Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Tailorable ITO thin films for tunable microwave photonic applications

Tunability is a fundamental prerequisite for functional devices and forms the backbone of reconfigurable microwave photonic (MWP) signal processors. In this paper, we explore the use of indium tin oxide (ITO) thin films, notable for their combination of optical transparency and electrical conductivity, to provide tunability for integrated MWP devices. We study the impacts of post-thermal annealing on the structural, electrical, and optical properties of ITO films. The annealed ITO microheater maintains a low total insertion loss of just 0.1 dB while facilitating the tunability of the microring across the entire free spectral range (FSR) using less than half the voltage required by its non-annealed counterpart. Furthermore, the post-annealed ITO film exhibits a 30% improvement in response time, enhancing its performance as an active voltage-controlled microheater. Leveraging this advantage, we employed the post-annealed device to demonstrate continuous tunable radio frequency (RF) phase shifts from 0-330° across a frequency range spanning 15 GHz to 40 GHz with only 5.58 mW of power. The flexibility in modifying the ITO thin film properties effectively bridges the gap between achieving low-loss and high-speed thermo-optic based microheaters.

The Goldilocks principle of learning unitaries by interlacing fixed operators with programmable phase shifters on a photonic chip

Programmable photonic integrated circuits represent an emerging technology that amalgamates photonics and electronics, paving the way for light-based information processing at high speeds and low power consumption. Programmable photonics provides a flexible platform that can be reconfigured to perform multiple tasks, thereby holding great promise for revolutionizing future optical networks and quantum computing systems. Over the past decade, there has been constant progress in developing several different architectures for realizing programmable photonic circuits that allow for realizing arbitrary discrete unitary operations with light. Here, we systematically investigate a general family of photonic circuits for realizing arbitrary unitaries based on a simple architecture that interlaces a fixed intervening layer with programmable phase shifter layers. We introduce a criterion for the intervening operator that guarantees the universality of this architecture for representing arbitrary N × N unitary operators with N + 1 phase layers. We explore this criterion for different photonic components, including photonic waveguide lattices and meshes of directional couplers, which allows the identification of several families of photonic components that can serve as the intervening layers in the interlacing architecture. Our findings pave the way for efficiently designing and realizing novel families of programmable photonic integrated circuits for multipurpose analog information processing.

High-precision frequency-controlled optical phase shifter with acousto-optic devices

A fundamental parameter to determine how electromagnetic waves interfere is their relative phase, and achieving a fine control over it enables a wide range of interferometric applications. Existing phase control methods rely on modifying the optical path length either by changing the path followed by the light or by altering the thickness or index of refraction of an optical element in the setup. In this Letter, we present a novel, to the best of our knowledge, method, based on acousto-optic modulators (AOMs), which allows adjusting the phase by shifting the frequency of the light in a segment of its path. Since the amount of phase shift depends on the length of the segment, an optical fiber is used to realize a 2π shift. Two experimental implementations are described which deal with different sources of phase fluctuations. The first addresses fluctuations resulting from the optical fiber, while the second tackles unwanted variations originating from the AOMs.

Nonvolatile Phase-Only Transmissive Spatial Light Modulator with Electrical Addressability of Individual Pixels

Active metasurfaces with tunable subwavelength-scale nanoscatterers are promising platforms for high-performance spatial light modulators (SLMs). Among the tuning methods, phase-change materials (PCMs) are attractive because of their nonvolatile, threshold-driven, and drastic optical modulation, rendering zero-static power, crosstalk immunity, and compact pixels. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, which is insufficient for SLMs. Here, an individual-pixel addressable, transmissive metasurface is experimentally demonstrated using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high-quality-factor (∼406) quasi-bound-state-in-the-continuum mode. A global phase-only modulation of ∼0.25π (∼0.2π) in simulation (experiment) is achieved, showing ten times enhancement. A 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.

Asymmetric dual-core liquid crystal channel-based tunable mode converter

In this work, a higher order-to-fundamental mode converter is reported and analyzed based on an asymmetric dual channel waveguide (ADC-WG) on silicon. In the reported structure, one of the two waveguides is infiltrated with nematic liquid crystal (NLC) material to add temperature tunability while the other one is a solid BK7 waveguide. The modal characteristics are obtained using the full vectorial finite difference method (FVFDM). In addition, the structural parameters and optical characteristics of the employed materials are investigated to achieve good wavelength selectivity with a short device length (LD). Thus, a compact mode converter that can work at different wavelengths including the telecommunication wavelength i.e., 1.55 μm with LD ~ 482.31 μm and a low crosstalk of - 19.86 dB is presented. To prove the thermal tunability of the suggested mode converter, its operation is tested through a temperature range between 20 and 35 °C and the results show that the mode conversion process is achieved at each temperature with different phase matching wavelengths (λPMW) but with quite similar coupling length (LC). The proposed device can therefore be effectively utilized in integrated photonic circuits.

Numerical analysis of on-chip acousto-optic modulators for visible wavelengths

On-chip acousto-optic modulators that operate at an optical wavelength of 780 nm and a microwave frequency of 6.835 GHz are proposed. The modulators are based on a lithium-niobate-on-sapphire platform and efficiently excite surface acoustic waves and exhibit strong interactions with tightly confined optical modes in waveguides. In particular, a high-efficiency phase modulator and single-sideband mode converter are designed. We found that for both microwave and optical wavelengths below 1 µm, the interactions at the cross-sections of photonic waveguides are sensitive to the waveguide width and are significantly different from those in previous studies. Our designed devices have small footprints and high efficiencies, making them suitable for controlling rubidium atoms and realizing hybrid photonic-atomic chips. Furthermore, our devices have the potential to extend the acousto-optic modulators to other visible wavelengths for other atom transitions and for visible light applications, including imaging and sensing.

Scalable Non-Volatile Tuning of Photonic Computational Memories by Automated Silicon Ion Implantation

Photonic integrated circuits (PICs) are revolutionizing the realm of information technology, promising unprecedented speeds and efficiency in data processing and optical communication. However, the nanoscale precision required to fabricate these circuits at scale presents significant challenges, due to the need to maintain consistency across wavelength-selective components, which necessitates individualized adjustments after fabrication. Harnessing spectral alignment by automated silicon ion implantation, in this work scalable and non-volatile photonic computational memories are demonstrated in high-quality resonant devices. Precise spectral trimming of large-scale photonic ensembles from a few picometers to several nanometres is achieved with long-term stability and marginal loss penalty. Based on this approach, spectrally aligned photonic memory and computing systems for general matrix multiplication are demonstrated, enabling wavelength multiplexed integrated architectures at large scales.

High-speed and energy-efficient non-volatile silicon photonic memory based on heterogeneously integrated memresonator

Recently, interest in programmable photonics integrated circuits has grown as a potential hardware framework for deep neural networks, quantum computing, and field programmable arrays (FPGAs). However, these circuits are constrained by the limited tuning speed and large power consumption of the phase shifters used. In this paper, we introduce the memresonator, a metal-oxide memristor heterogeneously integrated with a microring resonator, as a non-volatile silicon photonic phase shifter. These devices are capable of retention times of 12 hours, switching voltages lower than 5 V, and an endurance of 1000 switching cycles. Also, these memresonators have been switched using 300 ps long voltage pulses with a record low switching energy of 0.15 pJ. Furthermore, these memresonators are fabricated on a heterogeneous III-V-on-Si platform capable of integrating a rich family of active and passive optoelectronic devices directly on-chip to enable in-memory photonic computing and further advance the scalability of integrated photonic processors.

Ultra-compact scalable spectrometer with low power consumption

An ultra-compact on-chip spectrometer was demonstrated based on an array of add-drop micro-donut resonators (MDRs). The filter array was thermally tuned by a single TiN microheater, enabling simultaneous spectral scanning across all physical channels. The MDR was designed to achieve large free spectral ranges with multimode waveguide bends and asymmetric coupling waveguides, covering a spectral range of 40 nm at the telecom waveband with five physical channels (which could be further expanded). Benefiting from the ultra-small device footprint of 150 µm2, the spectrometer achieved a low power consumption of 16 mW. Additionally, it is CMOS-compatible and enables mass fabrication, which may have potential applications in personal terminals and the consumer industry.

Cascaded subarray design and control method for power efficient, thermal crosstalk optimized optical phased array

Thermo-optic phase shifters (TOPSs) are commonly used in large-scale silicon photonic integrated optical phased arrays (OPAs). However, fast-response TOPSs consume relatively high power; the elevated temperature floor in the dense region of the TOPSs introduces thermal crosstalk between optical paths, which undermines the control accuracy. We propose a combined method that involves subarray design in the optical power distribution network and array control method to predict, optimize, and redistribute the phase shifts and mitigates thermal crosstalk. Thermal simulations and an array control method for generic OPA models are discussed. A silicon photonic chip prototype of a 4 × 4 OPA with three-level cascaded subarrays is fabricated to demonstrate the proposed method. The experimental and statistical results show that the method effectively reduces the average total power consumption by 31%, the maximum local temperature by 18.4%, and the thermal crosstalk within the OPA.

Design and performance assessment of modular multi-band photonic-integrated WSS

Today, optical transport and data center networks extensively utilize photonic integrated systems due to their large bandwidth and a high degree of reconfigurability. In addition to these properties, photonic integrated-based systems can deliver an overall low fabrication cost, a small footprint, and low power consumption. In this perspective, we present a modular photonic integrated multi-band wavelength selective switch (WSS) capable of managing a wide spectrum, covering the three S+C+L bands, and potentially scalable to larger numbers of output fibers and routed channels. We propose a complete description of the device starting from the physical level, commenting on the device's internal structure and design-related issues. Then, we move to the transmission level, providing a complete abstraction of the proposed WSS in the context of software-defined optical networks by providing a deterministic model to evaluate the routing controls, thermal spectral tunability, and the quality of transmission degradation. Finally, a transmission scenario operating on 400ZR standards and a network case study are also demonstrated to evaluate the performance of the proposed WSS in a single or multistage cascade setup.

Real-time reconfigurable on-chip photonic frequency decoder

A group-delay-unit-based integrated silicon photonic integrated circuit (PIC) is employed as a reconfigurable analog radio frequency decoder, which provides a real-time temporal and spectral analysis of any arbitrary multi-tone signal in the micro- and mm-wave range. The circuit is based on cascaded Mach-Zehnder interferometer embedded silicon microring resonators as variable delay units. The temporal decoding of the multi-tone input signal is demonstrated by tuning the signal with respect to the ring resonator delay and resonance. A one-to-one conformal time-to-frequency mapping provides real-time spectral decoding of the signal under test without additional digital signal processing. The idea is validated by several experimental results with single-tone and two-tone input signals in a compact, low-power, silicon PIC. The proposed real-time temporal analog frequency decoder may be very intriguing for high-speed, low-latency wireless applications, such as autonomous driving and 6G.

Low-loss and power-efficient phase shifter based on an optimized multimode spiral silicon waveguide

Low-loss and energy-efficient phase shifters are an effective tool to reduce the power consumption of large-scale photonic integrated circuits. In this work, a low-loss and power-efficient thermo-optic phase shifter has been demonstrated on the silicon-on-insulator platform. The multimode spiral waveguide is optimized to obtain lower power consumption and low cross talk. The waveguide width is beyond the single-mode region in consideration of low propagation loss. The optimized ultra-low loss 180° Bezier bends are used to further reduce the bending loss. The experimental results show that the excess loss of the phase shifter is only 0.36 dB at 1550-nm wavelength and the power consumption is 4.87 mW/π.

Reversible Thermally Driven Phase Change of Layered In2Se3 for Integrated Photonics

Two-dimensional In₂Se₃, an unconventional phase-change material, has drawn considerable attention for polymorphic phase transitions and electronic device applications. However, its reversible thermally driven phase transitions and potential use in photonic devices have yet to be explored. In this study, we observe the thermally driven reversible phase transitions between α and β' phases with the assistance of local strain from surface wrinkles and ripples, as well as reversible phase changes within the β phase family. These transitions lead to changes in the refractive index and other optoelectronic properties with minimal optical loss at telecommunication bands, which are crucial in integrated photonic applications such as postfabrication phase trimming. Additionally, multilayer β'-In₂Se₃ working as a transparent microheater proves to be a viable option for efficient thermo-optic modulation. This prototype design for layered In₂Se₃ offers immense potential for integrated photonics and paves the way for multilevel, nonvolatile optical memory applications.

Integrated programmable spectral filter for frequency-multiplexed neuromorphic computers

Artificial neural networks (ANN) are a groundbreaking technology massively employed in a plethora of fields. Currently, ANNs are mostly implemented through electronic digital computers, but analog photonic implementations are very interesting mainly because of low power consumption and high bandwidth. We recently demonstrated a photonic neuromorphic computing system based on frequency multiplexing that executes ANNs algorithms as reservoir computing and Extreme Learning Machines. Neuron signals are encoded in the amplitude of the lines of a frequency comb, and neuron interconnections are realized through frequency-domain interference. Here we present an integrated programmable spectral filter designed to manipulate the optical frequency comb in our frequency multiplexing neuromorphic computing platform. The programmable filter controls the attenuation of 16 independent wavelength channels with a 20 GHz spacing. We discuss the design and the results of the chip characterization, and we preliminary demonstrate, through a numerical simulation, that the produced chip is suitable for the envisioned neuromorphic computing application.

Sparse 2-D optical phased array with large grating-lobe-free steering range based on an aperiodic grid

Two-dimensional (2-D) optical phased arrays (OPAs) usually suffer from limited scan ranges and small aperture sizes. To overcome these bottlenecks, we utilize an aperiodic 32 × 32 grid to increase the beam scanning range and furthermore distribute 128 grating antennas sparsely among 1024 grid points so as to reduce the array element number. The genetic algorithm is used to optimize the uneven grid spacings and the sparse distribution of grating antennas. With these measures, a 128-channel 2-D OPA operating at 1550 nm realizes a grating-lobe-free steering range of 53° × 16°, a field of view of 24° × 16°, a beam divergence of 0.31° × 0.49°, and a sidelobe suppression ratio of 9 dB.

Silicon Photonic Phase Shifters and Their Applications: A Review

With the development of silicon photonics, dense photonic integrated circuits play a significant role in applications such as light detection and ranging systems, photonic computing accelerators, miniaturized spectrometers, and so on. Recently, extensive research work has been carried out on the phase shifter, which acts as the fundamental building block in the photonic integrated circuit. In this review, we overview different types of silicon photonic phase shifters, including micro-electro-mechanical systems (MEMS), thermo-optics, and free-carrier depletion types, highlighting the MEMS-based ones. The major working principles of these phase shifters are introduced and analyzed. Additionally, the related works are summarized and compared. Moreover, some emerging applications utilizing phase shifters are introduced, such as neuromorphic computing systems, photonic accelerators, multi-purpose processing cores, etc. Finally, a discussion on each kind of phase shifter is given based on the figures of merit.

All-Solid-State Beam Steering via Integrated Optical Phased Array Technology

Light detection and ranging (LiDAR), combining traditional radar technology with modern laser technology, has much potential for applications in navigation, mapping, and so on. Benefiting from the superior performance, an all-solid-state beam steering realized by integrated optical phased array (OPA) is one of the key components in the LiDAR system. In this review, we first introduce the basic principle of OPA for beam steering. Then, we briefly review the detailed advances of different solutions such as micro-electromechanical system OPA, liquid crystal OPA, and metasurface OPA, where our main focus was on the recent progress of OPA in photonic integrated chips. Finally, we summarize the different solutions and discuss the challenges and perspectives of all-solid-state beam steering for LiDAR.