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Li M, Qin G, Jia C, Zhang D, Li Z, Han X, Xu S, Zhao L, Luo G, Liu C, Yang P, Lin Q. Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors. MICROSYSTEMS & NANOENGINEERING 2024; 10:102. [PMID: 39045232 PMCID: PMC11263615 DOI: 10.1038/s41378-024-00740-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/14/2023] [Revised: 06/14/2024] [Accepted: 06/18/2024] [Indexed: 07/25/2024]
Abstract
With the rapid development of various fields, including aerospace, industrial measurement and control, and medical monitoring, the need to quantify flow velocity measurements is increasing. It is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges, susceptibility to environmental impacts, and instability. Herein, to optimize sensor performance, a flexible microelectromechanical system (MEMS) thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO2 (PI/SiO2) composite porous film to broaden the measurement range and improve the sensitivity. The measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4 mm/s. The average sensitivities of the sensor are 59.49 mV/(m s-1) in the medium-to-low wind velocity range of 0-2 m/s and 467.31 mV/(m s-1) in the wind velocity range of 2-30 m/s. The sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.
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Affiliation(s)
- Min Li
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Guangzhao Qin
- Brightstone Innovation (Yantai) Research Institute for Micronano Sensing Technology, Yantai, 264006 China
| | - Chen Jia
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Danyu Zhang
- Xi’an Jingwei Sensing Technology Co., Ltd., Xi’an, 712000 China
| | - Zhikang Li
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Xiangguang Han
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Shusheng Xu
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Libo Zhao
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Guoxi Luo
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
| | - Cunlang Liu
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- Xi’an Jingwei Sensing Technology Co., Ltd., Xi’an, 712000 China
| | - Ping Yang
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
- Xi’an Jingwei Sensing Technology Co., Ltd., Xi’an, 712000 China
| | - Qijing Lin
- State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an, 710049 China
- School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an, 710049 China
- Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai, 264000 China
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