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Hu T, Feng J, Yan W, Tian S, Sun J, Liu X, Wei D, Wang Z, Yu Y, Lam JCH, Liu S, Wang ZL, Xiong Y. Piezocatalysis for Chemical-Mechanical Polishing of SiC: Dual Roles of t-BaTiO 3 as a Piezocatalyst and an Abrasive. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2310117. [PMID: 38155494 DOI: 10.1002/smll.202310117] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/13/2023] [Revised: 12/04/2023] [Indexed: 12/30/2023]
Abstract
Chemical mechanical polishing (CMP) offers a promising pathway to smooth third-generation semiconductors. However, it is still a challenge to reduce the use of additional oxidants or/and energy in current CMP processes. Here, a new and green atomically smoothing method: Piezocatalytic-CMP (Piezo-CMP) is reported. Investigation shows that the Piezo-CMP based on tetragonal BaTiO3 (t-BT) can polish the rough surface of a reaction sintering SiC (RS-SiC) to the ultra-smooth surface with an average surface roughness (Ra) of 0.45 nm and the rough surface of a single-crystal 4H-SiC to the atomic planarization Si and C surfaces with Ra of 0.120 and 0.157 nm, respectively. In these processes, t-BT plays a dual role of piezocatalyst and abrasive. That is, it piezo-catalytically generates in-situ active oxygen species to selectively oxidize protruding sites of SiC surface, yielding soft SiO2, and subsequently, it acts as a usual abrasive to mechanically remove these SiO2. This mechanism is further confirmed by density functional theory (DFT) calculation and molecular simulation. In this process, piezocatalytic oxidation is driven only by the original pressure and friction force of a conventional polishing process, thus, the piezo-CMP process do not require any additional oxidant and energy, being a green and effective polishing method.
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Affiliation(s)
- Tao Hu
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
| | - Jinxi Feng
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
- School of Energy and Environment, City University of Hong Kong, Kowloon Tong, Hong Kong SAR, P. R. China
| | - Wen Yan
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
| | - Shuanghong Tian
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
| | - Jingxiang Sun
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
| | - Xiaosheng Liu
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
| | - Di Wei
- CAS Center for Excellence in Nanoscience, Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 100083, P. R. China
| | - Ziming Wang
- CAS Center for Excellence in Nanoscience, Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 100083, P. R. China
| | - Yang Yu
- CAS Center for Excellence in Nanoscience, Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 100083, P. R. China
| | - Jason Chun-Ho Lam
- School of Energy and Environment, City University of Hong Kong, Kowloon Tong, Hong Kong SAR, P. R. China
| | - Shaorong Liu
- Department of Chemistry and Biochemistry, University of Oklahoma, Norman, OK, 73019, USA
| | - Zhong Lin Wang
- CAS Center for Excellence in Nanoscience, Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 100083, P. R. China
| | - Ya Xiong
- School of Environmental Science and Engineering, Sun Yat-sen University, 132 East Waihuan Road, Guangzhou, 510006, P. R. China
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List R, Gonzalez-Lopez L, Ashfaq A, Zaouak A, Driscoll M, Al-Sheikhly M. On the Mechanism of the Ionizing Radiation-Induced Degradation and Recycling of Cellulose. Polymers (Basel) 2023; 15:4483. [PMID: 38231912 PMCID: PMC10708459 DOI: 10.3390/polym15234483] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/18/2023] [Revised: 10/13/2023] [Accepted: 10/23/2023] [Indexed: 01/19/2024] Open
Abstract
The use of ionizing radiation offers a boundless range of applications for polymer scientists, from inducing crosslinking and/or degradation to grafting a wide variety of monomers onto polymeric chains. This review in particular aims to introduce the field of ionizing radiation as it relates to the degradation and recycling of cellulose and its derivatives. The review discusses the main mechanisms of the radiolytic sessions of the cellulose molecules in the presence and absence of water. During the radiolysis of cellulose, in the absence of water, the primary and secondary electrons from the electron beam, and the photoelectric, Compton effect electrons from gamma radiolysis attack the glycosidic bonds (C-O-C) on the backbone of the cellulose chains. This radiation-induced session results in the formation of alkoxyl radicals and C-centered radicals. In the presence of water, the radiolytically produced hydroxyl radicals (●OH) will abstract hydrogen atoms, leading to the formation of C-centered radicals, which undergo various reactions leading to the backbone session of the cellulose. Based on the structures of the radiolytically produced free radicals in presence and absence of water, covalent grafting of vinyl monomers on the cellulose backbone is inconceivable.
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Affiliation(s)
- Richard List
- Department of Chemical Engineering, State University of New York College of Environmental Science and Forestry, Syracuse, NY 13210, USA
- UV/EB Technology Center, State University of New York College of Environmental Science and Forestry, Syracuse, NY 13210, USA
| | - Lorelis Gonzalez-Lopez
- Department of Materials Science and Engineering, University of Maryland, College Park, MD 20742, USA
| | - Aiysha Ashfaq
- Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742, USA
| | - Amira Zaouak
- Research Laboratory on Energy and Matter for Nuclear Science Development, National Center for Nuclear Science and Technology, Sidi-Thabet 2020, Tunisia;
| | - Mark Driscoll
- UV/EB Technology Center, State University of New York College of Environmental Science and Forestry, Syracuse, NY 13210, USA
- Department of Chemistry, State University of New York College of Environmental Science and Forestry, Syracuse, NY 13210, USA
| | - Mohamad Al-Sheikhly
- Department of Materials Science and Engineering, University of Maryland, College Park, MD 20742, USA
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