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For: Brusa R, Macchi C, Mariazzi S, Karwasz G, Scarel G, Fanciulli M. Innovative dielectrics for semiconductor technology. Radiat Phys Chem Oxf Engl 1993 2007;76:189-94. [DOI: 10.1016/j.radphyschem.2006.03.033] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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