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For: Hoener CF, Shaver B, Nguyen TT. Auger analysis of etch residues in submicrometer via holes using focused ion beam sample preparation. SURF INTERFACE ANAL 1995. [DOI: 10.1002/sia.740230207] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Number Cited by Other Article(s)
1
McGuire GE, Weiss PS, Kushmerick JG, Johnson JA, Simko SJ, Nemanich RJ, Parikh NR, Chopra DR. Surface Characterization. Anal Chem 1997. [DOI: 10.1021/a1970009h] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
2
Turner NH, Schreifels JA. Surface Analysis:  X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy. Anal Chem 1996. [DOI: 10.1021/a19600146] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
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