Deuterium concentration depth profiling in sputter-deposited tungsten coated F82H using secondary ion mass spectrometry

Analysis of Hydrogen in Inorganic Materials and Coatings: A Critical Review

The currently used bulk analysis and depth profiling methods for hydrogen in inorganic materials and inorganic coatings are reviewed. Bulk analysis of hydrogen is based on fusion of macroscopic samples in an inert gas and the detection of the thereby released gaseous H2 using inert gas fusion (IGF) and thermal desorption spectroscopy (TDS). They offer excellent accuracy and sensitivity. Depth profiling methods involve glow discharge optical emission spectroscopy and mass spectrometry (GDOES and GDMS), laser-induced breakdown spectroscopy (LIBS), secondary ion mass spectrometry (SIMS), nuclear reaction analysis (NRA), and elastic recoil detection analysis (ERDA). The principles of all these methods are explained in terms of the methodology, calibration procedures, analytical performance, and major application areas. The synergies and the complementarity of various methods of hydrogen analysis are described. The existing literature about these methods is critically evaluated, and major papers concerning each method are listed.