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Liu M, Zhu Y, Zhao J, Wang L, Yang J, Yang F. Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip. MICROMACHINES 2021; 12:mi12111326. [PMID: 34832738 PMCID: PMC8619106 DOI: 10.3390/mi12111326] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/28/2021] [Revised: 10/26/2021] [Accepted: 10/26/2021] [Indexed: 11/16/2022]
Abstract
This paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced with good wafer-level uniformity using isotropic etching and thermal oxygen sharpening. The surface roughness of the etched tip post was reduced by optimized isotropic etching. The dependence of the platinum silicide morphology on annealing conditions were also systematically investigated, and conductive and wear-resistant probes with PtSi tips of curvature radii less than 30 nm were batch fabricated and applied for scanning piezoelectric samples.
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Affiliation(s)
- Meijie Liu
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- State Key Laboratory of Transducer Technology, Shanghai 200050, China
| | - Yinfang Zhu
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- State Key Laboratory of Transducer Technology, Shanghai 200050, China
- Correspondence: (Y.Z.); (J.Y.)
| | - Junyuan Zhao
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- State Key Laboratory of Transducer Technology, Shanghai 200050, China
| | - Lihao Wang
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- State Key Laboratory of Transducer Technology, Shanghai 200050, China
| | - Jinling Yang
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
- State Key Laboratory of Transducer Technology, Shanghai 200050, China
- Correspondence: (Y.Z.); (J.Y.)
| | - Fuhua Yang
- Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (M.L.); (J.Z.); (L.W.); (F.Y.)
- College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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Wang W, Han F, Chen Z, Wang R, Wang C, Lu K, Wang J, Ju B. Modeling and Compensation for Asymmetrical and Dynamic Hysteresis of Piezoelectric Actuators Using a Dynamic Delay Prandtl-Ishlinskii Model. MICROMACHINES 2021; 12:92. [PMID: 33467202 PMCID: PMC7830347 DOI: 10.3390/mi12010092] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/29/2020] [Revised: 01/14/2021] [Accepted: 01/15/2021] [Indexed: 11/16/2022]
Abstract
Piezoelectric actuators are widely used in micro- and nano-manufacturing and precision machining due to their superior performance. However, there are complex hysteresis nonlinear phenomena in piezoelectric actuators. In particular, the inherent hysteresis can be affected by the input frequency, and it sometimes exhibits asymmetrical characteristic. The existing dynamic hysteresis model is inaccurate in describing hysteresis of piezoelectric actuators at high frequency. In this paper, a Dynamic Delay Prandtl-Ishlinskii (DDPI) model is proposed to describe the asymmetrical and dynamic characteristics of piezoelectric actuators. First, the shape of the Delay Play operator is discussed under two delay coefficients. Then, the accuracy of the DDPI model is verified by experiments. Next, to compensate the asymmetrical and dynamic hysteresis, the compensator is designed based on the Inverse Dynamic Delay Prandtl-Ishlinskii (IDDPI) model. The effectiveness of the inverse compensator was verified by experiments. The results show that the DDPI model can accurately describe the asymmetrical and dynamic hysteresis, and the compensator can effectively suppress the hysteresis of the piezoelectric actuator. This research will be beneficial to extend the application of piezoelectric actuators.
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Affiliation(s)
- Wen Wang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Fuming Han
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Zhanfeng Chen
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Ruijin Wang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Chuanyong Wang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Keqing Lu
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Jiahui Wang
- School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China; (W.W.); (F.H.); (R.W.); (C.W.); (K.L.); (J.W.)
| | - Bingfeng Ju
- State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China;
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Sebastian A, Shamsudhin N, Rothuizen H, Drechsler U, Koelmans WW, Bhaskaran H, Quenzer HJ, Wagner B, Despont M. Note: micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2012; 83:096107. [PMID: 23020434 DOI: 10.1063/1.4755749] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers.
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Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration. ACTA ACUST UNITED AC 2011. [DOI: 10.1016/j.proeng.2011.12.331] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
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