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Wang X, Liang F, Zhao D, Liu Z, Zhu J, Yang J. Investigations on the Optical Properties of InGaN/GaN Multiple Quantum Wells with Varying GaN Cap Layer Thickness. NANOSCALE RESEARCH LETTERS 2020; 15:191. [PMID: 33001341 PMCID: PMC7530159 DOI: 10.1186/s11671-020-03420-y] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/12/2020] [Accepted: 09/22/2020] [Indexed: 06/11/2023]
Abstract
Three InGaN/GaN MQWs samples with varying GaN cap layer thickness were grown by metalorganic chemical vapor deposition (MOCVD) to investigate the optical properties. We found that a thicker cap layer is more effective in preventing the evaporation of the In composition in the InGaN quantum well layer. Furthermore, the quantum-confined Stark effect (QCSE) is enhanced with increasing the thickness of GaN cap layer. In addition, compared with the electroluminescence measurement results, we focus on the difference of localization states and defects in three samples induced by various cap thickness to explain the anomalies in room temperature photoluminescence measurements. We found that too thin GaN cap layer will exacerbates the inhomogeneity of localization states in InGaN QW layer, and too thick GaN cap layer will generate more defects in GaN cap layer.
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Affiliation(s)
- Xiaowei Wang
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Feng Liang
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
| | - Degang Zhao
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.
| | - Zongshun Liu
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
| | - Jianjun Zhu
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
| | - Jing Yang
- State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
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Zhu Y, Lu T, Zhou X, Zhao G, Dong H, Jia Z, Liu X, Xu B. Effect of hydrogen treatment temperature on the properties of InGaN/GaN multiple quantum wells. NANOSCALE RESEARCH LETTERS 2017; 12:321. [PMID: 28472870 PMCID: PMC5413467 DOI: 10.1186/s11671-017-2109-6] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/20/2017] [Accepted: 04/24/2017] [Indexed: 06/07/2023]
Abstract
InGaN/GaN multiple quantum wells (MQWs) were grown with hydrogen treatment at well/barrier upper interface under different temperatures. Hydrogen treatment temperature greatly affects the characteristics of MQWs. Hydrogen treatment conducted at 850 °C improves surface and interface qualities of MQWs, as well as significantly enhances room temperature photoluminescence (PL) intensity. In contrast, the sample with hydrogen treatment at 730 °C shows no improvement, as compared with the reference sample without hydrogen treatment. On the basis of temperature-dependent PL characteristics analysis, it is concluded that hydrogen treatment at 850 °C is more effective in reducing defect-related non-radiative recombination centers in MQWs region, yet has little impact on carrier localization. Hence, hydrogen treatment temperature is crucial to improving the quality of InGaN/GaN MQWs.
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Affiliation(s)
- Yadan Zhu
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Taiping Lu
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China.
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China.
| | - Xiaorun Zhou
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Guangzhou Zhao
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Hailiang Dong
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Zhigang Jia
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Xuguang Liu
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China
- College of Chemistry and Chemical Engineering, Taiyuan University of Technology, 030024, Taiyuan, China
| | - Bingshe Xu
- Key Laboratory of Interface Science and Engineering in Advanced Materials, Ministry of Education, Taiyuan University of Technology, 030024, Taiyuan, China.
- Research Center of Advanced Materials Science and Technology, Taiyuan University of Technology, 030024, Taiyuan, China.
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Puybaret R, Rogers DJ, Gmili YE, Sundaram S, Jordan MB, Li X, Patriarche G, Teherani FH, Sandana EV, Bove P, Voss PL, McClintock R, Razeghi M, Ferguson I, Salvestrini JP, Ougazzaden A. Nanoselective area growth of defect-free thick indium-rich InGaN nanostructures on sacrificial ZnO templates. NANOTECHNOLOGY 2017; 28:195304. [PMID: 28358724 DOI: 10.1088/1361-6528/aa6a43] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Nanoselective area growth (NSAG) by metal organic vapor phase epitaxy of high-quality InGaN nanopyramids on GaN-coated ZnO/c-sapphire is reported. Nanopyramids grown on epitaxial low-temperature GaN-on-ZnO are uniform and appear to be single crystalline, as well as free of dislocations and V-pits. They are also indium-rich (with homogeneous 22% indium incorporation) and relatively thick (100 nm). These properties make them comparable to nanostructures grown on GaN and AlN/Si templates, in terms of crystallinity, quality, morphology, chemical composition and thickness. Moreover, the ability to selectively etch away the ZnO allows for the potential lift-off and transfer of the InGaN/GaN nanopyramids onto alternative substrates, e.g. cheaper and/or flexible. This technology offers an attractive alternative to NSAG on AlN/Si as a platform for the fabrication of high quality, thick and indium-rich InGaN monocrystals suitable for cheap, flexible and tunable light-emitting diodes.
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Affiliation(s)
- Renaud Puybaret
- Georgia Institute of Technology, School of Electrical and Computer Engineering, Atlanta, GA 30332, United States of America. CNRS, GT UMI 2958, Georgia Tech Lorraine, 2 Rue Marconi, F-57070 Metz, France
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Wafer-scale Thermodynamically Stable GaN Nanorods via Two-Step Self-Limiting Epitaxy for Optoelectronic Applications. Sci Rep 2017; 7:40893. [PMID: 28098259 PMCID: PMC5241666 DOI: 10.1038/srep40893] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/05/2016] [Accepted: 12/12/2016] [Indexed: 02/01/2023] Open
Abstract
We present a method of epitaxially growing thermodynamically stable gallium nitride (GaN) nanorods via metal-organic chemical vapor deposition (MOCVD) by invoking a two-step self-limited growth (TSSLG) mechanism. This allows for growth of nanorods with excellent geometrical uniformity with no visible extended defects over a 100 mm sapphire (Al2O3) wafer. An ex-situ study of the growth morphology as a function of growth time for the two self-limiting steps elucidate the growth dynamics, which show that formation of an Ehrlich-Schwoebel barrier and preferential growth in the c-plane direction governs the growth process. This process allows monolithic formation of dimensionally uniform nanowires on templates with varying filling matrix patterns for a variety of novel electronic and optoelectronic applications. A color tunable phosphor-free white light LED with a coaxial architecture is fabricated as a demonstration of the applicability of these nanorods grown by TSSLG.
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Chen CK, Chen SH. Multi-electrolyte-step anodic aluminum oxide method for the fabrication of self-organized nanochannel arrays. NANOSCALE RESEARCH LETTERS 2012; 7:122. [PMID: 22333268 PMCID: PMC3305497 DOI: 10.1186/1556-276x-7-122] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/22/2011] [Accepted: 02/14/2012] [Indexed: 05/31/2023]
Abstract
Nanochannel arrays were fabricated by the self-organized multi-electrolyte-step anodic aluminum oxide [AAO] method in this study. The anodization conditions used in the multi-electrolyte-step AAO method included a phosphoric acid solution as the electrolyte and an applied high voltage. There was a change in the phosphoric acid by the oxalic acid solution as the electrolyte and the applied low voltage. This method was used to produce self-organized nanochannel arrays with good regularity and circularity, meaning less power loss and processing time than with the multi-step AAO method.
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Affiliation(s)
- Chun-Ko Chen
- Department of Optics and Photonics, National Central University, 300 Chung-Da Rd., Chung-Li, Taoyuan, 320, Taiwan
| | - Sheng-Hui Chen
- Department of Optics and Photonics, National Central University, 300 Chung-Da Rd., Chung-Li, Taoyuan, 320, Taiwan
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Ingham CJ, ter Maat J, de Vos WM. Where bio meets nano: the many uses for nanoporous aluminum oxide in biotechnology. Biotechnol Adv 2011; 30:1089-99. [PMID: 21856400 DOI: 10.1016/j.biotechadv.2011.08.005] [Citation(s) in RCA: 69] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/10/2011] [Revised: 07/28/2011] [Accepted: 08/03/2011] [Indexed: 01/17/2023]
Abstract
Porous aluminum oxide (PAO) is a ceramic formed by an anodization process of pure aluminum that enables the controllable assembly of exceptionally dense and regular nanopores in a planar membrane. As a consequence, PAO has a high porosity, nanopores with high aspect ratio, biocompatibility and the potential for high sensitivity imaging and diverse surface modifications. These properties have made this unusual material attractive to a disparate set of applications. This review examines how the structure and properties of PAO connect with its present and potential uses within research and biotechnology. The role of PAO is covered in areas including microbiology, mammalian cell culture, sensitive detection methods, microarrays and other molecular assays, and in creating new nanostructures with further uses within biology.
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Liu KW, Chang SJ, Young SJ, Hsueh TH, Hung H, Mai YC, Wang SM, Chen KJ, Wu YL, Chen YZ. InN nanorods prepared with CrN nanoislands by plasma-assisted molecular beam epitaxy. NANOSCALE RESEARCH LETTERS 2011; 6:442. [PMID: 21736722 PMCID: PMC3211861 DOI: 10.1186/1556-276x-6-442] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/29/2011] [Accepted: 07/07/2011] [Indexed: 05/31/2023]
Abstract
The authors report the influence of CrN nanoisland inserted on growth of baseball-bat InN nanorods by plasma-assisted molecular beam epitaxy under In-rich conditions. By inserting CrN nanoislands between AlN nucleation layer and the Si (111) substrate, it was found that we could reduce strain form Si by inserting CrN nanoisland, FWHM of the x-ray rocking curve measured from InN nanorods from 3,299 reduced to 2,115 arcsec. It is due to the larger strain from lattice miss-match of the film-like InN structure; however, the strain from lattice miss-match was obvious reduced owing to CrN nanoisland inserted. The TEM images confirmed the CrN structures and In droplets dissociation from InN, by these results, we can speculate the growth mechanism of baseball-bat-like InN nanorods.
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Affiliation(s)
- Kuang-Wei Liu
- Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Shoou-Jinn Chang
- Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
- Institute of Microelectronics and Department of Electrical Engineering, Advanced Optoelectronic Technology Center, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Sheng-Joue Young
- Department of Electronic Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan, Republic of China
| | - Tao-Hung Hsueh
- Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Hung Hung
- Institute of Microelectronics and Department of Electrical Engineering, Advanced Optoelectronic Technology Center, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Yu-Chun Mai
- Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Shih-Ming Wang
- Institute of Microelectronics and Department of Electrical Engineering, Advanced Optoelectronic Technology Center, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Kuan-Jen Chen
- Institute of Microelectronics and Department of Electrical Engineering, Advanced Optoelectronic Technology Center, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Ya-Ling Wu
- Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
| | - Yue-Zhang Chen
- Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China
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