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Citation(s) in
RCA
5
(from Reference Citation Analysis)
Indexed Articles
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Results Analysis
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Year Published
1995 (2)
1994 (3)
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RCA (5)
SCIE (5)
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SURFACE AND INTERFACE ANALYSIS (3)
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Cited by Other Article(s)
1
Hoener CF
, Shaver B, Nguyen TT. Auger analysis of etch residues in submicrometer via holes using focused ion beam sample preparation.
SURF INTERFACE ANAL
1995. [DOI:
10.1002/sia.740230207
]
[
Citation(s) in
RCA
: 4
]
[
Impact Index Per Article: 0.1
]
[
Reference Citation Analysis
]
[
Track Full Text
]
[
Journal Information
]
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[Indexed: 11/09/2022]
Abstract
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2
Prutton M
. Microanalytical Imaging with Auger Electrons.
ACTA ACUST UNITED AC
1995. [DOI:
10.1051/mmm:1995121
]
[
Citation(s) in
RCA
: 10
]
[
Impact Index Per Article: 0.3
]
[
Reference Citation Analysis
]
[
Track Full Text
]
[
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[Indexed: 11/15/2022]
Abstract
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3
Hofmann S
. Recent progress in quantitative and high spatial resolution AES.
Mikrochim Acta
1994. [DOI:
10.1007/bf01244531
]
[
Citation(s) in
RCA
: 1
]
[
Impact Index Per Article: 0.0
]
[
Reference Citation Analysis
]
[
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]
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[Indexed: 10/25/2022]
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4
Pamler W
. Advances in Auger microanalysis for semiconductor technology.
SURF INTERFACE ANAL
1994. [DOI:
10.1002/sia.740220172
]
[
Citation(s) in
RCA
: 3
]
[
Impact Index Per Article: 0.1
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/05/2022]
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5
Forsyth NM
, Bean S. Low-energy field emission Auger electron spectroscopy.
SURF INTERFACE ANAL
1994. [DOI:
10.1002/sia.740220173
]
[
Citation(s) in
RCA
: 5
]
[
Impact Index Per Article: 0.2
]
[
Reference Citation Analysis
]
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[Indexed: 11/09/2022]
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