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Allen FI. A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:633-664. [PMID: 34285866 PMCID: PMC8261528 DOI: 10.3762/bjnano.12.52] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/19/2020] [Accepted: 04/30/2021] [Indexed: 05/28/2023]
Abstract
The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam-sample effects, to the prototyping of new devices with features in the sub-10 nm domain.
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Affiliation(s)
- Frances I Allen
- Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA
- California Institute for Quantitative Biosciences, University of California, Berkeley, CA 94720, USA
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Waugh M, Briggs K, Gunn D, Gibeault M, King S, Ingram Q, Jimenez AM, Berryman S, Lomovtsev D, Andrzejewski L, Tabard-Cossa V. Solid-state nanopore fabrication by automated controlled breakdown. Nat Protoc 2019; 15:122-143. [DOI: 10.1038/s41596-019-0255-2] [Citation(s) in RCA: 70] [Impact Index Per Article: 14.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/06/2019] [Accepted: 10/10/2019] [Indexed: 11/09/2022]
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Altintoprak K, Farajollahi F, Seidenstücker A, Ullrich T, Wenz NL, Krolla P, Plettl A, Ziemann P, Marti O, Walther P, Exner D, Schwaiger R, Gliemann H, Wege C. Improved manufacture of hybrid membranes with bionanopore adapters capable of self-luting. BIOINSPIRED BIOMIMETIC AND NANOBIOMATERIALS 2019. [DOI: 10.1680/jbibn.18.00008] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
Affiliation(s)
- Klara Altintoprak
- Department of Molecular Biology and Plant Virology, Institute of Biomaterials and Biomolecular Systems, University of Stuttgart, Stuttgart, Germany
| | - Farid Farajollahi
- Institute of Functional Interfaces, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
| | | | - Timo Ullrich
- Department of Molecular Biology and Plant Virology, Institute of Biomaterials and Biomolecular Systems, University of Stuttgart, Stuttgart, Germany
| | - Nana L Wenz
- Department of Molecular Biology and Plant Virology, Institute of Biomaterials and Biomolecular Systems, University of Stuttgart, Stuttgart, Germany
| | - Peter Krolla
- Institute of Functional Interfaces, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
| | - Alfred Plettl
- Institute of Solid State Physics, University of Ulm, Ulm, Germany
| | - Paul Ziemann
- Institute of Solid State Physics, University of Ulm, Ulm, Germany
| | - Othmar Marti
- Institute of Experimental Physics, University of Ulm, Ulm, Germany
| | - Paul Walther
- Central Facility for Electron Microscopy, University of Ulm, Ulm, Germany
| | - Daniela Exner
- Institute for Applied Materials – Materials and Biomechanics, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany; Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
| | - Ruth Schwaiger
- Institute for Applied Materials – Materials and Biomechanics, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany; Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
| | - Hartmut Gliemann
- Institute of Functional Interfaces, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany
| | - Christina Wege
- Department of Molecular Biology and Plant Virology, Institute of Biomaterials and Biomolecular Systems, University of Stuttgart, Stuttgart, Germany
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