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Cheng K, Wang J, Wang G, Yang K, Zhang W. Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching. MATERIALS (BASEL, SWITZERLAND) 2024; 17:4231. [PMID: 39274620 PMCID: PMC11396448 DOI: 10.3390/ma17174231] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/31/2024] [Revised: 08/21/2024] [Accepted: 08/24/2024] [Indexed: 09/16/2024]
Abstract
As an integrable micro-optical device, micro lens arrays (MLAs) have significant applications in modern optical imaging, new energy technology, and advanced displays. In order to reduce the impact of laser modification on wet etching, we propose a technique of femtosecond laser penetration-induced modification-assisted wet etching (FLIPM-WE), which avoids the influence of previous modification layers on subsequent laser pulses and effectively improves the controllability of lens array preparation. We conducted a detailed study on the effects of the laser single pulse energy, pulse number, and hydrofluoric acid etching duration on the morphology of micro lenses and obtained the optimal process parameters. Ultimately, two types of fused silica micro lens arrays with different focal lengths but the same numerical aperture (NA = 0.458) were fabricated using the FLPIM-WE technology. Both arrays exhibited excellent geometric consistency and surface quality (Ra~30 nm). Moreover, they achieved clear imaging at various magnifications with an adjustment range of 1.3×~3.0×. This provides potential technical support for special micro-optical systems.
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Affiliation(s)
- Kaijie Cheng
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Research Center for Laser Extreme Manufacturing, Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China
| | - Ji Wang
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Research Center for Laser Extreme Manufacturing, Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China
| | - Guolong Wang
- Research Center for Laser Extreme Manufacturing, Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China
- College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China
| | - Kun Yang
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- Research Center for Laser Extreme Manufacturing, Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China
| | - Wenwu Zhang
- Research Center for Laser Extreme Manufacturing, Ningbo Institute of Materials Technology & Engineering, Chinese Academy of Sciences, Ningbo 315201, China
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Xu M, Bian Z, Chen Q, Wang H, Chen C, Lu H. Polymeric microlens array formed on a discontinuous wetting surface using a self-assembly technique. APPLIED OPTICS 2024; 63:4380-4385. [PMID: 38856617 DOI: 10.1364/ao.518091] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/11/2024] [Accepted: 05/08/2024] [Indexed: 06/11/2024]
Abstract
In this paper, we demonstrate a facile way to prepare polymeric microlens arrays (MLAs) based on a discontinuous wetting surface using a self-assembly technique. A patterned hydrophobic-octadecyltrichlorosilane (OTS) surface was prepared by U V/O 3 irradiation through a shadow mask. The area exposed to U V/O 3 irradiation turned highly hydrophilic, whereas the area protected by the mask remained highly hydrophobic, generating the patterned OTS surface. The surface energy of the OTS/glass surface changed from 23 to 72.8 mN/m after 17 min of U V/O 3 treatment. The scribing of the optical glue-NOA 81 onto the microhole array enabled one to obtain the MLAs due to the generation of the NOA 81 droplet array via the surface tension. After UV light curing, the cured NOA 81 droplet array with uniform dimensions within a large area exhibited excellent MLA characteristics. Moreover, the method developed in this study is simple in operation, low-cost, and requires neither a clean room nor expensive equipment.
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Xu M, Xue Y, Li J, Zhang L, Lu H, Wang Z. Large-Area and Rapid Fabrication of a Microlens Array on a Flexible Substrate for an Integral Imaging 3D Display. ACS APPLIED MATERIALS & INTERFACES 2023; 15:10219-10227. [PMID: 36753424 DOI: 10.1021/acsami.2c20519] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
A curved integral imaging three-dimensional (3D) display attracts a lot of interest due to its enhanced 3D sense of immersion and wider viewing angle. In this paper, a microlens array (MLA) based on a flexible poly(ethylene terephthalate) (PET) substrate was achieved by a straightforward, rapid, and low-cost technique. The reactive ion etching (RIE) process treated PET/CYTOP covered with a flexible mask to generate a hydrophilic-hydrophobic patterned surface. The well-designed arrays of confined adhesive droplets with a controlled geometry on a hydrophilic-hydrophobic patterned surface were formed using the blade-coating method. A flexible MLA with a diameter of 820 μm, a size of 5.3 cm × 5.1 cm, and a radius of curvature of 25 cm was fabricated and combined with a curved two-dimensional (2D) monitor to realize a lateral viewing range of 6.4 cm at a viewing distance of 25 cm, which is 4 times larger than with flat integral imaging 3D display system. The flexible MLA has the advantages of a controllable lens profile and large pitch, and it can be manufactured on a large scale. In addition, it provides a large viewing angle for the reconstructed 3D image.
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Affiliation(s)
- Miao Xu
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
| | - Yingying Xue
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
| | - Jing Li
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
| | - Lyudi Zhang
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
| | - Hongbo Lu
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
| | - Zi Wang
- Academy of Opto-Electric Technology, Special Display and Imaging Technology, Innovation Center of Anhui Province, National Engineering Laboratory of Special Display Technology, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, China
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Han S, Sung J, Ko B, Kwon M, Kim S, So H. A biomimetic compound eye lens for photocurrent enhancement at low temperatures. BIOINSPIRATION & BIOMIMETICS 2022; 17:046008. [PMID: 35504271 DOI: 10.1088/1748-3190/ac6c65] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/17/2021] [Accepted: 05/03/2022] [Indexed: 06/14/2023]
Abstract
In this study, an artificial compound eye lens (ACEL) was fabricated using a laser cutting machine and polyvinyl alcohol (PVA) solution. A laser cutter was used to punch micro-sized holes (500 μm diameter-the smallest possible diameter) into an acrylic plate; this punched plate was then placed on the aqueous PVA solution, and the water was evaporated. The plate was used as the mold to obtain a polydimethylsiloxane (PDMS) micro lens array film, which was fixed to a dome-shaped three-dimensional-printed mold for further PDMS curing, and a hemispherical compound eye lens was obtained. Using a gallium nitride (GaN) photodetector, a light detection experiment was performed with the ACEL, bare lens, and no lens by irradiating light at various angles under low temperatures. The photodetector with the ACEL generated a high photocurrent under several conditions. In particular, when the light was irradiated at 0° and below -20 °C, the photocurrent of the GaN sensor with the ACEL increased by 61% and 81% compared with the photocurrent of the GaN sensor with the bare lens and without a lens, respectively. In this study, a sensor for detecting light with ACEL was demonstrated in low-temperature environments, such as indoor refrigerated storages and external conditions in Antarctica and Arctic.
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Affiliation(s)
- Sanghu Han
- Department of Mechanical Engineering, Hanyang University, Seoul 04763, Republic of Korea
| | - Jaebum Sung
- Department of Mechanical Engineering, Hanyang University, Seoul 04763, Republic of Korea
| | - Byeongjo Ko
- Department of Mechanical Engineering, Hanyang University, Seoul 04763, Republic of Korea
| | - Minjun Kwon
- Korea Institute of Industrial Technology, Cheonan 31056, Republic of Korea
| | - Sewon Kim
- Korea Institute of Industrial Technology, Cheonan 31056, Republic of Korea
| | - Hongyun So
- Department of Mechanical Engineering, Hanyang University, Seoul 04763, Republic of Korea
- Institute of Nano Science and Technology, Hanyang University, Seoul 04763, Republic of Korea
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Yuan Y, Xu M, Wang X, Lu H, Qiu L. Polyvinyl alcohol microlens array obtained by solvent evaporation from a confined droplet array. APPLIED OPTICS 2021; 60:10914-10919. [PMID: 35200853 DOI: 10.1364/ao.442508] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/03/2021] [Accepted: 11/02/2021] [Indexed: 06/14/2023]
Abstract
In this study, polyvinyl alcohol (PVA) microlens arrays (MLAs) were prepared, and the dynamics of contact lines and contact angles during confined PVA solution droplet evaporation were investigated by in situ optical microscopy. First, hydrophobic layers patterned with hydrophilic microholes array modified substrates were prepared by photolithography and coating methods. The flowing of PVA solution on the substrates formed droplets in each microhole self-assembly. The substrate was then heated to allow evaporation of the solvent. The results showed the contact line of confined droplets pinned at the junction between the hydrophilic and hydrophobic areas during the whole evaporation process. The apparent contact angle decreased nonlinearly during evaporation. The evaporation of PVA solution droplet in each microhole followed a constant contact radius mode, meaning constant contact area and declined contact angle during evaporation. After complete solvent evaporation, PVA formed a convex shape with convergent lens character in each microhole. In sum, the obtained PVA convex arrays with uniform sizes and good focusing properties would have potential applications in wavefront sensing, infrared focal plane detection or CCD array light accumulation, laser array scanning, laser display, optical fiber coupling, and many other optical systems.
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Cai S, Sun Y, Chu H, Yang W, Yu H, Liu L. Microlenses arrays: Fabrication, materials, and applications. Microsc Res Tech 2021; 84:2784-2806. [PMID: 33988282 DOI: 10.1002/jemt.23818] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/27/2021] [Revised: 04/21/2021] [Accepted: 05/02/2021] [Indexed: 11/07/2022]
Abstract
Microlenses have become an indispensable optical element in many optical systems. The advancement of technology has led to a wider variety of microlenses fabrication methods, but these methods suffer from, more or less, some limitations. In this article, we review the manufacturing technology of microlenses from the direct and indirect perspectives. First, we present several fabrication methods and their advantages and disadvantages are discussed. Then, we discuss the commonly used materials for fabricating microlenses and the applications of microlenses in various fields. Finally, we point out the prospects for the future development of microlenses and their fabrication methods.
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Affiliation(s)
- Shuxiang Cai
- School of Electromechanical and Automotive Engineering, Yantai University, Yantai, China
| | - Yalin Sun
- School of Electromechanical and Automotive Engineering, Yantai University, Yantai, China
| | - Honghui Chu
- School of Electromechanical and Automotive Engineering, Yantai University, Yantai, China
| | - Wenguang Yang
- School of Electromechanical and Automotive Engineering, Yantai University, Yantai, China
| | - Haibo Yu
- State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
| | - Lianqing Liu
- State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
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