Zonotopic set-membership state estimation for multirate systems with dynamic event-triggered mechanisms

Enhancing projection based iterative learning control: A set-membership approach

Lithographic machine tools require both high motion accuracy and high motion flexibility. Projection based iterative learning control (P-ILC) is appealing for wafer stages to achieve two goals, simultaneously. P-ILC contains a nonparametric feedforward controller based on ILC, and a parametric feedforward controller with a projection step for feedforward tuning. In this paper, a set-membership based frequency-domain ILC algorithm (SM-F-ILC) is employed in the enhancing P-ILC scheme to improve the performance in the nonparametric feedforward control mode. SM-F-ILC can effectively compensate for repetitive errors, attenuate the nonrepetitive error accumulation and achieve fast convergence speed with model uncertainties. These superiorities also facilitate to improve the performance of P-ILC in the parametric feedforward control mode. The validity of the enhancing P-ILC scheme is demonstrated by experimental results.