Chin RT, Harlow CA. Automated visual inspection: a survey.
IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE 1982;
4:557-573. [PMID:
22499630 DOI:
10.1109/tpami.1982.4767309]
[Citation(s) in RCA: 39] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
This paper surveys publications, reports, and articles dealing with automated visual inspection for industry. The references are organized according to their contents: overview and discussions, rationales, components and design considerations, commercially available systems, applications. A number of applications and their inspection methodologies are discussed in detail: the inspection of printed circuit boards, photomasks, integrated circuit chips. Other inspection applications are listed as a bibliography. A list of selectively annotated references in commercially available visual inspection tools is also included.
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