Guenther KH. Nonoptical characterization of optical coatings.
APPLIED OPTICS 1981;
20:3487-3502. [PMID:
20372207 DOI:
10.1364/ao.20.003487]
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Abstract
Besides the theoretical design of optical interference coatings, the knowledge of their nonoptical properties like chemical composition, structural features, mechanical peculiarities, and environmental stability is often a basic condition for their industrial production. After some remarks on specifications and standards relevant for optical coatings this paper gives a review on various possibilities for nonoptical characterization of optical coatings. Those methods of surface analysis, depth profiling, and electron microscopy available to and widely used by a major coating manufacturer-like Auger electron spectroscopy (AES), secondary ion mass spectroscopy (SIMS), scanning electron microscopy (SEM), energy dispersive (ED) and wavelength dispersive (WD) electron probe microanalysis (EPMA)-are pointed out in more detail and illustrated with examples from daily practice. Other characterization methods, which are less common but very interesting, are also briefly reviewed.
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