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For: Huang J, Hu G, Orkoulas G, Christofides PD. Dependence of film surface roughness and slope on surface migration and lattice size in thin film deposition processes. Chem Eng Sci 2010. [DOI: 10.1016/j.ces.2010.08.035] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/19/2022]
Number Cited by Other Article(s)
1
Yun S, Ding Y, Zhang Y, Christofides PD. Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films. Comput Chem Eng 2021. [DOI: 10.1016/j.compchemeng.2021.107267] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/22/2022]
2
Machine learning-based modeling and operation of plasma-enhanced atomic layer deposition of hafnium oxide thin films. Comput Chem Eng 2021. [DOI: 10.1016/j.compchemeng.2020.107148] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
3
Zhang Y, Ding Y, Christofides PD. Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition. Comput Chem Eng 2020. [DOI: 10.1016/j.compchemeng.2020.107066] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/04/2023]
4
Ding Y, Zhang Y, Orkoulas G, Christofides PD. Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition. Chem Eng Res Des 2020. [DOI: 10.1016/j.cherd.2020.05.014] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/31/2022]
5
Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation. Chem Eng Res Des 2019. [DOI: 10.1016/j.cherd.2019.09.005] [Citation(s) in RCA: 24] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
6
Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design. Chem Eng Res Des 2019. [DOI: 10.1016/j.cherd.2019.05.049] [Citation(s) in RCA: 24] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/04/2023]
7
Ding Y, Zhang Y, Kim K, Tran A, Wu Z, Christofides PD. Microscopic modeling and optimal operation of thermal atomic layer deposition. Chem Eng Res Des 2019. [DOI: 10.1016/j.cherd.2019.03.004] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]
8
Forgerini FL, Marchiori R. A brief review of mathematical models of thin film growth and surfaces. A possible route to avoid defects in stents. BIOMATTER 2014;4:e28871. [PMID: 25482417 PMCID: PMC4122570 DOI: 10.4161/biom.28871] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
9
Huang J, Orkoulas G, Christofides PD. Surface morphology control of Transparent Conducting Oxide layers for improved light trapping using wafer grating and feedback control. Chem Eng Sci 2012. [DOI: 10.1016/j.ces.2012.07.011] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/28/2022]
10
Huang J, Orkoulas G, Christofides PD. Modeling and control of Transparent Conducting Oxide layer surface morphology for improved light trapping. Chem Eng Sci 2012. [DOI: 10.1016/j.ces.2012.02.030] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/28/2022]
11
Zhang X, Huang J, Hu G, Orkoulas G, Christofides PD. Controlling aggregate thin film surface morphology for improved light trapping using a patterned deposition rate profile. Chem Eng Sci 2012. [DOI: 10.1016/j.ces.2011.03.047] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
12
Huang J, Zhang X, Orkoulas G, Christofides PD. Dynamics and control of aggregate thin film surface morphology for improved light trapping: Implementation on a large-lattice kinetic Monte Carlo model. Chem Eng Sci 2011. [DOI: 10.1016/j.ces.2011.08.020] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
13
Wang B, Weldon AL, Kumnorkaew P, Xu B, Gilchrist JF, Cheng X. Effect of surface nanotopography on immunoaffinity cell capture in microfluidic devices. LANGMUIR : THE ACS JOURNAL OF SURFACES AND COLLOIDS 2011;27:11229-37. [PMID: 21800852 DOI: 10.1021/la2015868] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/04/2023]
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