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Xing Y, Wang W, Liu W, Song Z. Enhancing Slurry Stability and Surface Flatness of Silicon Wafers through Organic Amine-Catalyzed Synthesis Silica Sol. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1371. [PMID: 39195409 DOI: 10.3390/nano14161371] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/22/2024] [Revised: 08/10/2024] [Accepted: 08/15/2024] [Indexed: 08/29/2024]
Abstract
The stability of slurries used for chemical mechanical polishing (CMP) is a crucial concern in industrial chip production, influencing both the quality and cost-effectiveness of polishing fluids. In silicon wafer polishing, the conventional use of commercial neutral silica sol combined with organic bases often leads to slurry instability. To address this issue, this study proposes organic amines-specifically ethanolamine (MEA), ethylenediamine (EDA), and tetramethylammonium hydroxide (TMAOH)-as catalysts for synthesizing alkaline silica sol tailored for silicon wafer polishing fluids. Sol-gel experiments and zeta potential measurements demonstrate the efficacy of this approach in enhancing the stability of silica sol. The quantitative analysis of surface hydroxyl groups reveals a direct correlation between enhanced stability and increased hydroxyl content. The application of the alkaline silica sol in silicon wafer polishing fluids improves polishing rates and enhances surface flatness according to atomic force microscopy (AFM). In addition, electrochemical experiments validate the capability of this polishing solution to mitigate corrosion on silicon wafer surfaces. These findings hold significant implications for the advancement of chemical mechanical polishing techniques in the field of integrated circuit fabrication.
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Affiliation(s)
- Yi Xing
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning, Shanghai 200050, China
- University of Chinese Academy of Sciences, Shijingshan, Beijing 100049, China
| | - Weilei Wang
- Zhejiang Xinchuangna Electronic Technology Co., Ltd., Haining 314406, China
| | - Weili Liu
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning, Shanghai 200050, China
- Zhejiang Xinchuangna Electronic Technology Co., Ltd., Haining 314406, China
| | - Zhitang Song
- State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning, Shanghai 200050, China
- Zhejiang Xinchuangna Electronic Technology Co., Ltd., Haining 314406, China
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Luo J, Zhang M, Yang Y, Yu C. Synthesis of dendritic mesoporous organosilica nanoparticles under a mild acidic condition with homogeneous wall structure and near-neutral surface. Chem Commun (Camb) 2021; 57:4416-4419. [PMID: 33949408 DOI: 10.1039/d0cc08017a] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/19/2022]
Abstract
Dendritic mesoporous organosilica nanoparticles were synthesized under a mild acidic condition (pH 6.2), featuring a molecularly homogeneous wall structure and an unusual near-neutral charged surface, consequently enabling reduced protein fouling property.
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Affiliation(s)
- Jiangqi Luo
- Australian Institute for Bioengineering and Nanotechnology, The University of Queensland, Brisbane, QLD 4072, Australia.
| | - Min Zhang
- School of Chemistry and Molecular Engineering, East China Normal University, Shanghai 200241, P. R. China
| | - Yannan Yang
- Australian Institute for Bioengineering and Nanotechnology, The University of Queensland, Brisbane, QLD 4072, Australia.
| | - Chengzhong Yu
- Australian Institute for Bioengineering and Nanotechnology, The University of Queensland, Brisbane, QLD 4072, Australia. and School of Chemistry and Molecular Engineering, East China Normal University, Shanghai 200241, P. R. China
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Zhang JF, Zhong R, Zhou Q, Hong X, Huang S, Cui HZ, Hou XF. Recyclable Silica-Supported Iridium Catalysts for Selective Reductive Transformation of Quinolines with Formic Acid in Water. ChemCatChem 2017. [DOI: 10.1002/cctc.201700128] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
Affiliation(s)
- Jing-Fan Zhang
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - Rui Zhong
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - Quan Zhou
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - Xi Hong
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - Shuang Huang
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - He-Zhen Cui
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
| | - Xiu-Feng Hou
- Department of Chemistry; Fudan University; 220 Handan Road Shanghai 200433 P.R. China
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Dixit CK, Bhakta S, Kumar A, Suib SL, Rusling JF. Fast nucleation for silica nanoparticle synthesis using a sol-gel method. NANOSCALE 2016; 8:19662-19667. [PMID: 27858036 PMCID: PMC5137187 DOI: 10.1039/c6nr07568a] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
We have developed a method that for the first time allowed us to synthesize silica particles in 20 minutes using a sol-gel preparation. Therefore, it is critically important to understand the synthesis mechanism and kinetic behavior in order to achieve a higher degree of fine tuning ability during the synthesis. In this study, we have employed our ability to modulate the physical nature of the reaction medium from sol-gel to emulsion, which has allowed us to halt the reaction at a particular time; this has allowed us to precisely understand the mechanism and chemistry of the silica polymerization. The synthesis medium is kept quite simple with tetraethyl orthosilicate (TEOS) as a precursor in an equi-volumetric ethanol-water system and with sodium hydroxide as a catalyst. Synthesis is performed under ambient conditions at 20 °C for 20 minutes followed by phasing out of any unreacted TEOS and polysilicic acid chains via their emulsification with supersaturated water. We have also demonstrated that the developed particles with various sizes can be used as seeds for further particle growth and other applications. Luminol, a chemiluminescent molecule, has been entrapped successfully between the layers of silica and was demonstrated for the chemiluminescence of these particles.
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Affiliation(s)
- Chandra K Dixit
- Department of Chemistry, University of Connecticut, Storrs, Connecticut, USA.
| | - Snehasis Bhakta
- Department of Chemistry, University of Connecticut, Storrs, Connecticut, USA.
| | - Ajeet Kumar
- Chemistry and Biomolecular Science, Clarkson University, Potsdam, New York, USA
| | - Steven L Suib
- Department of Chemistry, University of Connecticut, Storrs, Connecticut, USA. and Institute of Materials Science, University of Connecticut, Storrs, Connecticut, USA
| | - James F Rusling
- Department of Chemistry, University of Connecticut, Storrs, Connecticut, USA. and Institute of Materials Science, University of Connecticut, Storrs, Connecticut, USA and Department of Cell Biology, University of Connecticut Health Center, Farmington, Connecticut, USA and School of Chemistry, National University of Ireland at Galway, Galway, Ireland
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Affiliation(s)
- Christoph Rücker
- Institute for Sustainable and Environmental Chemistry, Leuphana University Lüneburg , Scharnhorststrasse 1, D-21335 Lüneburg, Germany
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Pfeifer S, Gutierrez A, Kroke E. An s-triazine briged silylalkyl sol-gel precursor-synthesis, structure and coating formation for electrical insulation of copper wire and corrosion protection of construction steel. POLYM ADVAN TECHNOL 2014. [DOI: 10.1002/pat.3379] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Affiliation(s)
- Stefan Pfeifer
- Institute of Inorganic Chemistry; TU Bergakademie Freiberg; Leipziger Str. 29 D-09596 Freiberg Germany
| | - Alejandro Gutierrez
- Van Loon Chemical Innovation; Science Park 408 1098 XH Amsterdam The Netherlands
| | - Edwin Kroke
- Institute of Inorganic Chemistry; TU Bergakademie Freiberg; Leipziger Str. 29 D-09596 Freiberg Germany
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Zhai Q, Zhou C, Zhao S, Peng C, Han Y. Kinetic Study of Alkoxysilane Hydrolysis under Acidic Conditions by Fourier Transform Near Infrared Spectroscopy Combined with Partial Least-Squares Model. Ind Eng Chem Res 2014. [DOI: 10.1021/ie5012195] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Qianqian Zhai
- School
of Materials Science and Engineering, Shandong University, Jinan 250061, People’s Republic of China
| | - Chuanjian Zhou
- School
of Materials Science and Engineering, Shandong University, Jinan 250061, People’s Republic of China
| | - Shigui Zhao
- School
of Materials Science and Engineering, Shandong University, Jinan 250061, People’s Republic of China
| | - Cun Peng
- School
of Materials Science and Engineering, Shandong University, Jinan 250061, People’s Republic of China
| | - Yingchao Han
- School
of Chemistry and Chemical Engineering, Shandong University, Jinan 250100, People’s Republic of China
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Miloskovska E, Hansen MR, Friedrich C, Hristova-Bogaerds D, van Duin M, de With G. In Situ Silica Nanoparticle Formation in a Rubber Matrix Monitored via Real-Time SAXS and Solid-State NMR Spectroscopy. Macromolecules 2014. [DOI: 10.1021/ma500594a] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
Affiliation(s)
- Elena Miloskovska
- Department of Chemical Engineering & Chemistry, Laboratory of Polymer Technology, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
- Dutch Polymer
Institute (DPI), P.O. Box 902, 5600 AX, Eindhoven, The Netherlands
| | - Michael Ryan Hansen
- Max Planck Institute
for Polymer Research, Ackermannweg
10, 55021 Mainz, Germany
- Interdisciplinary
Nanoscience Center (iNANO) and Department of Chemistry, Aarhus University, Gustav Wieds Vej 14, DK-8000 Aarhus C, Denmark
| | - Cornelius Friedrich
- Max Planck Institute
for Polymer Research, Ackermannweg
10, 55021 Mainz, Germany
| | - Denka Hristova-Bogaerds
- Department of Chemical Engineering & Chemistry, Laboratory of Polymer Technology, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
| | - Martin van Duin
- LANXESS Elastomers R&D, P.O. Box 185, 6160 AD Geleen, The Netherlands
| | - Gijsbertus de With
- Department of Chemical Engineering & Chemistry, Laboratory of Materials and Interface Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
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One-pot synthesis of antibacterial monomers with dual biocidal modes. J Dent 2014; 42:1078-95. [PMID: 24930871 DOI: 10.1016/j.jdent.2014.06.001] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/14/2014] [Revised: 05/27/2014] [Accepted: 06/03/2014] [Indexed: 12/30/2022] Open
Abstract
OBJECTIVES The present study reported a method for preparing a blend of antibacterial quaternary ammonium silanes and quaternary ammonium methacryloxy silane (QAMS) based on the sol-gel reaction between dimethyldiethoxy silane and two trialkoxysilanes, one with an antibacterial quaternary ammonium functionality and the other with a methacryloxy functionality. METHODS Reaction products of the sol-gel reaction were characterised by direct infusion mass spectrometry, FTIR and proton, carbon and silicon NMR. This blend of monomers was incorporated into an experimental universal adhesive for evaluation of antimicrobial activity against Streptococcus mutans biofilms, microtensile bond strength and cytotoxicty. Retention of quaternary ammonium species on polymerised adhesive, leaching of these species from the adhesive and the ability of resin-dentine interfaces to inhibit S. mutans biofilms were evaluated over a 3-month water-ageing period. RESULTS The antibacterial adhesive version killed bacteria in S. mutans biofilms not only through the release of non-copolymerisable quaternary ammonium silane species (release-killing), but also via immobilised quaternary ammonium methacryloxy silane that are copolymerised with adhesive resin comonomers (contact-killing). Contact-killing was retained after water-ageing. The QAMS-containing universal adhesive has similar tensile bond strength as the control and two commercially available universal adhesives, when it was used for bonding to dentine in the etch-and-rinse mode and self-etching mode. Incorporation of the antimicrobial quaternary ammonium species blend did not adversely affect the cytotoxicity of the universal adhesive formulation. CONCLUSIONS Instead of using quaternary ammonium dimethacrylates and nanosilver, an alternative bimodal antimicrobial strategy for formulating antimicrobial universal dentine adhesives is achieved using the one-pot sol-gel synthesis scheme. CLINICAL SIGNIFICANCE The QAMS containing universal dentine adhesives with dual antimicrobial activity is a promising material aimed at preventing second caries and prolonging the longevity of resin composite restorations.
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Pfeifer S, Schwarzer A, Schmidt D, Brendler E, Veith M, Kroke E. Precursors for pyromellit-bridged silica sol–gel hybrid materials. NEW J CHEM 2013. [DOI: 10.1039/c2nj40538e] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Fouilloux S, Désert A, Taché O, Spalla O, Daillant J, Thill A. SAXS exploration of the synthesis of ultra monodisperse silica nanoparticles and quantitative nucleation growth modeling. J Colloid Interface Sci 2010; 346:79-86. [DOI: 10.1016/j.jcis.2010.02.052] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/02/2009] [Revised: 02/04/2010] [Accepted: 02/23/2010] [Indexed: 10/19/2022]
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Marini M, Pourabbas B, Pilati F, Fabbri P. Functionally modified core-shell silica nanoparticles by one-pot synthesis. Colloids Surf A Physicochem Eng Asp 2008. [DOI: 10.1016/j.colsurfa.2007.11.022] [Citation(s) in RCA: 65] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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