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Citation(s) in
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14
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For:
Hofmann S
, Sanz JM.
Depth Resolution and Quantitative Evaluation of AES Sputtering Profiles.
Thin Film and Depth Profile Analysis
1984. [DOI:
10.1007/978-3-642-46499-7_7
]
[
Citation(s) in
RCA
: 24
]
[
Impact Index Per Article: 0.6
]
[
Reference Citation Analysis
]
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[Indexed: 02/13/2023]
Number
Cited by Other Article(s)
1
Hofmann S
. Sputter depth profiling: past, present, and future.
SURF INTERFACE ANAL
2014. [DOI:
10.1002/sia.5489
]
[
Citation(s) in
RCA
: 20
]
[
Impact Index Per Article: 2.0
]
[
Reference Citation Analysis
]
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[Indexed: 11/10/2022]
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Affiliation(s)
S. Hofmann
Max Planck Institute for Intelligent Systems (formerly MPI for Metals Research); Heisenbergstrasse 3 70569 Stuttgart Germany
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2
Information depth determination for hard X-ray photoelectron spectroscopy up to 15 keV photoelectron kinetic energy.
SURF INTERFACE ANAL
2008. [DOI:
10.1002/sia.2920
]
[
Citation(s) in
RCA
: 34
]
[
Impact Index Per Article: 2.1
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/07/2022]
Abstract
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3
SIMS: from research to production control.
SURF INTERFACE ANAL
2003. [DOI:
10.1002/sia.1569
]
[
Citation(s) in
RCA
: 12
]
[
Impact Index Per Article: 0.6
]
[
Reference Citation Analysis
]
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[Indexed: 11/07/2022]
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4
Hofmann S
. From depth resolution to depth resolution function: refinement of the concept for delta layers, single layers and multilayers.
SURF INTERFACE ANAL
1999. [DOI:
10.1002/(sici)1096-9918(199909)27:9<825::aid-sia638>3.0.co;2-d
]
[
Citation(s) in
RCA
: 65
]
[
Impact Index Per Article: 2.6
]
[
Reference Citation Analysis
]
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[Indexed: 11/12/2022]
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5
Weiss Z
. Correcting the depth profiles broadened by the crater effect: A numerical procedure.
SURF INTERFACE ANAL
1990. [DOI:
10.1002/sia.740151213
]
[
Citation(s) in
RCA
: 5
]
[
Impact Index Per Article: 0.1
]
[
Reference Citation Analysis
]
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[Indexed: 11/06/2022]
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6
Pamler W
, Wildenauer E, Mitwalsky A. Improved depth resolution in Auger depth profiles of TiN thin films by optimized sputtering parameters.
SURF INTERFACE ANAL
1990. [DOI:
10.1002/sia.740151010
]
[
Citation(s) in
RCA
: 17
]
[
Impact Index Per Article: 0.5
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/11/2022]
Abstract
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7
Bukaluk A
. AES depth profile studies of interdiffusion in the AgCu bilayer and multilayer thin films.
ACTA ACUST UNITED AC
1990. [DOI:
10.1002/pssa.2211180111
]
[
Citation(s) in
RCA
: 17
]
[
Impact Index Per Article: 0.5
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/08/2022]
Abstract
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8
Queirolo G
, Manzini S, Meda L, Anderle M, Canteri R, Armigliato A, Frabboni S. On the silicon dioxide/polycrystalline silicon interface width measurement.
SURF INTERFACE ANAL
1988. [DOI:
10.1002/sia.740130406
]
[
Citation(s) in
RCA
: 4
]
[
Impact Index Per Article: 0.1
]
[
Reference Citation Analysis
]
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[Indexed: 11/09/2022]
Abstract
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9
Lam NQ
. Ion bombardment effects on the near-surface composition during sputter profiling.
SURF INTERFACE ANAL
1988. [DOI:
10.1002/sia.740120202
]
[
Citation(s) in
RCA
: 70
]
[
Impact Index Per Article: 1.9
]
[
Reference Citation Analysis
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[Indexed: 11/10/2022]
Abstract
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10
Tapping RL
, Davidson RD, Jackman TE, Davies JA. Effect of analytical method on thickness measurements of thin oxide films.
SURF INTERFACE ANAL
1988. [DOI:
10.1002/sia.740110806
]
[
Citation(s) in
RCA
: 12
]
[
Impact Index Per Article: 0.3
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/06/2022]
Abstract
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11
Mischler S
, Mathieu HJ, Landolt D. Investigation of a passive film on an ironchromium alloy by AES and XPS.
SURF INTERFACE ANAL
1988. [DOI:
10.1002/sia.740110403
]
[
Citation(s) in
RCA
: 86
]
[
Impact Index Per Article: 2.4
]
[
Reference Citation Analysis
]
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[Indexed: 11/07/2022]
Abstract
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12
Hofmann S
, Zalar A. Depth resolution improvement in AES sputter profiling of Ni/Cr multilayers on rough substrates using two ion beams.
SURF INTERFACE ANAL
1987. [DOI:
10.1002/sia.740100103
]
[
Citation(s) in
RCA
: 17
]
[
Impact Index Per Article: 0.5
]
[
Reference Citation Analysis
]
[
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[Indexed: 11/12/2022]
Abstract
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13
Sanz JM
, Hofmann S. Quantitative AES depth profiling of very thin overlayers.
SURF INTERFACE ANAL
1986. [DOI:
10.1002/sia.740080403
]
[
Citation(s) in
RCA
: 41
]
[
Impact Index Per Article: 1.1
]
[
Reference Citation Analysis
]
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[Indexed: 11/07/2022]
Abstract
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14
Hofmann S
. Determination of depth resolution from measured sputtering profiles of multilayer structures: Equations and approximations.
SURF INTERFACE ANAL
1986. [DOI:
10.1002/sia.740080209
]
[
Citation(s) in
RCA
: 49
]
[
Impact Index Per Article: 1.3
]
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[Indexed: 11/09/2022]
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