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Garcia MA, Rickards J, Trejo-Luna R, Cañetas-Ortega J, Rodríguez-Fernández L. Changes in the surface morphology induced by 1.0-MeV Au ion bombardment of Ti and Ti-6Al-4V. SURF INTERFACE ANAL 2014. [DOI: 10.1002/sia.5421] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Affiliation(s)
- M. A. Garcia
- Instituto de Física; Universidad Nacional Autónoma de México; Ap. Postal 20-364 01000 México, DF Mexico
| | - J. Rickards
- Instituto de Física; Universidad Nacional Autónoma de México; Ap. Postal 20-364 01000 México, DF Mexico
| | - R. Trejo-Luna
- Instituto de Física; Universidad Nacional Autónoma de México; Ap. Postal 20-364 01000 México, DF Mexico
| | - J. Cañetas-Ortega
- Instituto de Física; Universidad Nacional Autónoma de México; Ap. Postal 20-364 01000 México, DF Mexico
| | - L. Rodríguez-Fernández
- Instituto de Física; Universidad Nacional Autónoma de México; Ap. Postal 20-364 01000 México, DF Mexico
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Timilsina R, Rack PD. Monte Carlo simulations of nanoscale focused neon ion beam sputtering. NANOTECHNOLOGY 2013; 24:495303. [PMID: 24231648 DOI: 10.1088/0957-4484/24/49/495303] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
A Monte Carlo simulation is developed to model the physical sputtering of aluminum and tungsten emulating nanoscale focused helium and neon ion beam etching from the gas field ion microscope. Neon beams with different beam energies (0.5-30 keV) and a constant beam diameter (Gaussian with full-width-at-half-maximum of 1 nm) were simulated to elucidate the nanostructure evolution during the physical sputtering of nanoscale high aspect ratio features. The aspect ratio and sputter yield vary with the ion species and beam energy for a constant beam diameter and are related to the distribution of the nuclear energy loss. Neon ions have a larger sputter yield than the helium ions due to their larger mass and consequently larger nuclear energy loss relative to helium. Quantitative information such as the sputtering yields, the energy-dependent aspect ratios and resolution-limiting effects are discussed.
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Affiliation(s)
- Rajendra Timilsina
- Department of Material Science and Engineering, University of Tennessee, Knoxville, TN 37996-2200, USA
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Chang CC. Classical Cascade Calculations on the Analysis of Surface Bonding Structures by Secondary Particle Mass Spectrometry. J CHIN CHEM SOC-TAIP 2013. [DOI: 10.1002/jccs.199400046] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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Gnaser H. Dynamic computer simulations of Cs incorporation in Si during low-energy (0.2-3 keV) irradiation. SURF INTERFACE ANAL 2008. [DOI: 10.1002/sia.2909] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Ono T, Kenmotsu T, Muramoto T. Simulation of the Sputtering Process. REACTIVE SPUTTER DEPOSITION 2008. [DOI: 10.1007/978-3-540-76664-3_1] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/04/2023]
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Affiliation(s)
- R. Collins
- a Thin Film and Surface Research Centre and Department of Electronic and Electrical Engineering , University of Salford , Salford , M5 4WT , England
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Falcone G, Oliva A. Sputtering yields of random solids by kev light-ion bombardment: A new model. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/01422448408205214] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]
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Peinador JA, Abril I, Jiménez-Rodríguez JJ, Gras-Marti A. Sputter depth profile analysis of marker layers. SURF INTERFACE ANAL 2004. [DOI: 10.1002/sia.740150804] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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McCool B, Xomeritakis G, Lin Y. Composition control and hydrogen permeation characteristics of sputter deposited palladium–silver membranes. J Memb Sci 1999. [DOI: 10.1016/s0376-7388(99)00087-3] [Citation(s) in RCA: 52] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Sack NJ, Akbulut M, Madey TE, Klein P, Urbassek HM, Vicanek M. Inelastic and elastic processes in the transmission of F+, F-, and F2- from PF3/Ru(0001) through thin rare-gas films. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 54:5130-5144. [PMID: 9986478 DOI: 10.1103/physrevb.54.5130] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Gades H, Urbassek HM. Model study of keV-ion mixing of metallic interfaces: Influence of materials properties and deposited energy. PHYSICAL REVIEW. B, CONDENSED MATTER 1995; 51:14559-14569. [PMID: 9978389 DOI: 10.1103/physrevb.51.14559] [Citation(s) in RCA: 31] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Sack NJ, Akbulut M, Madey TE. Transmission of low-energy O+ ions through ultrathin films of Ar, Kr, and Xe. PHYSICAL REVIEW. B, CONDENSED MATTER 1995; 51:4585-4596. [PMID: 9979305 DOI: 10.1103/physrevb.51.4585] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Sack NJ, Akbulut M, Madey TE. Transmission of low energy (<10 eV) O+ ions through several monolayer thick rare gas films. PHYSICAL REVIEW LETTERS 1994; 73:794-797. [PMID: 10057541 DOI: 10.1103/physrevlett.73.794] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Gnaser H, Oechsner H. Yields and composition changes in low-energy sputtering of binary alloys: Experiments and computer simulations. PHYSICAL REVIEW. B, CONDENSED MATTER 1993; 47:14093-14102. [PMID: 10005750 DOI: 10.1103/physrevb.47.14093] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Whitaker TJ, Li A, Jones PL, Watts RO. Angular distributions of sputtered zirconium atoms. J Chem Phys 1993. [DOI: 10.1063/1.464880] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Konoplev V, Gras-Marti A. Ion-induced collisional relocation of multicomponent targets. PHYSICAL REVIEW. B, CONDENSED MATTER 1992; 46:13713-13721. [PMID: 10003428 DOI: 10.1103/physrevb.46.13713] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Wang Z, Pan J, Zhang J, Tao Z. Angular distribution of sputtered atoms from Al-Sn alloy and surface topography. ACTA ACUST UNITED AC 1992. [DOI: 10.1007/bf00729470] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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Peinador JA, Abril I, Jiménez-Rodrguez JJ, Gras-Marti A. Collisional atomic mixing in polyatomic targets. PHYSICAL REVIEW. B, CONDENSED MATTER 1991; 44:2061-2070. [PMID: 9999755 DOI: 10.1103/physrevb.44.2061] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Sputtering of amorphous metallic alloys. ATOM ENERGY+ 1991. [DOI: 10.1007/bf01126465] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
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Likonen J, Hautala M. Computer simulations on collision-sequence mechanisms: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:3838-3852. [PMID: 9995905 DOI: 10.1103/physrevb.42.3838] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Hautala M, Likonen J. Computer simulations on collision-cascade anisotropies: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 41:1759-1769. [PMID: 9993902 DOI: 10.1103/physrevb.41.1759] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Gnaser H, Oechsner H. Preferential sputtering of isotopes: Fluence and emission-angle dependence. PHYSICAL REVIEW LETTERS 1989; 63:2673-2676. [PMID: 10040957 DOI: 10.1103/physrevlett.63.2673] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
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Postawa Z, Szymonski M. Directional emission of nonthermal halogen atoms by electron bombardment of alkali halides. PHYSICAL REVIEW. B, CONDENSED MATTER 1989; 39:12950-12953. [PMID: 9948180 DOI: 10.1103/physrevb.39.12950] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Whitlow HJ, Hautala M, Sundqvist BU. Collision cascade parameters for slow particles impinging on biomolecule targets. ACTA ACUST UNITED AC 1987. [DOI: 10.1016/0168-1176(87)87058-1] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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Falcone G. Ejection process in collisional sputtering. PHYSICAL REVIEW. B, CONDENSED MATTER 1986; 33:5054-5056. [PMID: 9938981 DOI: 10.1103/physrevb.33.5054] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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Eckstein W, Biersack JP. Computer simulation of two-component target sputtering. ACTA ACUST UNITED AC 1985. [DOI: 10.1007/bf00618859] [Citation(s) in RCA: 101] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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Hou M. Individual collision cascades in static bcc polycrystals. PHYSICAL REVIEW. B, CONDENSED MATTER 1985; 31:4178-4186. [PMID: 9936345 DOI: 10.1103/physrevb.31.4178] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/11/2023]
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Kelly R, Harrison DE. A summary of the theory of the preferential sputtering of alloys. ACTA ACUST UNITED AC 1985. [DOI: 10.1016/0025-5416(85)90346-5] [Citation(s) in RCA: 76] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Mintz MH, Jo Y, Rabalais JW. Thermalization‐reaction‐capture model for low dose active ion bombardment. I. Diffusionless case. J Chem Phys 1983. [DOI: 10.1063/1.445640] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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