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Prosvetov A, Verkhovtsev AV, Sushko G, Solov’yov AV. Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF 3) 4. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:1151-1172. [PMID: 34760430 PMCID: PMC8551874 DOI: 10.3762/bjnano.12.86] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/01/2021] [Accepted: 10/01/2021] [Indexed: 06/13/2023]
Abstract
This paper presents a detailed computational protocol for the atomistic simulation of formation and growth of metal-containing nanostructures during focused electron beam-induced deposition (FEBID). The protocol is based upon irradiation-driven molecular dynamics (IDMD), a novel and general methodology for computer simulations of irradiation-driven transformations of complex molecular systems by means of the advanced software packages MBN Explorer and MBN Studio. Atomistic simulations performed following the formulated protocol provide valuable insights into the fundamental mechanisms of electron-induced precursor fragmentation and the related mechanism of nanostructure formation and growth using FEBID, which are essential for the further advancement of FEBID-based nanofabrication. The developed computational methodology is general and applicable to different precursor molecules, substrate types, and irradiation regimes. The methodology can also be adjusted to simulate the nanostructure formation by other nanofabrication techniques using electron beams, such as direct electron beam lithography. In the present study, the methodology is applied to the IDMD simulation of the FEBID of Pt(PF3)4, a widely studied precursor molecule, on a SiO2 surface. The simulations reveal the processes driving the initial phase of nanostructure formation during FEBID, including the nucleation of Pt atoms and the formation of small metal clusters on the surface, followed by their aggregation and the formation of dendritic platinum nanostructures. The analysis of the simulation results provides spatially resolved relative metal content, height, and growth rate of the deposits, which represents valuable reference data for the experimental characterization of the nanostructures grown by FEBID.
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Affiliation(s)
- Alexey Prosvetov
- MBN Research Center, Altenhöferallee 3, 60438 Frankfurt am Main, Germany
| | - Alexey V Verkhovtsev
- MBN Research Center, Altenhöferallee 3, 60438 Frankfurt am Main, Germany
- on leave from Ioffe Physical-Technical Institute, Polytekhnicheskaya 26, 194021 St. Petersburg, Russia
| | - Gennady Sushko
- MBN Research Center, Altenhöferallee 3, 60438 Frankfurt am Main, Germany
| | - Andrey V Solov’yov
- MBN Research Center, Altenhöferallee 3, 60438 Frankfurt am Main, Germany
- on leave from Ioffe Physical-Technical Institute, Polytekhnicheskaya 26, 194021 St. Petersburg, Russia
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Dossmann (Soldi-Lose) H, Garcia GA, Nahon L, de Miranda BKC, Alcaraz C. Comprehensive vacuum ultraviolet photoionization study of the CF3• trifluoromethyl radical using synchrotron radiation. J Chem Phys 2012; 136:204304. [DOI: 10.1063/1.4719529] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/23/2022] Open
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Martínez R, Sierra B, Redondo C, Rayo MNS, Castaño F. Absolute electron-impact total ionization cross sections of chlorofluoromethanes. J Chem Phys 2004; 121:11653-60. [PMID: 15634131 DOI: 10.1063/1.1808413] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
Abstract
An experimental study is reported on the electron-impact total ionization cross sections (TICSs) of CCl4, CCl3F, CCl2F2, and CClF3 molecules. The kinetic energy of the colliding electrons was in the 10-85 eV range. TICSs were obtained as the sum of the partial ionization cross sections of all fragment ions, measured and identified in a linear double focusing time-of-flight mass spectrometer. The resulting TICS profiles--as a function of the electron-impact energy--have been compared both with those computed by ab initio and (semi)empirical methods and with the available experimental data. The computational methods used include the binary-encounter-Bethe (BEB) modified to include atoms with principal quantum numbers n> or =3, the Deutsch and Märk (DM) formalism, and the modified additivity rule (MAR). It is concluded that both modified BEB and DM methods fit the experimental TICS for (CF4), CClF3, CCl2F2, CCl3F, and CCl4 to a high accuracy, in contrast with the poor accord of the MAR method. A discussion on the factors influencing the discrepancies of the fittings is presented.
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Affiliation(s)
- Roberto Martínez
- Facultad de Farmacia, Departamento de Química Física, Paseo de la Universidad, 7, 01006 Vitoria, Spain
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Kwitnewski S, Ptasińska-Denga E, Szmytkowski C. Relationship between electron-scattering grand total and ionization total cross sections. Radiat Phys Chem Oxf Engl 1993 2003. [DOI: 10.1016/s0969-806x(03)00275-5] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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Torres I, Martı́nez R, Sánchez Rayo MN, Castaño F. Evaluation of the computational methods for electron-impact total ionization cross sections: Fluoromethanes as benchmarks. J Chem Phys 2001. [DOI: 10.1063/1.1388041] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Basner R, Schmidt M, Denisov E, Becker K, Deutsch H. Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4). J Chem Phys 2001. [DOI: 10.1063/1.1333018] [Citation(s) in RCA: 23] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/21/2022] Open
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Deutsch H, Becker K, Basner R, Schmidt M, Märk TD. Application of the Modified Additivity Rule to the Calculation of Electron-Impact Ionization Cross Sections of Complex Molecules. J Phys Chem A 1998. [DOI: 10.1021/jp9827577] [Citation(s) in RCA: 55] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- H. Deutsch
- Institut für Physik, Ernst-Moritz-Arndt Universität, D-17487 Greifswald, Germany; Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, New Jersey 07030; Institut für Niedertemperatur Plasmaphysik (INP), D-17489 Greifswald, Germany; and Institut für Ionenphysik, Leopold-Franzens Universität, A-6020 Innsbruck, Austria
| | - K. Becker
- Institut für Physik, Ernst-Moritz-Arndt Universität, D-17487 Greifswald, Germany; Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, New Jersey 07030; Institut für Niedertemperatur Plasmaphysik (INP), D-17489 Greifswald, Germany; and Institut für Ionenphysik, Leopold-Franzens Universität, A-6020 Innsbruck, Austria
| | - R. Basner
- Institut für Physik, Ernst-Moritz-Arndt Universität, D-17487 Greifswald, Germany; Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, New Jersey 07030; Institut für Niedertemperatur Plasmaphysik (INP), D-17489 Greifswald, Germany; and Institut für Ionenphysik, Leopold-Franzens Universität, A-6020 Innsbruck, Austria
| | - M. Schmidt
- Institut für Physik, Ernst-Moritz-Arndt Universität, D-17487 Greifswald, Germany; Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, New Jersey 07030; Institut für Niedertemperatur Plasmaphysik (INP), D-17489 Greifswald, Germany; and Institut für Ionenphysik, Leopold-Franzens Universität, A-6020 Innsbruck, Austria
| | - T. D. Märk
- Institut für Physik, Ernst-Moritz-Arndt Universität, D-17487 Greifswald, Germany; Department of Physics and Engineering Physics, Stevens Institute of Technology, Hoboken, New Jersey 07030; Institut für Niedertemperatur Plasmaphysik (INP), D-17489 Greifswald, Germany; and Institut für Ionenphysik, Leopold-Franzens Universität, A-6020 Innsbruck, Austria
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A modified additivity rule for the calculation of electron impact ionization cross-section of molecules ABn. ACTA ACUST UNITED AC 1997. [DOI: 10.1016/s0168-1176(97)00108-0] [Citation(s) in RCA: 67] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/20/2022]
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Tarnovsky V, Deutsch H, Becker K. Electron impact ionization of the SiDx (x=1–3) free radicals. J Chem Phys 1996. [DOI: 10.1063/1.472484] [Citation(s) in RCA: 33] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Basner R, Foest R, Schmidt M, Sigeneger F, Kurunczi P, Becker K, Deutsch H. Electron impact ionization of tetramethylsilane (TMS). ACTA ACUST UNITED AC 1996. [DOI: 10.1016/0168-1176(95)04352-7] [Citation(s) in RCA: 51] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
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Hwang W, Kim Y, Rudd ME. New model for electron‐impact ionization cross sections of molecules. J Chem Phys 1996. [DOI: 10.1063/1.471116] [Citation(s) in RCA: 437] [Impact Index Per Article: 15.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Absolute and scaled electron-impact ionization cross-sections for hydrogen-, helium-, and lithium-like ions. ACTA ACUST UNITED AC 1995. [DOI: 10.1016/0168-1176(95)04320-9] [Citation(s) in RCA: 24] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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Basner R, Schmidt M, Deutsch H, Tarnovsky V, Levin A, Becker K. Electron impact ionization of the SO2molecule. J Chem Phys 1995. [DOI: 10.1063/1.469634] [Citation(s) in RCA: 51] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Deutsch H, Becker K, Märk T. A semi-empirical method to calculate cross-sections for the electron-impact ionization of clusters. ACTA ACUST UNITED AC 1995. [DOI: 10.1016/0168-1176(95)04166-i] [Citation(s) in RCA: 16] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
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