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For: Zhang X, Johnston KP. Supercritical CO2-based solvents in next generation microelectronics processing. ACTA ACUST UNITED AC 2007;52:27-33. [DOI: 10.1007/s11434-007-0002-x] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
Number Cited by Other Article(s)
1
Romang AH, Watkins JJ. Supercritical fluids for the fabrication of semiconductor devices: emerging or missed opportunities? Chem Rev 2010;110:459-78. [PMID: 20017473 DOI: 10.1021/cr900255w] [Citation(s) in RCA: 94] [Impact Index Per Article: 6.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022]
2
Hemmateenejad B, Shamsipur M, Miri R, Elyasi M, Foroghinia F, Sharghi H. Linear and nonlinear quantitative structure–property relationship models for solubility of some anthraquinone, anthrone and xanthone derivatives in supercritical carbon dioxide. Anal Chim Acta 2008;610:25-34. [DOI: 10.1016/j.aca.2008.01.011] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/18/2007] [Revised: 12/22/2007] [Accepted: 01/04/2008] [Indexed: 10/22/2022]
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