Sculpting asymmetric, hollow-core, three-dimensional nanostructures using colloidal particles

Analysis of the Pattern Shapes Obtained By Micro/Nanospherical Lens Photolithography

Micro/nanospherical lens photolithography (SLPL) constitutes an efficient and precise micro/nanofabrication methodology. It offers advantages over traditional nanolithography approaches, such as cost-effectiveness and ease of implementation. By using micrometer-sized microspheres, SLPL enables the preparation of subwavelength scale features. This technique has gained attention due to its potential applications. However, the SLPL process has a notable limitation in that it mostly produces simple pattern shapes, mainly consisting of circular arrays. There has been a lack of theoretical analysis regarding the possible shapes that can be created. In our experiments, we successfully prepared annular and ring-with-hole pattern shapes. To address this limitation, we applied the Mie scattering theory to systematically analyze and summarize the various patterns that can be obtained through the SLPL process. We also proposed methods to predict and obtain different patterns. This theoretical analysis enhances the understanding of SLPL and expands its potential applications, making it a valuable area for further research.

Nanopatterning with Photonic Nanojets: Review and Perspectives in Biomedical Research

Nanostructured surfaces and devices offer astounding possibilities for biomedical research, including cellular and molecular biology, diagnostics, and therapeutics. However, the wide implementation of these systems is currently limited by the lack of cost-effective and easy-to-use nanopatterning tools. A promising solution is to use optical methods based on photonic nanojets, namely, needle-like beams featuring a nanometric width. In this review, we survey the physics, engineering strategies, and recent implementations of photonic nanojets for high-throughput generation of arbitrary nanopatterns, along with applications in optics, electronics, mechanics, and biosensing. An outlook of the potential impact of nanopatterning technologies based on photonic nanojets in several relevant biomedical areas is also provided.

Interference surface patterning using colloidal particle lens arrays

Surface patterns of complex morphology can be made by combining the near-field colloidal lithography and the multiple-beam interference of the incident laser light. Our calculation shows that patterns made of bright and dim photonic jets can be formed beneath the dielectric spheres within the close-packed colloidal monolayer. An algorithm to find the propagation directions, amplitudes, and phases of the incident beams needed to make the desired photonic jet pattern is proposed. The field contrast in those patterns is studied.

Continuous roll-to-roll patterning of three-dimensional periodic nanostructures

In this work, we introduce a roll-to-roll system that can continuously print three-dimensional (3D) periodic nanostructures over large areas. This approach is based on Langmuir-Blodgett assembly of colloidal nanospheres, which diffract normal incident light to create a complex intensity pattern for near-field nanolithography. The geometry of the 3D nanostructure is defined by the Talbot effect and can be precisely designed by tuning the ratio of the nanosphere diameter to the exposure wavelength. Using this system, we have demonstrated patterning of 3D photonic crystals with a 500 nm period on a 50 × 200 mm² flexible substrate, with a system throughput of 3 mm/s. The patterning yield is quantitatively analyzed by an automated electron beam inspection method, demonstrating long-term repeatability of an up to 88% yield over a 4-month period. The inspection method can also be employed to examine pattern uniformity, achieving an average yield of up to 78.6% over full substrate areas. The proposed patterning method is highly versatile and scalable as a nanomanufacturing platform and can find application in nanophotonics, nanoarchitected materials, and multifunctional nanostructures.

Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures

The advance of nanotechnology is firmly rooted in the development of cost-effective, versatile, and easily accessible nanofabrication techniques. The ability to pattern complex two-dimensional and three-dimensional nanostructured materials are particularly desirable, since they can have novel physical properties that are not found in bulk materials. This review article will report recent progress in utilizing self-assembly of colloidal particles for nanolithography. In these techniques, the near-field interactions of light and colloids are the sole mechanisms employed to generate the intensity distributions for patterning. Based on both 'bottom-up' self-assembly and 'top-down' lithography approaches, these processes are highly versatile and can take advantage of a number of optical effects, allowing the complex 3D nanostructures to be patterned using single exposures. There are several key advantages including low equipment cost, facile structure design, and patterning scalability, which will be discussed in detail. We will outline the underlying optical effects, review the geometries that can be fabricated, discuss key limitations, and highlight potential applications in nanophotonics, optoelectronic devices, and nanoarchitectured materials.

Twin photonic nanojets generated from coherent illumination of microscale sphere and cylinder

Photonic nanojets, highly focused beams of light created by planar illumination of a microsphere, have been shown to produce narrow subwavelength beams over distances of several wavelengths in the near field. In this work, we investigate the generation of twin photonic nanojets through the illumination of a microsphere or cylinder from two coherent sources with relative phase shift. Under these conditions, symmetric twin nanojets separated by an intensity null can be generated. Compared to a photonic nanojet, the twin nanojets can achieve an even smaller subwavelength beam, and have the added advantage of having more complex intensity profiles that can be controlled by multiple parameters. Using both finite-difference time-domain and Mie theory models, the width, length, and intensity enhancement factor of the nanojet geometry are found to be functions of the phase, angle offsets, and particle geometry. Such twin photonic nanojets can find applications in optical trapping, manipulation, nanolithography, and enhancement of nonlinear optical properties.

Continuous Nanoparticle Assembly by a Modulated Photo-Induced Microbubble for Fabrication of Micrometric Conductive Patterns

The laser-induced microbubble technique (LIMBT) has recently been developed for micro-patterning of various materials. In this method, a laser beam is focused on a dispersion of nanoparticles leading to the formation of a microbubble due to laser heating. Convection currents around the microbubble carry nanoparticles so that they become pinned to the bubble/substrate interface. The major limitation of this technique is that for most materials, a noncontinuous deposition is formed. We show that continuous patterns can be formed by preventing the microbubble from being pinned to the deposited material. This is done by modulating the laser so that the construction and destruction of the microbubble are controlled. When the method is applied to a dispersion of Ag nanoparticles, continuous electrically conductive lines are formed. Furthermore, the line width is narrower than that achieved by the standard nonmodulated LIMBT. This approach can be applied to the direct-write fabrication of micron-size conductive patterns in electronic devices without the use of photolithography.

Fine-tunable plasma nano-machining for fabrication of 3D hollow nanostructures: SERS application

Novel processing sequences for the fabrication of artificial nanostructures are in high demand for various applications. In this paper, we report on a fine-tunable nano-machining technique for the fabrication of 3D hollow nanostructures. This technique originates from redeposition effects occurring during Ar dry etching of nano-patterns. Different geometries of honeycomb, double ring, nanotube, cone and crescent arrays have been successfully fabricated from various metals such as Au, Ag, Pt and Ti. The geometrical parameters of the 3D hollow nanostructures can be straightforwardly controlled by tuning the discharge plasma pressure and power. The structure and morphology of nanostructures are probed using atomic force microscopy (AFM), scanning electron microscopy (SEM), optical emission spectroscopy (OES) and energy dispersive x-ray spectroscopy (EDS). Finally, a Ag nanotube array was assayed for application in surface enhanced Raman spectroscopy (SERS), resulting in an enhancement factor (EF) of 5.5 × 10⁵, as an experimental validity proof consistent with the presented simulation framework. Furthermore, it was found that the theoretical EF value for the honeycomb array is in the order of 10⁷, a hundred times greater than that found in nanotube array.

Colloidal assembly and 3D shaping by dielectrophoretic confinement

For decades, scientists and engineers have strived to design means of assembling colloids into ordered structures. By now, the literature is quite peppered with reports of colloidal assemblies. However, the available methods can assemble only a narrow range of structures or are applicable to specific types of colloids. There are still only few generic methods that would lead to arbitrary colloidal arrays or would shape colloidal assemblies into predesigned structures. Here, we first discuss in detail how to spatially control the assembly and crystallization of colloids through the balance of dielectrophoretic and dipolar forces. Furthermore, we demonstrate how to flexibly program and shape arrays of 3D microstructures that can be permanently affixed by in situ UV polymerization and calcination by using two facing similar or distinct micro-fabricated electrodes.

Three-dimensional colloidal lithography

Light interactions with colloidal particles can generate a variety of complex three-dimensional (3D) intensity patterns, which can be utilized for nanolithography. The study of particle-light interactions can add more types of intensity patterns by manipulating key factors. Here we investigate a novel 3D nanolithography technique using colloidal particles under two-beam coherent illuminations. The fabricated 3D nanostructures are hollow, nested within periodic structures, and possess multiple chamber geometry. The effects of incident angles and particle size on the fabricated nanostructures were examined. The relative phase shift between particle position and interference pattern is identified as another significant parameter influencing the resultant nanostructures. A numerical model has been developed to show the evolution of nanostructure geometry with phase shifts, and experimental studies confirm the simulation results. Through the introduction of single colloidal particles, the fabrication capability of Lloyd's mirror interference can now be extended to fabrication of 3D nanostructure with complex shell geometry. The fabricated hollow nanostructures with grating background could find potential applications in the area of photonics, drug delivery, and nanofluidics.

Designing unit cell in three-dimensional periodic nanostructures using colloidal lithography

Colloidal phase-shift lithography, the illumination of a two-dimensional (2D) ordered array of self-assembled colloidal nanospheres, is an effective method for the fabrication of periodic three-dimensional (3D) nanostructures. In this work, we investigate the design and control of the unit-cell geometry by examining the relative ratio of the illumination wavelength and colloidal nanosphere diameter. Using analytical and finite-difference time-domain (FDTD) modeling, we examine the effect of the wavelength-diameter ratio on intensity pattern, lattice constants, and unit-cell geometry. These models were validated by experimental fabrication for various combination of wavelength and colloid diameter. The developed models and fabrication tools can facilitate the design and engineering of 3D periodic nanostructure for photonic crystals, volumetric electrodes, and porous materials.