1
|
Abstract
Amorphous In−Zn−O thin films were deposited with various hydrogen flow rates using a magnetron sputtering system. With the addition of hydrogen, the mechanical stability of the films was dramatically improved without any degradation of electrical properties and optical transmittance. The average change in the resistance of the sample deposited at a hydrogen flow rate of 0.4% was approximately six times lower than that in the sample deposited without hydrogen. Both, the compressive residual stress and absorption coefficient of the sample, decreased with hydrogen flow, indicating similar trends with the average change in the resistance. The absorption coefficient near 3.1 eV indicated that subgap state defects also decreased with increasing hydrogen flow rates. It was confirmed that the improvement in mechanical stability was derived from the suppression of subgap defects due to the hydrogen impurity. Thus, we demonstrated that hydrogen is a promising candidate for stabilizing the mechanical properties of oxide thin films.
Collapse
|
2
|
|
3
|
Gertsman V, Tangri K. Computer simulation study of grain boundary and triple junction distributions in microstructures formed by multiple twinning. ACTA ACUST UNITED AC 1995. [DOI: 10.1016/0956-7151(94)00422-6] [Citation(s) in RCA: 45] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
|
4
|
Fionova L, Juarez-Isas J, Perez R, Albarran J, Flores O, Martinez L, Titovets Y. The effect of local texture on crack propagation in FeAl ordered alloy. ACTA ACUST UNITED AC 1994. [DOI: 10.1016/0956-716x(94)90452-9] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/27/2022]
|
5
|
Gertsman V, Tangri K, Valiev R. On the grain boundary statistics in metals and alloys susceptible to annealing twinning. ACTA ACUST UNITED AC 1994. [DOI: 10.1016/0956-7151(94)90004-3] [Citation(s) in RCA: 65] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
|
6
|
Meyers D, Ardell A. Mechanical properties of individual grain boubdaries in Ni3Al using a miniaturized disk-bend test. ACTA ACUST UNITED AC 1993. [DOI: 10.1016/0956-7151(93)90129-g] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/27/2022]
|