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Zhang XA, Chen IT, Chang CH. Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures. NANOTECHNOLOGY 2019; 30:352002. [PMID: 31100738 DOI: 10.1088/1361-6528/ab2282] [Citation(s) in RCA: 23] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
The advance of nanotechnology is firmly rooted in the development of cost-effective, versatile, and easily accessible nanofabrication techniques. The ability to pattern complex two-dimensional and three-dimensional nanostructured materials are particularly desirable, since they can have novel physical properties that are not found in bulk materials. This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography. In these techniques, the near-field interactions of light and colloids are the sole mechanisms employed to generate the intensity distributions for patterning. Based on both 'bottom-up' self-assembly and 'top-down' lithography approaches, these processes are highly versatile and can take advantage of a number of optical effects, allowing the complex 3D nanostructures to be patterned using single exposures. There are several key advantages including low equipment cost, facile structure design, and patterning scalability, which will be discussed in detail. We will outline the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials.
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Affiliation(s)
- Xu A Zhang
- Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, PA 19104, United States of America
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Brown KA, Hedrick JL, Eichelsdoerfer DJ, Mirkin CA. Nanocombinatorics with Cantilever-Free Scanning Probe Arrays. ACS NANO 2019; 13:8-17. [PMID: 30561191 DOI: 10.1021/acsnano.8b08185] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The effectiveness of combinatorial experiments is determined by the rate at which distinct experimental conditions can be prepared and interrogated. This has been particularly limiting at the intersection of nanotechnology and soft materials research, where structures are difficult to reliably prepare and materials are incompatible with conventional lithographic techniques. For example, studying nanoparticle-based heterogeneous catalysis or the interaction between biological cells and abiotic surfaces requires precise tuning of materials composition on the nanometer scale. Scanning probe techniques are poised to be major players in the combinatorial nanoscience arena because they allow one to directly deposit materials at high resolution without any harsh processing steps that limit material compatibility. The chief limitation of scanning probe techniques is throughput, as patterning with single probes is prohibitively slow in the context of large-scale combinatorial experiments. A recent paradigm shift circumvents this problem by fundamentally altering the architecture of scanning probes by replacing the conventionally used cantilever with a soft compliant film on a rigid substrate, a substitution that allows a densely packed array of probes to function in parallel in an inexpensive format. This is a major lithographic advance in terms of scalability, throughput, and versatility that, when combined with the development of approaches to actuate individual probes in cantilever-free arrays, sets the stage for scanning-probe-based tools to address scientific questions through nanocombinatorial studies in biology and materials science. In this review, we outline the development of cantilever-free scanning probe lithography and prospects for nanocombinatorial studies enabled by these tools.
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Affiliation(s)
- Keith A Brown
- Department of Mechanical Engineering, Division of Materials Science & Engineering, and Physics Department , Boston University , 110 Cummington Mall , Boston , Massachusetts 02215 , United States
| | | | | | - Chad A Mirkin
- Department of Mechanical Engineering, Division of Materials Science & Engineering, and Physics Department , Boston University , 110 Cummington Mall , Boston , Massachusetts 02215 , United States
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Zang X, Wang X, Yang Z, Wang X, Li R, Chen J, Ji J, Xue M. Unprecedented sensitivity towards pressure enabled by graphene foam. NANOSCALE 2017; 9:19346-19352. [PMID: 29199740 DOI: 10.1039/c7nr05175a] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
Abstract
Reduced graphene oxide foam (RGOF)-based pressure sensors have been fabricated through the combination of ultrasonic dispersion and freeze-drying methods. Due to the maintenance of the highly disordered structure of the ultrasonic dispersed graphene oxides before the freezing process, the RGOF sensors demonstrated an ultra-high sensitivity of 22.8 kPa-1, an ultra-low detection limit of around 0.1 Pa, and a superior separation of 0.2-Pascal-scale difference.
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Affiliation(s)
- Xiaoling Zang
- Institute of Physics and Beijing National Laboratory for Condensed Matter Physics, Chinese Academy of Sciences, Beijing 100190, China.
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Ma X, Li F, Xie Z, Xue M, Zheng Z, Zhang X. Size-tunable, highly sensitive microelectrode arrays enabled by polymer pen lithography. SOFT MATTER 2017; 13:3685-3689. [PMID: 28492664 DOI: 10.1039/c6sm02791a] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
By combining polymer pen lithography (PPL) patterning with in situ polymerization, we report a straightforward and bottom-up approach for bench-top fabrication of microelectrode arrays (MEAs) with well-controlled dimensions. The as-fabricated MEAs can be used to electrodeposit prussian blue in situ and work as a biosensor for H2O2 with a detection limit as low as 5 nM at a sensitivity of 0.7 A cm-2 M-1.
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Affiliation(s)
- Xinlei Ma
- Research Center for Bioengineering and Sensing Technology, Beijing Key Laboratory for Bioengineering and Sensing Technology, School of Chemistry and Biological Engineering, University of Science & Technology Beijing, 100083, Beijing, P. R. China.
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He S, Xie Z, Park DJ, Liao X, Brown KA, Chen PC, Zhou Y, Schatz GC, Mirkin CA. Liquid-Phase Beam Pen Lithography. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2016; 12:988-993. [PMID: 26743998 DOI: 10.1002/smll.201502666] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/01/2015] [Revised: 11/03/2015] [Indexed: 06/05/2023]
Abstract
Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.
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Affiliation(s)
- Shu He
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Zhuang Xie
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Daniel J Park
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Xing Liao
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
| | - Keith A Brown
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Peng-Cheng Chen
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
| | - Yu Zhou
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
| | - George C Schatz
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
| | - Chad A Mirkin
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL, 60208, USA
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL, 60208, USA
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Xie Z, Zhou Y, Hedrick JL, Chen PC, He S, Shahjamali MM, Wang S, Zheng Z, Mirkin CA. On-Tip Photo-Modulated Molecular Printing. Angew Chem Int Ed Engl 2015. [DOI: 10.1002/ange.201505150] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Xie Z, Zhou Y, Hedrick JL, Chen P, He S, Shahjamali MM, Wang S, Zheng Z, Mirkin CA. On‐Tip Photo‐Modulated Molecular Printing. Angew Chem Int Ed Engl 2015; 54:12894-9. [DOI: 10.1002/anie.201505150] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/05/2015] [Revised: 08/03/2015] [Indexed: 01/27/2023]
Affiliation(s)
- Zhuang Xie
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
- Nanotechnology Center, Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong SAR (China)
| | - Yu Zhou
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208 (USA)
| | - James L. Hedrick
- Department of Chemical and Biological Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
| | - Peng‐Cheng Chen
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208 (USA)
| | - Shu He
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
| | - Mohammad M. Shahjamali
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
| | - Shunzhi Wang
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
| | - Zijian Zheng
- Nanotechnology Center, Institute of Textiles and Clothing, The Hong Kong Polytechnic University, Hong Kong SAR (China)
| | - Chad A. Mirkin
- Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
- Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208 (USA)
- Department of Chemical and Biological Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 (USA)
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