1
|
Quantification of High Resolution Pulsed RF GDOES Depth Profiles for Mo/B4C/Si Nano-Multilayers. COATINGS 2021. [DOI: 10.3390/coatings11060612] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
Pulsed-radio frequency glow discharge optical emission spectrometry (Pulsed-RF-GDOES) has exhibited great potential for high resolution (HR) depth profiling. In this paper, the measured GDOES depth profile of 60 × Mo (3 nm)/B4C (0.3 nm)/Si (3.7 nm) was quantified by employing the newly extended Mixing-Roughness-Information depth (MRI) model. We evaluated the influences of the thickness and sputtering rate on the depth profile of very thin layers. We demonstrated that a method using the full width at half maximum (FWHM) value of the measured time-concentration profile for determining the sputtering rate and the corresponding thickness was not reliable if preferential sputtering took place upon depth profiling.
Collapse
|
2
|
Huang R, Chen X, Li F, Ding S, Yang H. Large‐scale quantification of aluminum in Al
x
Ga
1‐
x
N alloys by ToF‐SIMS: The benefit of secondary cluster ions. SURF INTERFACE ANAL 2020. [DOI: 10.1002/sia.6760] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/24/2023]
Affiliation(s)
- Rong Huang
- Vacuum Interconnected Nanotech Workstation (NANO‐X), Suzhou Institute of Nano‐Tech and Nano‐BionicsChinese Academy of Sciences (CAS) Suzhou China
| | - Xiao Chen
- Vacuum Interconnected Nanotech Workstation (NANO‐X), Suzhou Institute of Nano‐Tech and Nano‐BionicsChinese Academy of Sciences (CAS) Suzhou China
| | - Fangsen Li
- Vacuum Interconnected Nanotech Workstation (NANO‐X), Suzhou Institute of Nano‐Tech and Nano‐BionicsChinese Academy of Sciences (CAS) Suzhou China
| | - Sunan Ding
- Vacuum Interconnected Nanotech Workstation (NANO‐X), Suzhou Institute of Nano‐Tech and Nano‐BionicsChinese Academy of Sciences (CAS) Suzhou China
| | - Hui Yang
- Vacuum Interconnected Nanotech Workstation (NANO‐X), Suzhou Institute of Nano‐Tech and Nano‐BionicsChinese Academy of Sciences (CAS) Suzhou China
- Key Laboratory of Nanodevices and ApplicationsChinese Academy of Sciences (CAS) Suzhou China
| |
Collapse
|
3
|
Jakieła R, Galicka M, Dziawa P, Springholz G, Barcz A. SIMS accurate determination of matrix composition of topological crystalline insulator material Pb1 − xSnxSe. SURF INTERFACE ANAL 2019. [DOI: 10.1002/sia.6705] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Rafał Jakieła
- Institute of PhysicsPolish Academy of Sciences Warsaw Poland
| | - Marta Galicka
- Institute of PhysicsPolish Academy of Sciences Warsaw Poland
| | - Piotr Dziawa
- Institute of PhysicsPolish Academy of Sciences Warsaw Poland
| | - Gunther Springholz
- Institute for Semiconductor and Solid State PhysicsJohannes Kepler University Linz Austria
| | - Adam Barcz
- Institute of PhysicsPolish Academy of Sciences Warsaw Poland
- Institute of Electron TechnologyPolish Academy of Science Warsaw Poland
| |
Collapse
|