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For: Hangarter CM, George T, Myung NV. Electrochemically Fabricated Microelectromechanical Systems/Nanoelectromechanical Systems (MEMS/NEMS). In: Osaka T, Datta M, Shacham-diamand Y, editors. Electrochemical Nanotechnologies. New York: Springer; 2010. pp. 187-226. [DOI: 10.1007/978-1-4419-1424-8_13] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register]
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