New developments in theory of fast electron scattering in solids: Applications to microbeam analysis

Coherent light emission in cathodoluminescence when using GaAs in a scanning (transmission) electron microscope

For most materials science oriented applications incoherent cathodoluminescence (CL) is of main interest, for which the recombination of electron-hole pairs yields the emission of light. However, the incoherent signal is superimposed by coherently excited photons, similar to the situation for X-rays in Energy-Dispersive X-ray spectra (EDX). In EDX two very different processes superimpose in each spectrum: Bremsstrahlung and characteristic X-ray radiation. Both processes yield X-rays, however, their origin is substantially different. Therefore, in the present CL study we focus on the coherent emission of light, in particular Čerenkov radiation. We use a 200μm thick GaAs sample, not electron transparent and therefore not acting as a light guide, and investigate the radiation emitted from the top surface of the sample generated by back-scattered electrons on their way out of the specimen. The CL spectra revealed a pronounced peak corresponding to the expected interband transition. This peak was at 892 nm at room temperature and shifted to 845 nm at 80 K. The coherent light emission significantly modifies the shape of CL spectra at elevated beam energies. For the first time, by the systematic variation of current and energy of primary electrons we could distinguish the coherent and incoherent light superimposed in CL spectra. These findings are essential for the correct interpretation of CL spectra in STEM. The Čerenkov intensity as well as the total intensity in a spectrum scales linearly with the beam current. Additionally, we investigate the influence of asymmetric mirrors on the spectral shapes, collecting roughly only half of the whole solid angle. Different emission behaviour of different physical causes thus lead to changes in the overall spectral shape.

The sensitivity of backscattering coefficients to elastic scattering cross-sections and electron stopping powers

The sensitivity of Monte Carlo estimates of backscattering coefficients η to the accuracy of their input data is examined by studying the percentage change in η due to changes of 10% and 20% in the differential elastic scattering cross-section dσ/dΩ and corresponding changes in the stopping power S(E) in the primary energy range 200-10,000 eV. To a good approximation equivalent elastic and inelastic scattering changes produce equal and opposite shifts in η, a result consistent with predictions of transport theory. For medium to high atomic numbers an x% error in the specification of either S(E) or dσ/dΩ produces a percentage change in η significantly less than x%, while at low atomic number Δη/η increases approximately linearly with ln E so that Monte Carlo predictions are then more sensitive to parameter precision at high energy.