Atomic layer deposition for biosensing applications

Thiol-Functionalized Adsorbents through Atomic Layer Deposition and Vapor-Phase Silanization for Heavy Metal Ion Removal

The removal of toxic heavy metal ions from water resources is crucial for environmental protection and public health. In this study, we address this challenge by developing a surface functionalization technique for the selective adsorption of these contaminants. Our approach involves atomic layer deposition (ALD) followed by vapor-phase silanization of porous substrates. We utilized porous silica gel powder (∼100 μm particles, 89 m2/g surface area, ∼30 nm pores) as an initial substrate. This powder was first coated with ∼0.5 nm ALD Al2O3, followed by vapor-phase grafting of a thiol-functional silane. The modified powder, particularly in acidic conditions (pH = 4), showed high selectivity in adsorbing Cd(II), As(V), Pb(II), Hg(II), and Cu(II) heavy metal ions in mixed ion solutions over common benign ions (e.g., Na, K, Ca, and Mg). Langmuir adsorption isotherms and breakthrough adsorption studies were conducted to assess heavy metal binding affinity and revealed the order of Cd(II) < Pb(II) < Cu(II) < As(V) < Hg(II), with a significantly higher affinity for As(V) and Hg(II) ions. Time-dependent uptake studies demonstrated rapid removal of heavy metal ions from aqueous environments, with Hg(II) exhibiting the fastest adsorption kinetics on thiol-modified surfaces. These findings highlight the potential of ALD and vapor-phase silanization to create effective adsorbents for the targeted removal of hazardous contaminants from water.

Recent Achievements for Flexible Encapsulation Films Based on Atomic/Molecular Layer Deposition

The purpose of this paper is to review the research progress in the realization of the organic-inorganic hybrid thin-film packaging of flexible organic electroluminescent devices using the PEALD (plasma-enhanced atomic layer deposition) and MLD (molecular layer deposition) techniques. Firstly, the importance and application prospect of organic electroluminescent devices in the field of flexible electronics are introduced. Subsequently, the principles, characteristics and applications of PEALD and MLD technologies in device packaging are described in detail. Then, the methods and process optimization strategies for the preparation of organic-inorganic hybrid thin-film encapsulation layers using PEALD and MLD technologies are reviewed. Further, the research results on the encapsulation effect, stability and reliability of organic-inorganic hybrid thin-film encapsulation layers in flexible organic electroluminescent devices are discussed. Finally, the current research progress is summarized, and the future research directions and development trends are prospected.

Advances in Bioelectrode Design for Developing Electrochemical Biosensors

The critical performance factors such as selectivity, sensitivity, operational and storage stability, and response time of electrochemical biosensors are governed mainly by the function of their key component, the bioelectrode. Suitable design and fabrication strategies of the bioelectrode interface are essential for realizing the requisite performance of the biosensors for their practical utility. A multifaceted attempt to achieve this goal is visible from the vast literature exploring effective strategies for preparing, immobilizing, and stabilizing biorecognition elements on the electrode surface and efficient transduction of biochemical signals into electrical ones (i.e., current, voltage, and impedance) through the bioelectrode interface with the aid of advanced materials and techniques. The commercial success of biosensors in modern society is also increasingly influenced by their size (and hence portability), multiplexing capability, and coupling in the interface of the wireless communication technology, which facilitates quick data transfer and linked decision-making processes in real-time in different areas such as healthcare, agriculture, food, and environmental applications. Therefore, fabrication of the bioelectrode involves careful selection and control of several parameters, including biorecognition elements, electrode materials, shape and size of the electrode, detection principles, and various fabrication strategies, including microscale and printing technologies. This review discusses recent trends in bioelectrode designs and fabrications for developing electrochemical biosensors. The discussions have been delineated into the types of biorecognition elements and their immobilization strategies, signal transduction approaches, commonly used advanced materials for electrode fabrication and techniques for fabricating the bioelectrodes, and device integration with modern electronic communication technology for developing electrochemical biosensors of commercial interest.

Atomic Layer Deposition of Antibacterial Nanocoatings: A Review

In recent years, antibacterial coatings have become an important approach in the global fight against bacterial pathogens. Developments in materials science, chemistry, and biochemistry have led to a plethora of materials and chemical compounds that have the potential to create antibacterial coatings. However, insufficient attention has been paid to the analysis of the techniques and technologies used to apply these coatings. Among the various inorganic coating techniques, atomic layer deposition (ALD) is worthy of note. It enables the successful synthesis of high-purity inorganic nanocoatings on surfaces of complex shape and topography, while also providing precise control over their thickness and composition. ALD has various industrial applications, but its practical application in medicine is still limited. In recent years, a considerable number of papers have been published on the proposed use of thin films and coatings produced via ALD in medicine, notably those with antibacterial properties. The aim of this paper is to carefully evaluate and analyze the relevant literature on this topic. Simple oxide coatings, including TiO2, ZnO, Fe2O3, MgO, and ZrO2, were examined, as well as coatings containing metal nanoparticles such as Ag, Cu, Pt, and Au, and mixed systems such as TiO2-ZnO, TiO2-ZrO2, ZnO-Al2O3, TiO2-Ag, and ZnO-Ag. Through comparative analysis, we have been able to draw conclusions on the effectiveness of various antibacterial coatings of different compositions, including key characteristics such as thickness, morphology, and crystal structure. The use of ALD in the development of antibacterial coatings for various applications was analyzed. Furthermore, assumptions were made about the most promising areas of development. The final section provides a comparison of different coatings, as well as the advantages, disadvantages, and prospects of using ALD for the industrial production of antibacterial coatings.

Realization of an autonomously controllable process for atomic layer deposition and its encapsulation application in flexible organic light-emitting diodes

Atomic layer deposition (ALD), an emerging method of thin film fabrication, has recently witnessed a surge of applications in the optoelectronics field. However, reliable processes capable of controlling film composition have yet to be developed. In this work, the effect of precursor partial pressure and steric hindrance on the surface activity was presented and analyzed in detail, which led to the development of a component tailoring process for ALD composition control in intralayer for the first time. Further, a homogeneous organic/inorganic hybrid film was successfully grown. The component unit of the hybrid film under the joint action of EG and O plasma could achieve arbitrary ratios by controlling the EG/O plasma surface reaction ratio via varied partial pressures. Film growth parameters (growth rate per cycle and mass gain per cycle) and physical properties (density, refractive index, residual stress, transmission, and surface morphology) could be modulated as desired. Moreover, the hybrid film with low residual stress was effectively used in the encapsulation of flexible organic light-emitting diodes (OLEDs). Such a component tailoring process is an important step forward in ALD technology, and allowing for in-situ control of thin film components at the atomic level in intralayer.

Growth behavior of Ir metal formed by atomic layer deposition in the nanopores of anodic aluminum oxide

The conformal coating or surface modification in high aspect ratio nanostructures is a tough challenge using traditional physical/chemical vapor deposition, especially for metal deposition. In this work, the growth behavior of iridium (Ir) metal formed by atomic layer deposition (ALD) in anodic aluminum oxide (AAO) templates was explored deeply. It is found that the surface hydrophilicity is crucial for the nucleation of ALD Ir. An in situ ALD Al₂O₃ layer with an ultra-hydrophilic surface can greatly promote the nucleation of ALD Ir in AAO nanopores. The effect of the Ir precursor pulse time, diameter, and length of AAO nanopores on the infiltration depth of ALD Ir was investigated systematically. The results show that the infiltration depth of ALD Ir in AAO nanopores is in proportion to the pore diameter and the square root of the Ir precursor pulse time, which follows a diffusion-limited model. Furthermore, the Ir precursor pulse time to obtain conformal Ir coating throughout all the AAO channels is in proportion to the square of the aspect ratio of AAO templates. In addition, the conformal Ir deposition in AAO nanopores is also related to the Ir precursor purge time and the O₂ partial pressure. Insufficient Ir purge time could cause a CVD-like reaction, leading to the reduction of the infiltration depth in AAO. Higher O₂ partial pressure can facilitate Ir nucleation with more Ir precursor consumption at the entrance of nanopores, decreasing the infiltration depth in AAO nanopores, so appropriate O₂ partial pressure should be chosen for ALD Ir in high aspect ratio materials. Above all, our research is valuable for surface modification or coating of metal by ALD in high aspect ratio nanostructures for 3D microelectronics, nano-fabrication, catalysis and energy fields.

Atmospheric atomic layer deposition of SnO2 thin films with tin(II) acetylacetonate and water

Due to its unique optical, electrical, and chemical properties, tin dioxide (SnO₂) thin films attract enormous attention as a potential material for gas sensors, catalysis, low-emissivity coatings for smart windows, transparent electrodes for low-cost solar cells, etc. However, the low-cost and high-throughput fabrication of SnO₂ thin films without producing corrosive or toxic by-products remains challenging. One appealing deposition technique, particularly well-adapted to films presenting nanometric thickness is atomic layer deposition (ALD). In this work, several metalorganic tin-based complexes, namely, tin(IV) tert-butoxide, bis[bis(trimethylsilyl)amino] tin(II), dibutyltin diacetate, tin(II) acetylacetonate, tetrakis(dimethylamino) tin(IV), and dibutyltin bis(acetylacetonate), were explored thanks to DFT calculations. Our theoretical calculations suggest that the three last precursors are very appealing for ALD of SnO₂ thin films. The potential use of these precursors for atmospheric-pressure spatial atomic layer deposition (AP-SALD) is also discussed. For the first time, we experimentally demonstrate the AP-SALD growth of SnO₂ thin films using tin(II) acetylacetonate (Sn(acac)₂) and water. We observe that Sn(acac)₂ exhibits efficient ALD activity with a relatively large ALD temperature window (140-200 °C), resulting in a growth rate of 0.85 ± 0.03 Å per cyc. XPS analyses show a single Sn 3d_5/2 characteristic peak for Sn⁴⁺ at 486.8 ± 0.3 eV, indicating that a pure SnO₂ phase is obtained within the ALD temperature window. The as-deposited SnO₂ thin films are in all cases amorphous, and film conductivity increases with the deposition temperature. Hall effect measurements confirm the n-type nature of SnO₂ with a free electron density of about 8 × 10¹⁹ cm^-3, electron mobility up to 11.2 cm² V^-1 s^-1, and resistivity of 7 × 10^-3 Ω cm for samples deposited at 270 °C.

Tunable TiO2-BN-Pd nanofibers by combining electrospinning and atomic layer deposition to enhance photodegradation of acetaminophen

The demand for fresh and clean water sources is increasing globally, and there is a need to develop novel routes to eliminate micropollutants and other harmful species from water. Photocatalysis is a promising alternative green technology that has shown great performance in the degradation of persistent pollutants. Titanium dioxide is the most used catalyst owing to its attractive physico-chemical properties, but this semiconductor presents limitations in the photocatalysis process due to the high band gap and the fast recombination of the photogenerated carriers. Herein, a novel photocatalyst has been developed, based on titanium dioxide nanofibers (TiO2 NFs) synthesized by electrospinning. The TiO2 NFs were coated by atomic layer deposition (ALD) to grow boron nitride (BN) and palladium (Pd) on their surface. The UV-Vis spectroscopy measurements confirmed the increase of the band gap and the extension of the spectral response to the visible range. The obtained TiO2/BN/Pd nanofibers were then tested for photocatalysis, and showed a drastic increase of acetaminophen (ACT) degradation (>90%), compared to only 20% degradation obtained with pure TiO2 after 4 h of visible light irradiation. The high photocatalytic activity was attributed to the good dispersion of Pd NPs on TiO2-BN nanofibers, leading to a higher transfer of photoexcited hole carriers and a decrease of photogenerated electron-charge recombination. To confirm its reusability, recycling tests on the hybrid photocatalyst TiO2/BN/Pd have been performed, showing a good stability over 5 cycles under UV and visible light. In addition, toxicity tests as well as quenching tests were carried out to check the toxicity of the byproducts formed and to determine active species responsible for the degradation. The results presented in this work demonstrate the potential of TiO2/BN/Pd nanomaterials, and open new prospects for the preparation of tunable photocatalysts.

Techniques of Preparation of Thin Films: Catalytic Combustion

Over the past several decades, an increasing amount of attention has been given to catalytic combustion as an environmentally friendly process. However, major impediments to large-scale application still arise on the materials side. Here, we review catalytic combustion on thin film catalysts in view of highlighting some interesting features. Catalytic films open the way for new designs of structured catalysts and the construction of catalysts for catalytic combustion. A special place is occupied by materials in the form of very thin films that reveal catalytic activity for various chemical reactions. In this review, we demonstrate the high catalytic activity of thin film catalysts in these oxidation reactions.

Optical-Fiber Microsphere-Based Temperature Sensors with ZnO ALD Coating-Comparative Study

This study presents the microsphere-based fiber-optic sensor with the ZnO Atomic Layer Deposition coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range from 100 °C to 300 °C, with a 10 °C step. The interferometric signal was used to monitor the integrity of the microsphere and its attachment to the connecting fiber. For the sensor with a 100 nm coating, a spectrum shift of the reflected signal and the optical power of the reflected signal were used to measure temperature, while only the optical power of the reflected signal was used in the sensor with a 200 nm coating. The R² coefficient of the discussed sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 19 pm/°C or 11.4 nW/°C for ZnO thickness of 200 nm and 100 nm, respectively.

Liquid atomic layer deposition as emergent technology for the fabrication of thin films

Atomic layer deposition (ALD) is widely recognized as a unique chemical vapor deposition technique for the fabrication of thin films with high conformality and precise thickness control down to the Ångstrom level, thereby allowing surface and interface nanoengineering. However, several challenges such as the availability of chemical precursors for ALD and the use of vacuum conditions have hampered its widespread adoption and scalability for mass production. In recent years, the liquid phase homolog of ALD, liquid atomic layer deposition (LALD), has emerged as a much simpler and versatile strategy to overcome some of the current constraints of ALD. This perspective describes the different strategies that have been explored to achieve conformality and sub-nanometer thickness control with LALD, as well as the current challenges it faces to become a part of the thin-film community toolbox, in particular its automation and compatibility with different types of substrates. In this regard, the important role of LALD as complementary technology to ALD is emphasized by comparing the different pathways to deposit the same material and the precursors used to do so.

Enhanced response of sensor on serotonin using nickel-reduced graphene oxide by atomic layer deposition

Atomic layer deposition (ALD) is a promising method for preparing nanomaterials. The thickness and uniformity of nanomaterials can be precisely controlled. Hence, the uniform Ni nanoparticles (Ni NPs) deposited on reduced graphene oxide (rGO) by ALD and got the optimal combination interface. The morphology, structure, and electrochemical behavior of Ni NPs-rGO nanocomposite are investigated. By experiment results, the Ni NPs could occupy some active surface of rGO, resulting in high conductivity and large specific surface area of Ni NPs-rGO nanocomposite. The Ni NPs-rGO nanocomposite exhibits high electrocatalytic activity for serotonin and speeds up the electron transfer between the surface of the electrode and the solution. Therefore, the sensor is prepared by Ni NPs-rGO nanocomposite modified glassy carbon electrode (GCE) and used to sensitive detection of serotonin. By differential pulse voltammetric, the Ni NPs-rGO/GCE enhanced the current responses and showed a wide linear range of 0.02-2 μM with a low detection of 0.01 μM for serotonin (S/N = 3). The Ni NPs-rGO/GCE exhibited good stability, selectivity, and anti-interference ability that can be used for real sample detection. According to these results, the Ni NPs-rGO nanocompositeis successfully prepared by ALD. The properties of Ni NPs-rGO nanocomposite make it an attractive material for potential applications in sensors and catalysis.

Structural, optical, and mechanical properties of TiO2 nanolaminates

The structural, optical, and mechanical properties of TiO₂ nanolaminate films grown by plasma-enhanced atomic layer deposition are discussed. Several TiO₂/Al₂O₃ and TiO₂/SiO₂ compositions have been investigated to study the effect of the relative number of ALD oxide cycles on the film properties to obtain a high refractive index coating with low optical losses, low roughness, and low mechanical stress. The formation of crystalline TiO₂ observed at high deposition temperature, or film thickness was inhibited by periodically introducing ultra-thin amorphous layers into the film. Only 4 ALD cycles of Al₂O₃ (corresponding to ca. 0.5 nm) between 335 ALD cycles of TiO₂ (ca. 11 nm) form a closed, distinct layer suppressing the crystallization in TiO₂ film. Consequently, the roughness of the pure TiO₂ film is reduced from ca. 20 nm rms to 1 nm rms in the 335/4 nanolaminate, with only a slight decrease of the refractive index from 2.46 to 2.44 in 100 nm pure TiO₂ and the nanolaminate, respectively. The refractive indices of the nanolaminates in various compositions vary between 2.38 and 2.50 at 632 nm, and the corresponding optical losses from the films are low. The mechanical stress was reduced to about 140 MPa in several TiO₂/Al₂O₃ nanolaminates; however, lower mechanical stress has not been obtained with the studied compositions. The nanolaminate structure is preserved up to 600 °C annealing temperature. After annealing at 800 °C, the individual layers interdiffuse into each other so that no distinct nanolaminate structure is detected. By using TiO₂/Al₂O₃ nanolaminates with reduced mechanical stress, a narrow bandpass filter was realized on various substrates, including half-ball and aspherical lenses.

New developments in anti-biofilm intervention towards effective management of orthopedic device related infections (ODRI's)

Orthopedic device related infections (ODRI's) represent a difficult to treat situation owing to their biofilm based nature. Biofilm infections once established are difficult to eradicate even with an aggressive treatment regimen due to their recalcitrance towards antibiotics and immune attack. The involvement of antibiotic resistant pathogens as the etiological agent further worsens the overall clinical picture, pressing on the need to look into alternative treatment strategies. The present review highlightes the microbiological challenges associated with treatment of ODRI's due to biofilm formation on the implant surface. Further, it details the newer anti-infective modalities that work either by preventing biofilm formation and/or through effective disruption of the mature biofilms formed on the medical implant. The study, therefore aims to provide a comprehensive insight into the newer anti-biofilm interventions (non-antibiotic approaches) and a better understanding of their mechanism of action essential for improved management of orthopedic implant infections.

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made of silicon and consist of rectangular channels supported by pillars. Extreme aspect ratios even beyond 10 000 : 1 enable investigations where the adsorption front does not penetrate to the end of the channel, thus exposing the saturation profile for detailed analysis. We use the archetypical trimethylaluminum (TMA)-water ALD process to grow alumina as a test vehicle to demonstrate the applicability, repeatability and reproducibility of the saturation profile measurement and to provide a benchmark for future saturation profile studies. Through varying the TMA reaction and purge times, we obtained new information on the surface chemistry characteristics and the chemisorption kinetics of this widely studied ALD process. New saturation profile related classifications and terminology are proposed.

Hafnium (IV) oxide obtained by atomic layer deposition (ALD) technology promotes early osteogenesis via activation of Runx2-OPN-mir21A axis while inhibits osteoclasts activity

BACKGROUND

Due to increasing aging of population prevalence of age-related disorders including osteoporosis is rapidly growing. Due to health and economic impact of the disease, there is an urgent need to develop techniques supporting bone metabolism and bone regeneration after fracture. Due to imbalance between bone forming and bone resorbing cells, the healing process of osteoporotic bone is problematic and prolonged. Thus searching for agents able to restore the homeostasis between these cells is strongly desirable.

RESULTS

In the present study, using ALD technology, we obtained homogeneous, amorphous layer of hafnium (IV) oxide (HfO2). Considering the specific growth rate (1.9Å/cycle) for the selected process at the temperature of 90 °C, we performed the 100 nm deposition process, which was confirmed by measuring film thickness using reflectometry. Then biological properties of the layer were investigated with pre-osteoblast (MC3T3), pre-osteoclasts (4B12) and macrophages (RAW 264.7) using immunofluorescence and RT-qPCR. We have shown, that HfO2 (i) enhance osteogenesis, (ii) reduce osteoclastogenesis (iii) do not elicit immune response and (iv) exert anti-inflammatory effects.

CONCLUSION

HfO2 layer can be applied to cover the surface of metallic biomaterials in order to enhance the healing process of osteoporotic bone fracture.

Photoluminescence label-free immunosensor for the detection of Aflatoxin B1 using polyacrylonitrile/zinc oxide nanofibers

The precise and rapid detection of hazardous molecules, microorganisms, pollutants, and toxins currently remains a global challenge. Aflatoxin B1 (AFB1) is a toxic and dangerous product of fungi that considered as cancerogenic, mutagenic, and immunosuppressive for humans and animals. Therefore, the screening of AFB1 in food and beverages plays an important role in preventing foodborne illnesses. In this study, AFB1 molecules were detected in a microfluidic device with integrated polyacrylonitrile/zinc oxide (PAN/ZnO) nanofibers fabricated via a combination of the electrospinning, and atomic layer deposition (ALD) techniques. The structural and optical analyses of PAN/ZnO nanofibers were performed and samples with the most suitable properties were utilized for AFB1 detection. In order to obtain the biorecognition layer towards AFB1, PAN/ZnO samples were modified by (3-Aminopropyl) triethoxysilane (APTES), and glutaraldehyde (GA), bovine serum albumin (BSA) and monoclonal antibodies (Anti-AFB1). Subsequently, photoluminescence (PL)-based immunosensor was integrated into a microfluidic cell and tested for AFB1 detection. The mechanism of PL changes caused by AFB1 & Anti-AFB1 complex formation was analyzed and developed. The proposed approach enables the detection of AFB1 with the lowest concentration (LOD) of about 39 pg/ml, while the sensitivity range was evaluated as 0.1-20 ng/ml. The obtained values of LOD and sensitivity, as well as the simplicity of the detection method, make this approach a prospect for further application.

Improving stress corrosion cracking behavior of AZ31 alloy with conformal thin titania and zirconia coatings for biomedical applications

Magnesium and its alloys have been widely studied as materials for temporary implant devices. However, corrosion-assisted cracking phenomena such as stress corrosion cracking (SCC) continue to prevent their mainstream use. For the first time, we explore the SCC susceptibility of Atomic Layer Deposition (ALD) coated AZ31 alloys in Simulated Body Fluid (SBF). Conformal 100 nm coatings of titania and zirconia were deposited on standard dogbone specimens and subjected to slow strain rate tests at 3.5 10^-6 s^-1 and a temperature of 37 °C. Remarkably, the SCC susceptibility index I_UTS was reduced by 6% and 40% and the I_ε was reduced by more than 70% and 76% with a titania and zirconia coating, respectively. Potentiodynamic polarization, hydrogen evolution and fracture behavior of the samples revealed the drastic corrosion reduction to be the main reason for the susceptibility reduction. We discuss the observed SCC behavior of our samples in light of the coatings' electrochemical activities, wettabilities, surface integrities and mechanical properties. This straightforward conformal surface treatment can be useful as a workaround for one of the major bottlenecks of biomedical Mg based implants and hence provides a possible pathway for making them more commonplace in the field.

Palladium/Carbon Nanofibers by Combining Atomic Layer Deposition and Electrospinning for Organic Pollutant Degradation

As organic dyes are a major source of pollution, it is important to develop novel and efficient heterogeneous catalysts with high activity for their degradation. In this work, two innovative techniques, atomic layer deposition and electrospinning, were used to prepare palladium nanoparticles (Pd NPs) supported on carbon nanofibers (CNFs). The sample morphology was investigated using scanning and transmission electron microscopy. This showed the presence of nanofibers of several micrometers in length and with a mean diameter of 200 nm. Moreover, the size of the highly dispersed Pd NPs was about 7 nm. X-ray photoelectron spectroscopy visually validated the inclusion of metallic Pd. The prepared nano-catalysts were then used to reduce methyl orange (MO) in the presence of sodium borohydride (NaBH₄). The Freundlich isotherm model was the most suitable model to explain the adsorption equilibrium for MO onto the Pd/CNF catalysts. Using 5 mL MO dye-solution (0.0305 mM) and 1 mL NaBH₄ (0.026 mM), a 98.9% of catalytic activity was achieved in 240 min by 0.01 g of the prepared nano-catalysts Pd/C (0.016 M). Finally, no loss of catalytic activity was observed when such catalysts were used again. These results represent a promising avenue for the degradation of organic pollutants and for heterogeneous catalysis.

Application of ZnO Nanorods Based Whispering Gallery Mode Resonator in Optical Immunosensors

In this research a whispering gallery mode (WGM) resonator based on vertically oriented ZnO nanorods, which were formed on silicon surface (silicon/ZnO-NRs), has been applied in the design of optical immunosensor that was dedicated for the determination of grapevine virus A-type (GVA) proteins. Vertically oriented ZnO-NRs were grown on silicon substrates by atmospheric pressure metal organic chemical vapor deposition (APMOCVD) and the silicon/ZnO-NRs structures formed were characterized by structural and optical methods. Optical characterization demonstrates that silicon/ZnO-NRs-based structures can act as 'whispering gallery mode' (WGM) resonator where quasi-whispering gallery modes (quasi-WGMs) are generated. These quasi-WGMs were experimentally observed in the visible and infrared ranges of the photoluminescence spectra. In order to design an immuno-sensing system the anti-GVA antibodies were immobilized on the surface of silicon/ZnO-NRs and in this way silicon/ZnO-NRs/anti-GVA structure was formed. The immobilization of anti-GVA antibodies and then the interaction of silicon/ZnO-NRs/anti-GVA structure with GVA proteins (GVA-antigens) resulted in an opposite shifts of the WGMs peaks in the visible range of the photoluminescence spectra observed as a defect-related photoluminescence emission of ZnO-NRs. Here designed silicon/ZnO-NRs/anti-GVA immuno-sensing structure demonstrates the sensitivity towards GVA-antigens in the concentration range of 1-200 ng/ml. Bioanalytical applicability of the silicon/ZnO-NRs-based structures in the WGMs registration mode is discussed.

Combining nanoparticles grown by ALD and MOFs for gas separation and catalysis applications

Supported metallic nanoparticles (NPs) are essential for many important chemical processes. In order to implement precisely tuned NPs in miniaturized devices by compatible processes, novel nanoengineering routes must be explored. Atomic layer deposition (ALD), a scalable vapor phase technology typically used for the deposition of thin films, represents a promising new route for the synthesis of supported metallic NPs. Metal–organic frameworks (MOFs) are a new exciting class of crystalline porous materials that have attracted much attention in the recent years. Since the size of their pores can be precisely adjusted, these nanomaterials permit highly selective separation and catalytic processes. The combination of NPs and MOF is an emerging area opening numbers of applications, which still faces considerable challenges, and new routes need to be explored for the synthesis of these NPs/MOF nanocomposites. The aim of this paper is double: first, it aims to briefly present the ALD route and its use for the synthesis of metallic NPs. Second, the combination of ALD-grown NPs and MOFs has been explored for the synthesis of Pd NPs/MOF ZIF-8, and several selected examples were ALD-grown NPs and MOFs have been combined and applied gas separation and catalysis will be presented.

Atomic layer deposition of Pd nanoparticles on self-supported carbon-Ni/NiO-Pd nanofiber electrodes for electrochemical hydrogen and oxygen evolution reactions

The most critical challenge in hydrogen fuel production is to develop efficient, eco-friendly, low-cost electrocatalysts for water splitting. In this study, self-supported carbon nanofiber (CNF) electrodes decorated with nickel/nickel oxide (Ni/NiO) and palladium (Pd) nanoparticles (NPs) were prepared by combining electrospinning, peroxidation, and thermal carbonation with atomic layer deposition (ALD), and then employed for hydrogen evolution and oxygen evolution reactions (HER/OER). The best CNF-Ni/NiO-Pd electrode displayed the lowest overpotential (63 mV and 1.6 V at j = 10 mA cm^-2), a remarkably small Tafel slope (72 and 272 mV dec^-1), and consequent exchange current density (1.15 and 22.4 mA cm^-2) during HER and OER, respectively. The high chemical stability and improved electrocatalytic performance of the prepared electrodes can be explained by CNF functionalization via Ni/NiO NP encapsulation, the formation of graphitic layers that cover and protect the Ni/NiO NPs from corrosion, and ALD of Pd NPs at the surface of the self-supported CNF-Ni/NiO electrodes.

Atomic Layer Deposition of Inorganic Films for the Synthesis of Vertically Aligned Carbon Nanotube Arrays and Their Hybrids

Vertically aligned carbon nanotube arrays (VACNTs) have many excellent properties and show great potential for various applications. Recently, there has been a desire to grow VACNTs on nonplanar surfaces and synthesize core-sheath-structured VACNT–inorganic hybrids. To achieve this aim, atomic layer deposition (ALD) has been extensively applied, especially due to its atomic-scale thickness controllability and excellent conformality of films on three-dimensional (3D) structures with high aspect ratios. In this paper, the ALD of catalyst thin films for the growth of VACNTs, such as Co3O4, Al2O3, and Fe2O3, was first mentioned. After that, the ALD of thin films for the synthesis of VACNT–inorganic hybrids was also discussed. To highlight the importance of these hybrids, their potential applications in supercapacitors, solar cells, fuel cells, and sensors have also been reviewed.

On the Use of MOFs and ALD Layers as Nanomembranes for the Enhancement of Gas Sensors Selectivity

Improving the selectivity of gas sensors is crucial for their further development. One effective route to enhance this key property of sensors is the use of selective nanomembrane materials. This work aims to present how metal-organic frameworks (MOFs) and thin films prepared by atomic layer deposition (ALD) can be applied as nanomembranes to separate different gases, and hence improve the selectivity of gas sensing devices. First, the fundamentals of the mechanisms and configuration of gas sensors will be given. A selected list of studies will then be presented to illustrate how MOFs and ALD materials can be implemented as nanomembranes and how they can be implemented to improve the operational performance of gas sensing devices. This review comprehensively shows the benefits of these novel selective nanomaterials and opens prospects for the sensing community.

On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

The synthesis of nanoporous ZnO thin films is achieved through annealing of zinc-alkoxide ("zincone"-like) layers obtained by plasma-enhanced atomic layer deposition (PE-ALD). The zincone-like layers are deposited through sub-saturated PE-ALD adopting diethylzinc and O₂ plasma with doses below self-limiting values. Nanoporous ZnO thin films were subsequently obtained by calcination of the zincone-like layers between 100-600 °C. Spectroscopic ellipsometry (SE) and X-ray diffraction (XRD) were adopted in situ during calcination to investigate the removal of carbon impurities, development of controlled porosity, and formation and growth of ZnO crystallites. The layers developed controlled nanoporosity in the range of 1-5%, with pore sizes between 0.27 and 2.00 nm as measured with ellipsometric porosimetry (EP), as a function of the plasma dose and post-annealing temperature. Moreover, the crystallinity and crystallite orientation could be tuned, ranging from a powder-like to a (100) preferential growth in the out-of-plane direction, as measured by synchrotron-radiation grazing incidence XRD. Calcination temperature ranges were identified in which pore formation and subsequent crystal growth occurred, giving insights in the manufacturing of nanoporous ZnO from Zn-based hybrid materials.

Zinc oxide nanorod based immunosensing platform for the determination of human leukemic cells

Zinc oxide (ZnO) based nanostructures owing unique physical properties - high photoluminescence, biocompatibility and other characteristics, therefore, they attract attention as building blocks suitable for biosensor development. In this research as a target we have used human leukemic cell line IM9 (IM9). IM9 was derived from the patient with a multiple myeloma and expressed cluster of differentiation proteins СD19 on the surface of 85-95% here investigated cancer cells. As a control sample healthy human's peripheral blood mononuclear cells (PBMC) were used and the expression of CD19 protein was found only in 5-9% of these cells. Two types of antibodies labeled by fluorescein isothiocyanate (FITC) were used for the labeling of human leukemic cells: FITC-conjugated mouse antibodies against Human CD19 protein (anti-CD19-FITC*) and FITC-conjugated mouse antibodies against Human IgG1 protein (anti-IgG1-FITC*). In order to demonstrate the applicability of zinc oxide nanorods (ZnO-NRs) based platforms three types of ZnO-NRs-based structures were investigated: (i) ZnO-NRs modified by anti-CD19-FITC*; (ii) ZnO-NRs modified by IM9 cells, which were pre-incubated with anti-CD19-FITC*; (iii) ZnO-NRs modified by PBMC cells, which were pre-incubated with anti-CD19-FITC*. It was demonstrated that IM9 cells after specific interaction with anti-CD19-FITC* bind to ZnO-NRs (ZnO-NRs/IM9 +anti-CD19-FITC*) and photoluminescence based signal significantly increase in comparison with that observed in control samples, which contained PBMC cells incubated with anti-CD19-FITC* (ZnO-NRs/PBMC+anti-CD19-FITC*). The photoluminescence results are in good correlation with the data obtained by flow cytometry. This study illustrate that ZnO-NRs exhibit a photoluminescence signal suitable for the determination of anti-CD19-FITC* labeled IM9 cell line at concentrations - from 10 till 500 cells adsorbed per 1 mm² of ZnO-NRs platform.

Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor

We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry–Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies.

Fracture Mechanics and Oxygen Gas Barrier Properties of Al₂O₃/ZnO Nanolaminates on PET Deposited by Atomic Layer Deposition

Rapid progress in the performance of organic devices has increased the demand for advances in the technology of thin-film permeation barriers and understanding the failure mechanisms of these material systems. Herein, we report the extensive study of mechanical and gas barrier properties of Al₂O₃/ZnO nanolaminate films prepared on organic substrates by atomic layer deposition (ALD). Nanolaminates of Al₂O₃/ZnO and single compound films of around 250 nm thickness were deposited on polyethylene terephthalate (PET) foils by ALD at 90 °C using trimethylaluminium (TMA) and diethylzinc (DEZ) as precursors and H₂O as the co-reactant. STEM analysis of the nanolaminate structure revealed that steady-state film growth on PET is achieved after about 60 ALD cycles. Uniaxial tensile strain experiments revealed superior fracture and adhesive properties of single ZnO films versus the single Al₂O₃ film, as well as versus their nanolaminates. The superior mechanical performance of ZnO was linked to the absence of a roughly 500 to 900 nm thick sub-surface growth observed for single Al₂O₃ films as well as for the nanolaminates starting with an Al₂O₃ initial layer on PET. In contrast, the gas permeability of the nanolaminate coatings on PET was measured to be 9.4 × 10⁻³ O₂ cm³ m⁻² day⁻¹. This is an order of magnitude less than their constituting single oxides, which opens prospects for their applications as gas barrier layers for organic electronics and food and drug packaging industries. Direct interdependency between the gas barrier and the mechanical properties was not established enabling independent tailoring of these properties for mechanically rigid and impermeable thin film coatings.

Boron Nitride as a Novel Support for Highly Stable Palladium Nanocatalysts by Atomic Layer Deposition

The ability to prepare controllable nanocatalysts is of great interest for many chemical industries. Atomic layer deposition (ALD) is a vapor phase technique enabling the synthesis of conformal thin films and nanoparticles (NPs) on high surface area supports and has become an attractive new route to tailor supported metallic NPs. Virtually all the studies reported, focused on Pd NPs deposited on carbon and oxide surfaces. It is, however, important to focus on emerging catalyst supports such as boron nitride materials, which apart from possessing high thermal and chemical stability, also hold great promises for nanocatalysis applications. Herein, the synthesis of Pd NPs on boron nitride (BN) film substrates is demonstrated entirely by ALD for the first time. X-ray photoelectron spectroscopy indicated that stoichiometric BN formed as the main phase, with a small amount of BNxOy, and that the Pd particles synthesized were metallic. Using extensive transmission electron microscopy analysis, we study the evolution of the highly dispersed NPs as a function of the number of ALD cycles, and the thermal stability of the ALD-prepared Pd/BN catalysts up to 750 °C. The growth and coalescence mechanisms observed are discussed and compared with Pd NPs grown on other surfaces. The results show that the nanostructures of the BN/Pd NPs were relatively stable up to 500 °C. Consequent merging has been observed when annealing the samples at 750 °C, as the NPs' average diameter increased from 8.3 ± 1.2 nm to 31 ± 4 nm. The results presented open up exciting new opportunities in the field of catalysis.