2
|
Xu H, Han L, Su JJ, Tian ZQ, Zhan D. Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography. Sci China Chem 2022. [DOI: 10.1007/s11426-021-1194-3] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
|
3
|
Han L, Hu Z, Sartin MM, Wang X, Zhao X, Cao Y, Yan Y, Zhan D, Tian ZQ. Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy. Angew Chem Int Ed Engl 2020; 59:21129-21134. [PMID: 32737918 DOI: 10.1002/anie.202008697] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/21/2020] [Indexed: 11/06/2022]
Abstract
Scanning electrochemical microscopy (SECM) is one of the most important instrumental methods of modern electrochemistry due to its high spatial and temporal resolution. We introduced SECM into nanomachining by feeding the electrochemical modulations of the tip electrode back to the positioning system, and we demonstrated that SECM is a versatile nanomachining technique on semiconductor wafers using electrochemically induced chemical etching. The removal profile was correlated to the applied tip current when the tip was held stationary and when it was moving slowly (<20 μm s-1 ), and it followed Faraday's law. Both regular and irregular nanopatterns were translated into a spatially distributed current by the homemade digitally controlled SECM instrument. The desired nanopatterns were "sculpted" directly on a semiconductor wafer by SECM direct-writing mode. The machining accuracy was controlled to the sub-micrometer and even nanometer scales. This advance is expected to play an important role in electrochemical nanomachining for 3D micro/nanostructures in the semiconductor industry.
Collapse
Affiliation(s)
- Lianhuan Han
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China.,Department of Mechanical and Electrical Engineering, School of Aerospace Engineering, Xiamen University, Xiamen, 361005, China.,State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Zhenjiang Hu
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China
| | - Matthew M Sartin
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Xiaole Wang
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China
| | - Xuesen Zhao
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China
| | - Yongzhi Cao
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China
| | - Yongda Yan
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Centre for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China
| | - Dongping Zhan
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| | - Zhong-Qun Tian
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China
| |
Collapse
|
4
|
Han L, Hu Z, Sartin MM, Wang X, Zhao X, Cao Y, Yan Y, Zhan D, Tian Z. Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy. Angew Chem Int Ed Engl 2020. [DOI: 10.1002/ange.202008697] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
Affiliation(s)
- Lianhuan Han
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
- Department of Mechanical and Electrical Engineering School of Aerospace Engineering Xiamen University Xiamen 361005 China
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) Collaborative Innovation Center of Chemistry for Energy Materials (iChEM) Engineering Research Center of Electrochemical Technologies of Ministry of Education Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University Xiamen 361005 China
| | - Zhenjiang Hu
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
| | - Matthew M. Sartin
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) Collaborative Innovation Center of Chemistry for Energy Materials (iChEM) Engineering Research Center of Electrochemical Technologies of Ministry of Education Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University Xiamen 361005 China
| | - Xiaole Wang
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
| | - Xuesen Zhao
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
| | - Yongzhi Cao
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
| | - Yongda Yan
- Department Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education Centre for Precision Engineering Harbin Institute of Technology Harbin 150001 China
| | - Dongping Zhan
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) Collaborative Innovation Center of Chemistry for Energy Materials (iChEM) Engineering Research Center of Electrochemical Technologies of Ministry of Education Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University Xiamen 361005 China
| | - Zhong‐Qun Tian
- State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS) Collaborative Innovation Center of Chemistry for Energy Materials (iChEM) Engineering Research Center of Electrochemical Technologies of Ministry of Education Department of Chemistry College of Chemistry and Chemical Engineering Xiamen University Xiamen 361005 China
| |
Collapse
|
5
|
Zhang J, Chen D, Guo J, Sartin MM, Tian ZQ, Tian ZW, Zhan D. Mold forming of multilevel nanogratings by electrochemical buckling microfabrication. J Electroanal Chem (Lausanne) 2020. [DOI: 10.1016/j.jelechem.2020.114273] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
|