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Wu W, Nuzhdin K, Vyushkova M, Janik I, Bartels D. Comparison of Acid Generation in EUV Lithography Films of Poly(4-hydroxystyrene) (PHS) and Noria Adamantyl Ester (Noria-AD50). J Phys Chem B 2012; 116:6215-24. [DOI: 10.1021/jp300677q] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Weiqiang Wu
- Radiation Laboratory, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - Kirill Nuzhdin
- Radiation Laboratory, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - Mariya Vyushkova
- Radiation Laboratory, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - Ireneusz Janik
- Radiation Laboratory, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - David Bartels
- Radiation Laboratory, University of Notre Dame, Notre Dame, Indiana 46556, United States
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