Pathak Y, Malhotra BD, Chaujar R. Detection of biomolecules in dielectric modulated double metal below ferroelectric layer FET with improved sensitivity.
JOURNAL OF MATERIALS SCIENCE. MATERIALS IN ELECTRONICS 2022;
33:13558-13567. [PMID:
38625222 PMCID:
PMC9078211 DOI:
10.1007/s10854-022-08290-x]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/31/2021] [Accepted: 04/16/2022] [Indexed: 04/17/2024]
Abstract
In this work, we examined the double metal below ferroelectric layer FET that is double metal below negative capacitance field-effect transistor (DM-below-NCFET) for biosensing application and change in nanocavity gap with biomolecules as protein, ChO x (cholesterol oxidase), streptavidin, and uricase. For measuring the electrical characteristic and neutral biosensing such as threshold voltage, switching ratio (I on / I off ) of the device which is higher than one without molecules by 1.52 times, sensitivity of protein enhanced by 1.11 over without biomolecule, limit of detection of protein is higher by 1.012 times over without molecule, shift in potential have been researched for cavity length 10 nm. The biosensor indicated improved sensitivity for biomolecules with the rise in their dielectric parameter. Moreover, modulation of the length of the gap of cavity was too examined, exposing that its increment (from 8 to 12 nm) altogether upgraded the sensitivity of the proposed biosensor. Visual TCAD (Technology Computer-Aided Design) software is used for simulating all results. In general, the consequences of this examination represent that such DM-below-NCFET biosensors can display extreme sensitivity (1.11) at small drain voltage (0.4 V), empowering their utilization for biosensor applications to analyze different infections which involve low power, extreme density, and enhanced speed.
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