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Parkhomenko I, Vlasukova L, Komarov F, Kovalchuk N, Demidovich S, Zhussupbekova A, Zhussupbekov K, Shvets IV, Milchanin O, Zhigulin D, Romanov I. Effect of Rapid Thermal Annealing on Si-Based Dielectric Films Grown by ICP-CVD. ACS OMEGA 2023; 8:30768-30775. [PMID: 37636914 PMCID: PMC10448691 DOI: 10.1021/acsomega.3c04997] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/12/2023] [Accepted: 07/28/2023] [Indexed: 08/29/2023]
Abstract
Silicon nitride, silicon oxide, and silicon oxynitride thin films were deposited on the Si substrate by inductively coupled plasma chemical vapor deposition and annealed at 1100 °C for 3 min in an Ar environment. Silicon nitride and silicon oxide films deposited at ratios of the reactant flow rates of SiH4/N2 = 1.875 and SiH4/N2O = 3, respectively, were Si-rich, while Si excess for the oxynitride film (SiH4/N2/N2O = 3:2:2) was not found. Annealing resulted in a thickness decrease and structural transformation for SiOx and SiNx films. Nanocrystalline phases of Si as well as α- and β-Si3N4 were found in the annealed silicon nitride film. Compared to oxide and nitride films, the oxynitride film is the least susceptible to change during annealing. The relationship between the structure, composition, and optical properties of the Si-based films has been revealed. It has been shown that the calculated optical parameters (refractive index, extinction coefficient) reflect structural peculiarities of the as-deposited and annealed films.
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Affiliation(s)
- Irina Parkhomenko
- Belarusian
State University, Kurchatov Str. 5, 220045 Minsk, Belarus
| | | | - Fadei Komarov
- A.N.
Sevchenko Institute of Applied Physical Problems of Belarusian State
University, Kurchatov
Str. 7, 220045 Minsk, Belarus
| | - Nataliya Kovalchuk
- Joint
Stock Company “Integral”, Kazintsa Str. 121 A, 220108 Minsk, Belarus
| | - Sergey Demidovich
- Joint
Stock Company “Integral”, Kazintsa Str. 121 A, 220108 Minsk, Belarus
| | - Ainur Zhussupbekova
- School
of Physics and Centre for Research on Adaptive Nanostructures and
Nanodevices (CRANN), Trinity College Dublin, Dublin D02 PN40, Ireland
- L.N.
Gumilyov Eurasian National University, 2 Satpayev Street, Astana 010000, Kazakhstan
| | - Kuanysh Zhussupbekov
- School
of Physics and Centre for Research on Adaptive Nanostructures and
Nanodevices (CRANN), Trinity College Dublin, Dublin D02 PN40, Ireland
| | - Igor V. Shvets
- School
of Physics and Centre for Research on Adaptive Nanostructures and
Nanodevices (CRANN), Trinity College Dublin, Dublin D02 PN40, Ireland
| | - Oleg Milchanin
- A.N.
Sevchenko Institute of Applied Physical Problems of Belarusian State
University, Kurchatov
Str. 7, 220045 Minsk, Belarus
| | - Dmitry Zhigulin
- Joint
Stock Company “Integral”, Kazintsa Str. 121 A, 220108 Minsk, Belarus
| | - Ivan Romanov
- Belarusian
State University, Kurchatov Str. 5, 220045 Minsk, Belarus
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2
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Yang Z, Jiang M, Wang X, Wang Y, Cao M. Constructing a Stable Si-N-Enriched Interface Boosts Lithium Storage Kinetics in a Silicon-Based Anode. ACS APPLIED MATERIALS & INTERFACES 2021; 13:52636-52646. [PMID: 34704737 DOI: 10.1021/acsami.1c15483] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
The stable operation of a SiOx anode largely depends on the intrinsic chemistry of the electrode/electrolyte interface; however, an unstable interface structure and undesirable parasitic reactions with the electrolyte of the SiOx anode often result in the formation of a fragile solid-electrolyte interphase (SEI) and serious capacity decay during the lithiation/delithiation process. Herein, a Si-N-enriched N-doped carbon coating is constructed on the surface of SiOx yolk-shell nanospheres (abbreviated as SiOx@NC) to optimize the SEI film. The two-dimensional covalently bound Si-N interface, on one hand, can suppress the interfacial reactivity of the SiOx anode to enable the formation of a thin SEI film with accelerated diffusion kinetics of ions and, on the other hand, acts as a Li+ conductor during the delithiation process, allowing Li+ to diffuse rapidly in the SiOx matrix, thereby improving the long-term cycling stability and rapid charge/discharge capability of the SiOx anode. A series of characterizations show that the interface charge-transfer barrier and the Li+ diffusion energy barrier through the SEI film are the main factors that determine the interfacial electrochemical behavior and lithium storage performance. This work clarifies the relationship between the SEI characteristics and the interfacial transfer dynamics and aims to offer a more basic basis for the screening of other electrode materials.
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Affiliation(s)
- Zhen Yang
- Key Laboratory of Cluster Science, Ministry of Education of China, Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
| | - Minxia Jiang
- Key Laboratory of Cluster Science, Ministry of Education of China, Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
| | - Xin Wang
- Key Laboratory of Cluster Science, Ministry of Education of China, Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
| | - Yingxinjie Wang
- Key Laboratory of Cluster Science, Ministry of Education of China, Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
| | - Minhua Cao
- Key Laboratory of Cluster Science, Ministry of Education of China, Beijing Key Laboratory of Photoelectronic/Electrophotonic Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China
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3
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Ulvestad A, Skare MO, Foss CE, Krogsæter H, Reichstein JF, Preston TJ, Mæhlen JP, Andersen HF, Koposov AY. Stoichiometry-Controlled Reversible Lithiation Capacity in Nanostructured Silicon Nitrides Enabled by in Situ Conversion Reaction. ACS NANO 2021; 15:16777-16787. [PMID: 34570977 PMCID: PMC8552487 DOI: 10.1021/acsnano.1c06927] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/11/2021] [Accepted: 09/23/2021] [Indexed: 06/13/2023]
Abstract
In modern Li-based batteries, alloying anode materials have the potential to drastically improve the volumetric and specific energy storage capacity. For the past decade silicon has been viewed as a "Holy Grail" among these materials; however, severe stability issues limit its potential. Herein, we present amorphous substoichiometric silicon nitride (SiNx) as a convertible anode material, which allows overcoming the stability challenges associated with common alloying materials. Such material can be synthesized in a form of nanoparticles with seamlessly tunable chemical composition and particle size and, therefore, be used for the preparation of anodes for Li-based batteries directly through conventional slurry processing. Such SiNx materials were found to be capable of delivering high capacity that is controlled by the initial chemical composition of the nanoparticles. They exhibit an exceptional cycling stability, largely maintaining structural integrity of the nanoparticles and the complete electrodes, thus delivering stable electrochemical performance over the course of 1000 charge/discharge cycles. Such stability is achieved through the in situ conversion reaction, which was herein unambiguously confirmed by pair distribution function analysis of cycled SiNx nanoparticles revealing that active silicon domains and a stabilizing Li2SiN2 phase are formed in situ during the initial lithiation.
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Affiliation(s)
- Asbjørn Ulvestad
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Marte O. Skare
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Carl Erik Foss
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Henrik Krogsæter
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
- Department
of Materials Science and Engineering, Norwegian
University of Science and Technology, Alfred Getz vei 2, NO-7491 Trondheim, Norway
| | - Jakob F. Reichstein
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Thomas J. Preston
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Jan Petter Mæhlen
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Hanne F. Andersen
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
| | - Alexey Y. Koposov
- Department
of Battery Technology, Institute for Energy
Technology, Instituttveien 18, NO-2027 Kjeller, Norway
- Center
for Materials Science and Nanotechnology, Department of Chemistry, University of Oslo, P.O. Box 1033, Blindern, 0371 Oslo, Norway
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Yola ML, Atar N, Özcan N. A novel electrochemical lung cancer biomarker cytokeratin 19 fragment antigen 21-1 immunosensor based on Si 3N 4/MoS 2 incorporated MWCNTs and core-shell type magnetic nanoparticles. NANOSCALE 2021; 13:4660-4669. [PMID: 33620353 DOI: 10.1039/d1nr00244a] [Citation(s) in RCA: 34] [Impact Index Per Article: 11.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/07/2023]
Abstract
Lung cancer is one of deadliest and most life threatening cancer types. Cytokeratin 19 fragment antigen 21-1 (CYFRA 21-1) is a significant biomarker for the diagnosis of non-small cell lung cancer (NSCLC). Due to these reasons, a novel electrochemical immunosensor based on a silicon nitride (Si3N4)-molybdenum disulfide (MoS2) composite on multi-walled carbon nanotubes (Si3N4/MoS2-MWCNTs) as an electrochemical sensor platform and core-shell type magnetic mesoporous silica nanoparticles@gold nanoparticles (MMSNs@AuNPs) as a signal amplifier was presented for CYFRA21-1 detection in this study. Capture antibody (Ab1) immobilization on a Si3N4/MoS2-MWCNT modified glassy carbon electrode (Si3N4/MoS2-MWCNTs/GCE) was firstly successfully performed by stable electrostatic/ionic interactions between the -NH2 groups of the capture antibody and the polar groups of Si3N4/MoS2. Then, specific antibody-antigen interactions between the electrochemical sensor platform and the signal amplifier formed a novel voltammetric CYFRA21-1 immunosensor. The prepared composite materials and electrochemical sensor surfaces were characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR), cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). A linearity range of 0.01-1.0 pg mL-1 and a low detection limit (LOD) of 2.00 fg mL-1 were also obtained for analytical applications. Thus, the proposed immunosensor based on Si3N4/MoS2-MWCNTs and MMSNs@AuNPs has great potential for medical diagnosis of lung cancer.
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Affiliation(s)
- Mehmet Lütfi Yola
- Hasan Kalyoncu University, Faculty of Health Sciences, Department of Nutrition and Dietetics, Gaziantep, Turkey.
| | - Necip Atar
- Pamukkale University, Faculty of Engineering, Department of Chemical Engineering, Denizli, Turkey
| | - Nermin Özcan
- Iskenderun Technical University, Faculty of Engineering and Natural Sciences, Department of Biomedical Engineering, Hatay, Turkey
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He X, Yue F, Shang Z, Wang J, Gu W, Huang X. Freestanding symmetrical SiN/Si/SiN composite coated on carbon nanotube paper for a high-performance lithium-ion battery anode based on synergistic effects. RSC Adv 2021; 11:28107-28115. [PMID: 35480735 PMCID: PMC9038024 DOI: 10.1039/d1ra04630f] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/15/2021] [Accepted: 08/06/2021] [Indexed: 11/21/2022] Open
Abstract
Direct coating of Si on an elastic carbon nanotube (CNT) network effectively addresses the rapid capacity fading of the Si anode. However, this strategy is hindered by the low Si tap density (Si < 50 nm) since sufficient void space has to be left for accommodating the Si volume change. Also, the mechanical properties of the CNT network as the elastic buffer matrix degrade significantly caused by side reactions of CNT with electrolyte. This work presents a freestanding paper-like anode consisting of a symmetrical sandwich-structured SiN/Si/SiN composite grown on CNT paper. This anode works well (∼259 μA h cm−2 under the current rate of 0.6C after 350 cycles, with a capacity retention of 73.8%) even when the CNT is filled by the composite without void space left for accommodating volume expansion. This is mainly due to the following synergistic effects: on one hand, the stress-compensation phenomenon in the symmetrical sandwich-structured composite balances the volume change-induced stress and thus the composite has a robust mechanical stability with an intact morphology during cycling. On the other hand, the intact composite avoids reaction of CNT with the electrolyte and thus the CNT retains excellent mechanical properties and serves well as the elastic buffer matrix. These two sides interact with each other, enabling the high anode performance. This SiN/Si/SiN@CNT anode shows high reversible specific capacity without sacrificing cycling stability due to the synergistic effects.![]()
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Affiliation(s)
- Xinyi He
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Fan Yue
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Zhenzhen Shang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Jian Wang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Wenhua Gu
- School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
| | - Xiaodong Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
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Carbon-coated bismuth nanospheres derived from Bi-BTC as a promising anode material for lithium storage. Electrochim Acta 2019. [DOI: 10.1016/j.electacta.2019.134927] [Citation(s) in RCA: 21] [Impact Index Per Article: 4.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/01/2023]
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7
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Zhang F, Cao Y, Huang QA, Huang X. Effects of thermal annealing on performance of silicon nitride anode for lithium-ion battery applications. J Electroanal Chem (Lausanne) 2019. [DOI: 10.1016/j.jelechem.2019.05.056] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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Hu L, Zheng S, Chen Z, Huang B, Yang J, Chen Q. 3D graphene modified sphere-like VPO4/C as a high-performance anode material for lithium-ion batteries. Electrochim Acta 2018. [DOI: 10.1016/j.electacta.2018.07.205] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/01/2022]
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