Li L, Zhu C, Liu H, Li Y, Wang Q, Su K. Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal.
SENSORS (BASEL, SWITZERLAND) 2022;
22:7751. [PMID:
36298102 PMCID:
PMC9609283 DOI:
10.3390/s22207751]
[Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/14/2022] [Revised: 10/10/2022] [Accepted: 10/10/2022] [Indexed: 06/16/2023]
Abstract
Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of various overtone modes. First, using the finite element method to study the frequency characteristics and delay line of the SCC-PnC band, the SCC-PnC has an ultra-wide bandgap of 56.6-269.6 MHz. Next, the effects of the height h and the position h1 of the structural parameters of the small cross-connected plate on the band gap are studied, and it is found that h is more sensitive to the width of the band gap. Further, the SCC-PnC was implanted into the piezoelectric MEMS resonator, and the admittance and insertion loss curves were obtained. The results show that when the arrangement of 4 × 7 SCC-PnC plates is adopted, the anchor quality factors of the third-order overtone, fifth-order overtone, and seventh-order overtone MEMS resonators are increased by 1656 times, 2027 times, and 16 times, respectively.
Collapse