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Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions. Electrochim Acta 2019. [DOI: 10.1016/j.electacta.2019.03.065] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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Sutter EMM, Le Gall M, Debiemme-Chouvy C. Behavior of p-Type GaAs in an Aerated Boric Acid Solution at the Open-Circuit Potential. Influence of the Presence of Co(II) Ions. J Phys Chem B 2001. [DOI: 10.1021/jp004388w] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- E. M. M. Sutter
- IREM, UMR CNRS 8637, Université de VersaillesSaint Quentin-en-Yvelines, Bât. Lavoisier, 45 avenue des Etats-Unis, F-78035 Versailles Cedex, France
| | - M. Le Gall
- IREM, UMR CNRS 8637, Université de VersaillesSaint Quentin-en-Yvelines, Bât. Lavoisier, 45 avenue des Etats-Unis, F-78035 Versailles Cedex, France
| | - C. Debiemme-Chouvy
- IREM, UMR CNRS 8637, Université de VersaillesSaint Quentin-en-Yvelines, Bât. Lavoisier, 45 avenue des Etats-Unis, F-78035 Versailles Cedex, France
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The anodic dissolution of InP studied by the optoelectrical impedance method—2. Interaction between anodic and chemical etching of InP in iodic acid solutions. Electrochim Acta 1993. [DOI: 10.1016/0013-4686(93)80154-r] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Allongue P, Blonkowski S, Souteyrand E. Experimental investigation of charge transfer at the semiconductor/electrolyte junction. Electrochim Acta 1992. [DOI: 10.1016/0013-4686(92)85032-g] [Citation(s) in RCA: 26] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Allongue P, Blonkowski S. Corrosion of III-V compounds; a comparative study of GaAs and InP. ACTA ACUST UNITED AC 1991. [DOI: 10.1016/0022-0728(91)87036-4] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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Vermeir I, Kerchove F, Gomes W. (Photo-) electrochemical investigation of the photoetching of n- and p-type (100) InP in aqueous Fe3+-containing solutions. ACTA ACUST UNITED AC 1991. [DOI: 10.1016/0022-0728(91)85177-q] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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Weakening of the hole injection effect proceeding from the reduction of ceric species after oxidation of indium phosphide compounds. J Electroanal Chem (Lausanne) 1991. [DOI: 10.1016/0022-0728(91)85162-i] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Etcheberry A, Gautron J, Khoumri E, Sculfort J. Electron excitation during anodic decomposition of III–V compounds induced by hole injecting species (Ce4+). J Electroanal Chem (Lausanne) 1990. [DOI: 10.1016/0022-0728(90)87388-z] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
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