y/(E/U0) representation includes the energy loss physics associated with molecular fragmentation in the high (E/U0)/n regime. The analysis of the universal concept implies for practical applications that if the objective of the experiment is large material removal, then the high energy per cluster atom regime is applicable. If the objective is little or no molecular fragmentation in organic materials, then the low energy per atom regime is appropriate.
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Affiliation(s)
- Robert J. Paruch
- Department
of Chemistry, Penn State University, 104 Chemistry Building, University Park, Pennsylvania 16802, United States
| | - Zbigniew Postawa
- Smoluchowski
Institute of Physics, Jagiellonian University, ulica Lojasiewicza 11, 30-348 Krakow, Poland
| | - Barbara J. Garrison
- Department
of Chemistry, Penn State University, 104 Chemistry Building, University Park, Pennsylvania 16802, United States
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8
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Seah MP, Spencer SJ, Shard AG. Angle Dependence of Argon Gas Cluster Sputtering Yields for Organic Materials. J Phys Chem B 2015; 119:3297-303. [DOI: 10.1021/jp512379k] [Citation(s) in RCA: 23] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- M. P. Seah
- Analytical Science Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
| | - S. J. Spencer
- Analytical Science Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
| | - A. G. Shard
- Analytical Science Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom
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9
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Sheraz née Rabbani S, Berrueta Razo I, Kohn T, Lockyer NP, Vickerman JC. Enhancing Ion Yields in Time-of-Flight-Secondary Ion Mass Spectrometry: A Comparative Study of Argon and Water Cluster Primary Beams. Anal Chem 2015; 87:2367-74. [DOI: 10.1021/ac504191m] [Citation(s) in RCA: 69] [Impact Index Per Article: 7.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Affiliation(s)
- Sadia Sheraz née Rabbani
- Manchester
Institute of Biotechnology, The University of Manchester
, Manchester, U.K
- School
of Chemical Engineering and Analytical Science, The University of Manchester
, Manchester, U.K
| | - Irma Berrueta Razo
- Manchester
Institute of Biotechnology, The University of Manchester
, Manchester, U.K
- School
of Chemistry, The University of Manchester
, Manchester, U.K
| | - Taylor Kohn
- Manchester
Institute of Biotechnology, The University of Manchester
, Manchester, U.K
- School
of Chemical Engineering and Analytical Science, The University of Manchester
, Manchester, U.K
| | - Nicholas P. Lockyer
- Manchester
Institute of Biotechnology, The University of Manchester
, Manchester, U.K
- School
of Chemistry, The University of Manchester
, Manchester, U.K
| | - John C. Vickerman
- Manchester
Institute of Biotechnology, The University of Manchester
, Manchester, U.K
- School
of Chemical Engineering and Analytical Science, The University of Manchester
, Manchester, U.K
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10
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Holzweber M, Shard AG, Jungnickel H, Luch A, Unger WES. Dual beam organic depth profiling using large argon cluster ion beams. SURF INTERFACE ANAL 2014; 46:936-939. [PMID: 25892830 PMCID: PMC4376248 DOI: 10.1002/sia.5429] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/01/2013] [Revised: 01/31/2014] [Accepted: 02/03/2014] [Indexed: 11/24/2022]
Abstract
Argon cluster sputtering of an organic multilayer reference material consisting of two organic components, 4,4'-bis[N-(1-naphthyl-1-)-N-phenyl- amino]-biphenyl (NPB) and aluminium tris-(8-hydroxyquinolate) (Alq3), materials commonly used in organic light-emitting diodes industry, was carried out using time-of-flight SIMS in dual beam mode. The sample used in this study consists of a ∽400-nm-thick NPB matrix with 3-nm marker layers of Alq3 at depth of ∽50, 100, 200 and 300 nm. Argon cluster sputtering provides a constant sputter yield throughout the depth profiles, and the sputter yield volumes and depth resolution are presented for Ar-cluster sizes of 630, 820, 1000, 1250 and 1660 atoms at a kinetic energy of 2.5 keV. The effect of cluster size in this material and over this range is shown to be negligible. © 2014 The Authors. Surface and Interface Analysis published by John Wiley & Sons Ltd.
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Affiliation(s)
- M Holzweber
- BAM – Federal Institute for Material Science and Testing, Division of Surface Analysis and Interfacial ChemistryUnter den Eichen 44-46, 12205, Berlin, Germany
| | - AG Shard
- National Physical LaboratoryHampton Road, Teddington, TW11 0LW, UK
| | - H Jungnickel
- BfR – Federal Institute for Risk Assessment, Department of Experimental ResearchMax Dohrn Strasse 8-10, 10589, Berlin, Germany
| | - A Luch
- BfR – Federal Institute for Risk Assessment, Department of Experimental ResearchMax Dohrn Strasse 8-10, 10589, Berlin, Germany
| | - WES Unger
- BAM – Federal Institute for Material Science and Testing, Division of Surface Analysis and Interfacial ChemistryUnter den Eichen 44-46, 12205, Berlin, Germany
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11
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Fleischmann C, Conard T, Havelund R, Franquet A, Poleunis C, Voroshazi E, Delcorte A, Vandervorst W. Fundamental aspects of Arn
+
SIMS profiling of common organic semiconductors. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5621] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
| | - T. Conard
- IMEC; Kapeldreef 75 B-3001 Heverlee Belgium
| | - R. Havelund
- NPL, National Physical Laboratory; Teddington Middlesex TW11 0LW UK
| | | | - C. Poleunis
- Université catholique de Louvain, IMCN/BSMA; Croix du Sud 1, L7.04.01 B-1348 Louvain-la-Neuve Belgium
| | | | - A. Delcorte
- Université catholique de Louvain, IMCN/BSMA; Croix du Sud 1, L7.04.01 B-1348 Louvain-la-Neuve Belgium
| | - W. Vandervorst
- IMEC; Kapeldreef 75 B-3001 Heverlee Belgium
- Instituut voor Kern- en Stralingsfysica, KU Leuven; Celestijnenlaan 200D B-3001 Leuven Belgium
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12
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Seah MP, Spencer SJ, Shard AG. Depth resolution, angle dependence, and the sputtering yield of Irganox 1010 by coronene primary ions. J Phys Chem B 2013; 117:11885-92. [PMID: 24010582 DOI: 10.1021/jp408168z] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
A study is reported of the depth resolution and angle dependence of sputtering yields using the reference organic material, Irganox 1010, for a new coronene(+) depth profiling ion source at 8 and 16 keV beam energies. This source provides excellent depth profiles as shown by 8.5 nm marker layers of Irganox 3114. Damage occurs but may be ignored for angles of incidence above 70° from the surface normal, as shown by X-ray photoelectron spectroscopy (XPS) of the C 1s peak structure. Above 70°, XPS profiles of excellent depth resolution are obtained. The depth resolution, after removal of the thickness of the delta layers, shows a basic contribution of 5.7 nm together with a contribution of 0.043 times the depth sputtered. This is lower than generally reported for cluster sources. The coronene(+) source is thus found to be a useful and practical source for depth profiling organic materials. The angle dependencies of both the undamaged and damaged materials are described by a simple equation. The sputtering yields for the undamaged material are described by a universal equation and are consistent with those obtained for C60(+) sputtering. Comparison with the sputtering yields using an argon gas cluster ion source shows great similarities, but the yields for both the coronene(+) and C60(+) primary ion sources are slightly lower.
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Affiliation(s)
- Martin P Seah
- Analytical Science Division, National Physical Laboratory , Teddington, Middlesex TW11 0LW, United Kingdom
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13
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Gnaser H, Fujii M, Nakagawa S, Seki T, Aoki T, Matsuo J. Peptide dissociation patterns in secondary ion mass spectrometry under large argon cluster ion bombardment. RAPID COMMUNICATIONS IN MASS SPECTROMETRY : RCM 2013; 27:1490-1496. [PMID: 23722683 DOI: 10.1002/rcm.6599] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/27/2013] [Revised: 04/08/2013] [Accepted: 04/14/2013] [Indexed: 06/02/2023]
Abstract
RATIONALE The analysis of organic and biological substances by secondary ion mass spectrometry (SIMS) has greatly benefited from the use of cluster ions as primary bombarding species. Thereby, depth profiling and three-dimensional (3D) imaging of such systems became feasible. Large Ar(n)(+) cluster ions may constitute a further improvement in this direction. METHODS To explore this option, large Ar(n)(+) cluster ions (with n ~1500 Ar atoms per cluster) were used to investigate the emission of positive secondary ions from two peptide specimens (angiotensin I and bradykinin) by orthogonal time-of-flight SIMS using bombarding energies 6, 10 and 14 keV. RESULTS For both peptides, the protonated molecular ion is observed in the mass spectra. In addition, distinct fragmentation patterns were observed; these indicate that fragment ions under Ar cluster irradiation form primarily via cleavage of bonds along the peptide backbone whereas the rapture of side chains occurs much less frequently. These features appear to be similar to low-energy collision-induced dissociation pathways. CONCLUSIONS Tentatively, these findings can then be ascribed to the concerted action of the large number of Ar atoms in the impact zone of cluster at the surface: these low-energy Ar species (with an average energy of few eV) may effect the cleavage of the peptide bonds and lead, eventually, to the emission of the fragment ions.
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Affiliation(s)
- Hubert Gnaser
- Department of Physics and Research Center OPTIMAS, University of Kaiserslautern, Kaiserslautern, Germany.
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14
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Fletcher JS, Vickerman JC. Secondary Ion Mass Spectrometry: Characterizing Complex Samples in Two and Three Dimensions. Anal Chem 2012; 85:610-39. [DOI: 10.1021/ac303088m] [Citation(s) in RCA: 112] [Impact Index Per Article: 9.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Affiliation(s)
- John S. Fletcher
- Manchester Institute
of Biotechnology, University of Manchester, Manchester M13 9PL, U.K
| | - John C. Vickerman
- Manchester Institute
of Biotechnology, University of Manchester, Manchester M13 9PL, U.K
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