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Liu X, Gong Y, Jiang Z, Stevens T, Li W. Flexible high-density microelectrode arrays for closed-loop brain-machine interfaces: a review. Front Neurosci 2024; 18:1348434. [PMID: 38686330 PMCID: PMC11057246 DOI: 10.3389/fnins.2024.1348434] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/02/2023] [Accepted: 01/12/2024] [Indexed: 05/02/2024] Open
Abstract
Flexible high-density microelectrode arrays (HDMEAs) are emerging as a key component in closed-loop brain-machine interfaces (BMIs), providing high-resolution functionality for recording, stimulation, or both. The flexibility of these arrays provides advantages over rigid ones, such as reduced mismatch between interface and tissue, resilience to micromotion, and sustained long-term performance. This review summarizes the recent developments and applications of flexible HDMEAs in closed-loop BMI systems. It delves into the various challenges encountered in the development of ideal flexible HDMEAs for closed-loop BMI systems and highlights the latest methodologies and breakthroughs to address these challenges. These insights could be instrumental in guiding the creation of future generations of flexible HDMEAs, specifically tailored for use in closed-loop BMIs. The review thoroughly explores both the current state and prospects of these advanced arrays, emphasizing their potential in enhancing BMI technology.
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Affiliation(s)
- Xiang Liu
- Neuroscience Program, Department of Physiology, Michigan State University, East Lansing, MI, United States
- Institute for Quantitative Health Science and Engineering (IQ), East Lansing, MI, United States
| | - Yan Gong
- Institute for Quantitative Health Science and Engineering (IQ), East Lansing, MI, United States
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, United States
| | - Zebin Jiang
- Institute for Quantitative Health Science and Engineering (IQ), East Lansing, MI, United States
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, United States
| | - Trevor Stevens
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, United States
| | - Wen Li
- Neuroscience Program, Department of Physiology, Michigan State University, East Lansing, MI, United States
- Institute for Quantitative Health Science and Engineering (IQ), East Lansing, MI, United States
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, United States
- Department of Biomedical Engineering, Michigan State University, East Lansing, MI, United States
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Le Floch P, Zhao S, Liu R, Molinari N, Medina E, Shen H, Wang Z, Kim J, Sheng H, Partarrieu S, Wang W, Sessler C, Zhang G, Park H, Gong X, Spencer A, Lee J, Ye T, Tang X, Wang X, Bertoldi K, Lu N, Kozinsky B, Suo Z, Liu J. 3D spatiotemporally scalable in vivo neural probes based on fluorinated elastomers. NATURE NANOTECHNOLOGY 2024; 19:319-329. [PMID: 38135719 DOI: 10.1038/s41565-023-01545-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/03/2022] [Accepted: 10/16/2023] [Indexed: 12/24/2023]
Abstract
Electronic devices for recording neural activity in the nervous system need to be scalable across large spatial and temporal scales while also providing millisecond and single-cell spatiotemporal resolution. However, existing high-resolution neural recording devices cannot achieve simultaneous scalability on both spatial and temporal levels due to a trade-off between sensor density and mechanical flexibility. Here we introduce a three-dimensional (3D) stacking implantable electronic platform, based on perfluorinated dielectric elastomers and tissue-level soft multilayer electrodes, that enables spatiotemporally scalable single-cell neural electrophysiology in the nervous system. Our elastomers exhibit stable dielectric performance for over a year in physiological solutions and are 10,000 times softer than conventional plastic dielectrics. By leveraging these unique characteristics we develop the packaging of lithographed nanometre-thick electrode arrays in a 3D configuration with a cross-sectional density of 7.6 electrodes per 100 µm2. The resulting 3D integrated multilayer soft electrode array retains tissue-level flexibility, reducing chronic immune responses in mouse neural tissues, and demonstrates the ability to reliably track electrical activity in the mouse brain or spinal cord over months without disrupting animal behaviour.
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Affiliation(s)
- Paul Le Floch
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
- Axoft, Inc., Cambridge, MA, USA
| | - Siyuan Zhao
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Ren Liu
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Nicola Molinari
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Eder Medina
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Hao Shen
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Zheliang Wang
- Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, Austin, TX, USA
| | - Junsoo Kim
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Hao Sheng
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Sebastian Partarrieu
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Wenbo Wang
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Chanan Sessler
- Broad Institute of MIT and Harvard, Cambridge, MA, USA
- Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Guogao Zhang
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | | | | | | | | | | | - Xin Tang
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Xiao Wang
- Broad Institute of MIT and Harvard, Cambridge, MA, USA
- Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA
| | - Katia Bertoldi
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Nanshu Lu
- Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, Austin, TX, USA
| | - Boris Kozinsky
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
- Robert Bosch LLC Research and Technology Center, Watertown, MA, USA
| | - Zhigang Suo
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA
| | - Jia Liu
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Boston, MA, USA.
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Zhao ET, Hull JM, Mintz Hemed N, Uluşan H, Bartram J, Zhang A, Wang P, Pham A, Ronchi S, Huguenard JR, Hierlemann A, Melosh NA. A CMOS-based highly scalable flexible neural electrode interface. SCIENCE ADVANCES 2023; 9:eadf9524. [PMID: 37285436 PMCID: PMC10246892 DOI: 10.1126/sciadv.adf9524] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/22/2022] [Accepted: 05/03/2023] [Indexed: 06/09/2023]
Abstract
Perception, thoughts, and actions are encoded by the coordinated activity of large neuronal populations spread over large areas. However, existing electrophysiological devices are limited by their scalability in capturing this cortex-wide activity. Here, we developed an electrode connector based on an ultra-conformable thin-film electrode array that self-assembles onto silicon microelectrode arrays enabling multithousand channel counts at a millimeter scale. The interconnects are formed using microfabricated electrode pads suspended by thin support arms, termed Flex2Chip. Capillary-assisted assembly drives the pads to deform toward the chip surface, and van der Waals forces maintain this deformation, establishing Ohmic contact. Flex2Chip arrays successfully measured extracellular action potentials ex vivo and resolved micrometer scale seizure propagation trajectories in epileptic mice. We find that seizure dynamics in absence epilepsy in the Scn8a+/- model do not have constant propagation trajectories.
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Affiliation(s)
- Eric T. Zhao
- Department of Chemical Engineering, Stanford University, Stanford, CA, USA
| | - Jacob M. Hull
- Department of Neurology, Stanford University, Stanford, CA, USA
| | - Nofar Mintz Hemed
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Hasan Uluşan
- Department of Biosystems Engineering, ETH Zürich, Basel, Switzerland
| | - Julian Bartram
- Department of Biosystems Engineering, ETH Zürich, Basel, Switzerland
| | - Anqi Zhang
- Department of Chemical Engineering, Stanford University, Stanford, CA, USA
| | - Pingyu Wang
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Albert Pham
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Silvia Ronchi
- Department of Biosystems Engineering, ETH Zürich, Basel, Switzerland
| | | | | | - Nicholas A. Melosh
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
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Cornuéjols R, Albon A, Joshi S, Taylor JA, Baca M, Drakopoulou S, Rinaldi Barkat T, Bernard C, Rezaei-Mazinani S. Design, Characterization, and In Vivo Application of Multi-Conductive Layer Organic Electrocorticography Probes. ACS APPLIED MATERIALS & INTERFACES 2023; 15:22854-22863. [PMID: 37141163 DOI: 10.1021/acsami.3c00553] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
Biocompatible and plastic neural interface devices allow for minimally invasive recording of brain activity. Increasing electrode density in such devices is essential for high-resolution neural recordings. Superimposing conductive leads in devices can help multiply the number of recording sites while keeping probes width small and suitable for implantation. However, because of leads' vertical proximity, this can create capacitive coupling (CC) between overlapping channels, which leads to crosstalk. Here, we present a thorough investigation of CC phenomenon in multi-gold layer thin-film multi-electrode arrays with a parylene C (PaC) insulation layer between superimposed leads. We also propose a guideline on the design, fabrication, and characterization of such type of neural interface devices for high spatial resolution recording. Our results demonstrate that the capacitance created through CC between superimposed tracks decreases non-linearly and then linearly with the increase of insulation thickness. We identify an optimal PaC insulation thickness that leads to a drastic reduction of CC between superimposed gold channels while not significantly increasing the overall device thickness. Finally, we show that double gold layer electrocorticography probes with the optimal insulation thickness exhibit similar performances in vivo when compared to single-layer devices. This confirms that these probes are adequate for high-quality neural recordings.
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Affiliation(s)
- Rémy Cornuéjols
- Mines Saint-Etienne, Centre CMP, Departement BEL, F-13541 Gardanne, France
- Aix Marseille University, INSERM, INS, Inst Neurosci Syst, 13005 Marseille, France
| | - Amélie Albon
- Mines Saint-Etienne, Centre CMP, Departement BEL, F-13541 Gardanne, France
| | - Suyash Joshi
- Department of Biomedicine, Basel University, 4056 Basel, Switzerland
| | | | - Martin Baca
- Mines Saint-Etienne, Centre CMP, Departement BEL, F-13541 Gardanne, France
| | - Sofia Drakopoulou
- Mines Saint-Etienne, Centre CMP, Departement BEL, F-13541 Gardanne, France
| | | | - Christophe Bernard
- Aix Marseille University, INSERM, INS, Inst Neurosci Syst, 13005 Marseille, France
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