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Chen Z, Zong Y, Chai Y, E M, He Y, Shi S, Cai J, Zhang Q, Li J, Chen J, Liu X, Wang ZJ, Wang D, Liu Z. Unraveling the Nanoscale Segregation Mechanism in N-Doped Niobium for Enhanced SRF Performance. SMALL METHODS 2024:e2301319. [PMID: 38178653 DOI: 10.1002/smtd.202301319] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/27/2023] [Revised: 12/09/2023] [Indexed: 01/06/2024]
Abstract
The nitrogen doping (N-doping) treatment for niobium superconducting radio-frequency (SRF) cavities is one of the key enabling technologies that support the development of more efficient future large accelerators. However, the N-doping results have diverged due to a complex chemical profile under the nitrogen-doped surface. Particularly, under industrial-scale production conditions, it is difficult to understand the underlying mechanism thus hindering performance improvement. Herein, a combination of spatially resolved and surface-sensitive approaches is employed to establish the detailed near-surface phase composition of thermally processed niobium. The results show that intermediate phase segregations, particularly the nanometric carbon-rich phase, can impede the nitridation process and limit the interactions between nitrogen and the niobium sub-surface. In comparison, the removal of the carbon-rich layer at the Nb surface leads to enhanced nitrogen binding at the Nb surface. Combining the RF test results, it is shown that the complex uniformity and grain boundary penetrations of impurity elements have a direct correlation with the mid-field quench behavior in the N-doped Nb cavities. Therefore, proper control of the nanometric intermediate phase formation in discrete thermal steps is critical in improving the ultimate performance and production yield of the Nb cavities.
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Affiliation(s)
- Zhaoxi Chen
- Center for Transformative Science (CTS), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Yue Zong
- Shanghai Advanced Research Institute (SARI), Chinese Academy of Sciences (CAS), No. 99 Haike Rd, Shanghai, 201210, China
| | - Yue Chai
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Mengzheng E
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Yulu He
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Shucheng Shi
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Jun Cai
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Qing Zhang
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Jun Li
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Jinfang Chen
- Shanghai Advanced Research Institute (SARI), Chinese Academy of Sciences (CAS), No. 99 Haike Rd, Shanghai, 201210, China
| | - Xuerong Liu
- Center for Transformative Science (CTS), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Zhu-Jun Wang
- School of Physical Science and Technology (SPST), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
| | - Dong Wang
- Shanghai Advanced Research Institute (SARI), Chinese Academy of Sciences (CAS), No. 99 Haike Rd, Shanghai, 201210, China
| | - Zhi Liu
- Center for Transformative Science (CTS), ShanghaiTech University, No. 393 Huaxia Rd, Shanghai, 201210, China
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Wang J, Gao Y, Hu Y, Zhang J, You Z, Sun Q, Si Q, Xu Z, Wang S, Liu G, Mi A. Activation characterization of a novel quinary alloy Ti-Zr-V-Hf-Nb non-evaporable getters by x-ray photoelectron spectroscopy. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2022; 93:053906. [PMID: 35649754 DOI: 10.1063/5.0079537] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
The first results on the activation process and mechanisms of novel quinary alloy Ti-Zr-V-Hf-Nb non-evaporable getter (NEG) film coatings with copper substrates were presented. About 1.075 µm of Ti-Zr-V-Hf-Nb NEG film coating was deposited on the copper substrates by using the DC sputtering method. The NEG activation at 100, 150, and 180 °C, respectively, for 2 h was in situ characterized by x-ray photoelectron spectroscopy (XPS). The as-deposited NEG film mainly comprised the high valence state metallic oxides and the sub-oxides, as well as a small number of metals. The in situ XPS studies indicated that the concentrations of the high-oxidized states of Ti, Zr, V, Hf, and Nb gradually decreased and that of the lower valence metallic oxides and metallic states increased in steps, when the activation temperature increased from 100 to 180 °C. This outcome manifested that these novel quinary alloy Ti-Zr-V-Hf-Nb NEG film coatings could be activated and used for producing ultra-high vacuum.
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Affiliation(s)
- Jie Wang
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Yong Gao
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Yaocheng Hu
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Jing Zhang
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Zhiming You
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Qiuyu Sun
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Qingyu Si
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Zhanglian Xu
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Sheng Wang
- Shaanxi Engineering Research Center of Advanced Nuclear Energy, Shaanxi Key Laboratory of Advanced Nuclear Energy and Technology, School of Nuclear Science and Technology, School of Energy and Power Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China
| | - Guoming Liu
- China Nuclear Power Engineering Co., Ltd., Beijing 100840, China
| | - Aijun Mi
- China Nuclear Power Engineering Co., Ltd., Beijing 100840, China
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Ren C, Yang P, Gao J, Huo X, Min X, Bi EY, Liu Y, Wang Y, Zhu M, Liu J. Catalytic Reduction of Aqueous Chlorate With MoOx Immobilized on Pd/C. ACS Catal 2020. [DOI: 10.1021/acscatal.0c02242] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Changxu Ren
- Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States
| | - Peng Yang
- Department of Ecosystem Science and Management, University of Wyoming, Laramie, Wyoming 82071, United States
| | - Jinyu Gao
- Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States
| | - Xiangchen Huo
- Department of Civil and Environmental Engineering, Colorado School of Mines, Golden, Colorado 80401, United States
| | - Xiaopeng Min
- Department of Civil and Environmental Engineering, University of Wisconsin-Milwaukee, Milwaukee, Wisconsin 53201, United States
| | - Eric Y. Bi
- Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States
- Martin Luther King High School, Riverside, California 92508, United States
| | - Yiming Liu
- Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States
| | - Yin Wang
- Department of Civil and Environmental Engineering, University of Wisconsin-Milwaukee, Milwaukee, Wisconsin 53201, United States
| | - Mengqiang Zhu
- Department of Ecosystem Science and Management, University of Wyoming, Laramie, Wyoming 82071, United States
| | - Jinyong Liu
- Department of Chemical and Environmental Engineering, University of California, Riverside, California 92521, United States
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Skaja K, Andrä M, Rana V, Waser R, Dittmann R, Baeumer C. Reduction of the forming voltage through tailored oxygen non-stoichiometry in tantalum oxide ReRAM devices. Sci Rep 2018; 8:10861. [PMID: 30022129 PMCID: PMC6052165 DOI: 10.1038/s41598-018-28992-9] [Citation(s) in RCA: 31] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/19/2018] [Accepted: 07/03/2018] [Indexed: 11/08/2022] Open
Abstract
In this study, we investigated the influence of oxygen non-stoichiometry on the resistive switching performance of tantalum oxide based memristive devices. Thin-films of tantalum oxide were deposited with varying sputter power and oxygen partial pressure. The electroforming voltage was found to decrease with increasing power density or decreased oxygen partial pressure, while the endurance remained stable and the resistance window ROFF/RON was found to increase. In-depth XPS analysis connects these observations to a controllable oxygen sub-stoichiometry in the sputter-deposited films. Our analysis shows that the decrease of the forming voltage results from an increase in carrier density in the as-prepared thin-films, which is induced by the presence of oxygen vacancies.
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Affiliation(s)
- Katharina Skaja
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany
| | - Michael Andrä
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany
| | - Vikas Rana
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany
| | - Rainer Waser
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany
- Institute for Electronic Materials, IWE2, RWTH Aachen University, D-52074, Aachen, Germany
| | - Regina Dittmann
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany
| | - Christoph Baeumer
- Peter Grünberg Institute and JARA-FIT, FZ Jülich, D-52425, Jülich, Germany.
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6
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Fromm E. Effect of Oxide Layers on the Absorption Kinetics of Hydrogen by Metals at Room Temperature*. ACTA ACUST UNITED AC 2011. [DOI: 10.1524/zpch.1986.147.1_2.061] [Citation(s) in RCA: 35] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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7
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Determination of the States of Oxidation of Metals in Thin Oxide Films by X-Ray Photoelectron Spectroscopy. JOURNAL OF ANALYTICAL CHEMISTRY 2005. [DOI: 10.1007/s10809-005-0114-x] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/25/2022]
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8
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An AES study of the room-temperature oxidation of TaSixafter bombardment with Ar+ions of different energies. SURF INTERFACE ANAL 2004. [DOI: 10.1002/sia.740150708] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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9
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Jacobsen FM, Raaen S, Ruckman MW, Strongin M. Oxidation of metal surfaces at 15 K: The quantum nature of oxidation. PHYSICAL REVIEW. B, CONDENSED MATTER 1995; 52:11339-11342. [PMID: 9980239 DOI: 10.1103/physrevb.52.11339] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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10
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Gu C, Lynch DW, Yang AB, Olson CG. Ce-catalyzed oxidation of Ta(110). PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:1526-1532. [PMID: 9995581 DOI: 10.1103/physrevb.42.1526] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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11
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Tapping RL, Davidson RD, Jackman TE, Davies JA. Effect of analytical method on thickness measurements of thin oxide films. SURF INTERFACE ANAL 1988. [DOI: 10.1002/sia.740110806] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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12
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Ronay M, Nordlander P. Barrier to oxygen penetration on metal and oxide surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1987; 35:9403-9406. [PMID: 9941365 DOI: 10.1103/physrevb.35.9403] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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13
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Darlinski A, Halbritter J. Angle-resolved XPS studies of oxides at NbN, NbC, and Nb surfaces. SURF INTERFACE ANAL 1987. [DOI: 10.1002/sia.740100502] [Citation(s) in RCA: 159] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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14
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15
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Sanz JM, Palacio C, Casas Y, Martinez-Duart JM. An AES study of the oxidation of polycrystalline zirconium at room temperature and low oxygen pressures. SURF INTERFACE ANAL 1987. [DOI: 10.1002/sia.740100402] [Citation(s) in RCA: 38] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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16
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Surface phenomena in hydrogen absorption kinetics of metals and intermetallic compounds. ACTA ACUST UNITED AC 1987. [DOI: 10.1016/0022-5088(87)90495-4] [Citation(s) in RCA: 40] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
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18
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Steffen J, Hofmann S. Untersuchung der Anfangsstadien der Oxidation einer NiCr23-Legierung mit AES/XPS. ACTA ACUST UNITED AC 1987. [DOI: 10.1007/bf00469151] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]
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19
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20
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Hydrogen absorption rate of titanium, lanthanum, iron, nickel, manganese and palladium films with and without ovygen precoverage at 300 K. ACTA ACUST UNITED AC 1986. [DOI: 10.1016/0022-5088(86)90180-3] [Citation(s) in RCA: 22] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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21
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Wulv H, Cichy H, Fromm E. Hydrogen absorption by titanium, TiO2 and La2O3 films covered with clean and ovidived iron, nickel, palladium and manganese overlayers at 300 K. ACTA ACUST UNITED AC 1986. [DOI: 10.1016/0022-5088(86)90181-5] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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22
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Hydrogen absorption by FeTi-, LaNi5-, TiNi-, TiPd- and TiMn2-film samples at low pressures and 300 K. ACTA ACUST UNITED AC 1986. [DOI: 10.1016/0022-5088(86)90182-7] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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23
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Ronay M, Latta E. Growth of Ce-Nb oxide films: A test of oxidation theory. PHYSICAL REVIEW. B, CONDENSED MATTER 1985; 32:5375-5383. [PMID: 9937754 DOI: 10.1103/physrevb.32.5375] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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Ermolieff A, Girard M, Raoul C, Bertrand C, Duc TM. An XPS comparative study on thermal oxide barrier formation on Nb and NbN thin films. ACTA ACUST UNITED AC 1985. [DOI: 10.1016/0378-5963(85)90008-x] [Citation(s) in RCA: 29] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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25
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Mathieu HJ, Landolt D. AES sputter profiling and angle resolved XPS ofin situ grown very thin Tantalum-oxide films. SURF INTERFACE ANAL 1984. [DOI: 10.1002/sia.740060209] [Citation(s) in RCA: 21] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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27
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Ermolieff A. Etude XPS de films minces de NbN : décapage, oxydation à l'air, et oxydation thermique entre 20 °C et 200 °C. Comparaison avec les films minces de Nb. ACTA ACUST UNITED AC 1984. [DOI: 10.1051/rphysap:019840019012097900] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022]
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