Pan TM, Chen CY, Wu TY, Pang ST. Impact of postdeposition annealing on the sensing and impedance characteristics of TbY
xO
y electrolyte–insulator–semiconductor pH sensors.
RSC Adv 2016. [DOI:
10.1039/c6ra11377j]
[Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
In this investigation, we explored the impact of postdeposition annealing (PDA) on the sensing and impedance characteristics of TbYxOy sensing films deposited on Si(100) substrates through reactive cosputtering for electrolyte–insulator–semiconductor (EIS) pH sensors.
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