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Wojcieszak D, Domaradzki J, Pokora P, Sikora M, Mazur M, Chodasewicz P, Morgiel J, Gibson D. Optical and structural properties of gradient (Ti,Co)Ox thin-film coatings with a resistive switching effect. APPLIED OPTICS 2022; 61:10283-10289. [PMID: 36606794 DOI: 10.1364/ao.476918] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/29/2022] [Accepted: 11/07/2022] [Indexed: 06/17/2023]
Abstract
In this work, the optical and structural properties of gradient (Ti,Co)Ox coatings with a resistive switching effect have been outlined. They were prepared using multi-magnetron sputtering and, despite the high cobalt content, they were transparent and had a high refractive index. The gradient Co-addition resulted in the receiving of fine crystalline T i O 2-anatase and C o 3 O 4 forms in the amorphous surrounding. Observed resistance switching was a fully repeatable effect, and its occurrence in gradient (Ti,Co)Ox coatings has not reported earlier. The prepared gradient coatings exhibit great potential as transparent electronic devices with the resistance switching effect. Such memory effects in transparent thin-film coatings open new possibilities for the manufacturing of innovative memory elements in the future.
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Wojcieszak D, Mazur M, Pokora P, Wrona A, Bilewska K, Kijaszek W, Kotwica T, Posadowski W, Domaradzki J. Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content. MATERIALS 2021; 14:ma14143797. [PMID: 34300716 PMCID: PMC8304873 DOI: 10.3390/ma14143797] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/01/2021] [Revised: 06/14/2021] [Accepted: 07/05/2021] [Indexed: 11/19/2022]
Abstract
In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The relation between the Ti–Co target composition and the Co-content in the metallic and oxide films was examined. There was 15–20% more cobalt in the films than in the target. Moreover, the deposition rate under neutral conditions (in Ar plasma) was even 10-times higher compared to oxidizing Ar:O2 (70:30) plasma. A comprehensive analysis of the structural properties (performed with GIXRD and SEM) revealed the amorphous nature of (Ti,Co)Ox coatings, regardless of the cobalt content in the coating. The fine-grained, homogenous microstructure was observed, where cracks and voids were identified only for films with high Co-content. Optical studies have shown that these films were well transparent (60% ÷ 80%), and the amount of cobalt in the target from which they were sputtered had a significant impact on the decrease in the transparency level, the slight shift of the absorption edge position (from 279 nm to 289 nm) as well as the decrease in their optical band gap energy (from 3.13 eV to 1.71 eV). Electrical studies have shown that in (Ti,Co)Ox thin films, a unipolar memristive-like effect can be observed. The occurrence of such effects has not been reported so far in the case of TiO2 coatings with the addition of Co.
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Affiliation(s)
- Damian Wojcieszak
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
| | - Michał Mazur
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
| | - Patrycja Pokora
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
- Correspondence:
| | - Adriana Wrona
- Lukasiewicz Research Network—Institute of Non-Ferrous Metals, Gliwice Division, Sowinskiego 5, 44-100 Gliwice, Poland; (A.W.); (K.B.)
| | - Katarzyna Bilewska
- Lukasiewicz Research Network—Institute of Non-Ferrous Metals, Gliwice Division, Sowinskiego 5, 44-100 Gliwice, Poland; (A.W.); (K.B.)
| | - Wojciech Kijaszek
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
| | - Tomasz Kotwica
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
| | - Witold Posadowski
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
| | - Jarosław Domaradzki
- Faculty of Microsystem Electronics and Photonics, Wroclaw University of Science and Technology, Janiszewskiego 11/17, 50-372 Wroclaw, Poland; (D.W.); (M.M.); (W.K.); (T.K.); (W.P.); (J.D.)
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Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO 2 Nanostructures on Single Crystal Substrates. NANOMATERIALS 2020; 10:nano10071335. [PMID: 32650613 PMCID: PMC7407531 DOI: 10.3390/nano10071335] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/03/2020] [Revised: 07/02/2020] [Accepted: 07/04/2020] [Indexed: 11/29/2022]
Abstract
MnO2 nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O2 plasmas on MgAl2O4(100), YAlO3(010), and Y3Al5O12(100) single crystals at a growth temperature of 300 °C, in order to investigate the substrate influence on material chemico-physical properties. A detailed characterization through complementary analytical techniques highlighted the formation of highly pure and oriented F-doped systems, comprising the sole β-MnO2 polymorph and exhibiting an inherent oxygen deficiency. Optical absorption spectroscopy revealed the presence of an appreciable Vis-light harvesting, of interest in view of possible photocatalytic applications in pollutant degradation and hydrogen production. The used substrates directly affected the system structural features, as well as the resulting magnetic characteristics. In particular, magnetic force microscopy (MFM) measurements, sensitive to the out-of-plane magnetization component, highlighted the formation of spin domains and long-range magnetic ordering in the developed materials, with features dependent on the system morphology. These results open the door to future engineering of the present nanostructures as possible magnetic media for integration in data storage devices.
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