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Ilgaz F, Spetzler E, Wiegand P, Faupel F, Rieger R, McCord J, Spetzler B. Miniaturized double-wing ∆E-effect magnetic field sensors. Sci Rep 2024; 14:11075. [PMID: 38744882 PMCID: PMC11094197 DOI: 10.1038/s41598-024-59015-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/30/2024] [Accepted: 04/05/2024] [Indexed: 05/16/2024] Open
Abstract
Magnetoelastic micro-electromechanical systems (MEMS) are integral elements of sensors, actuators, and other devices utilizing magnetostriction for their functionality. Their sensitivity typically scales with the saturation magnetostriction and inversely with magnetic anisotropy. However, large saturation magnetostriction and small magnetic anisotropy make the magnetoelastic layer highly susceptible to minuscule anisotropic stress. It is inevitably introduced during the release of the mechanical structure during fabrication and severely impairs the device's reproducibility, performance, and yield. To avoid the transfer of residual stress to the magnetic layer, we use a shadow mask deposition technology. It is combined with a free-free magnetoelectric microresonator design to minimize the influence of magnetic inhomogeneity on device performance. Magnetoelectric resonators are experimentally and theoretically analyzed regarding local stress anisotropy, magnetic anisotropy, and the ΔE-effect sensitivity in several resonance modes. The results demonstrate an exceptionally small device-to-device variation of the resonance frequency < 0.2% with large sensitivities comparable with macroscopic ΔE-effect magnetic field sensors. This development marks a promising step towards highly reproducible magnetoelastic devices and the feasibility of large-scale, integrated arrays.
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Affiliation(s)
- Fatih Ilgaz
- Chair for Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Elizaveta Spetzler
- Nanoscale Magnetic Materials - Magnetic Domains, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Patrick Wiegand
- Networked Electronic Systems, Department of Electrical and Information Engineering, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Franz Faupel
- Chair for Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Robert Rieger
- Networked Electronic Systems, Department of Electrical and Information Engineering, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Jeffrey McCord
- Nanoscale Magnetic Materials - Magnetic Domains, Department of Materials Science, Faculty of Engineering, Kiel University, 24143, Kiel, Germany
| | - Benjamin Spetzler
- Micro- and Nanoelectronic Systems, Department of Electrical Engineering and Information Technology, Ilmenau University of Technology, 98693, Ilmenau, Germany.
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Spetzler B, Wiegand P, Durdaut P, Höft M, Bahr A, Rieger R, Faupel F. Modeling and Parallel Operation of Exchange-Biased Delta-E Effect Magnetometers for Sensor Arrays. SENSORS (BASEL, SWITZERLAND) 2021; 21:7594. [PMID: 34833678 PMCID: PMC8619412 DOI: 10.3390/s21227594] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/09/2021] [Revised: 11/10/2021] [Accepted: 11/14/2021] [Indexed: 02/02/2023]
Abstract
Recently, Delta-E effect magnetic field sensors based on exchange-biased magnetic multilayers have shown the potential of detecting low-frequency and small-amplitude magnetic fields. Their design is compatible with microelectromechanical system technology, potentially small, and therefore, suitable for arrays with a large number N of sensor elements. In this study, we explore the prospects and limitations for improving the detection limit by averaging the output of N sensor elements operated in parallel with a single oscillator and a single amplifier to avoid additional electronics and keep the setup compact. Measurements are performed on a two-element array of exchange-biased sensor elements to validate a signal and noise model. With the model, we estimate requirements and tolerances for sensor elements using larger N. It is found that the intrinsic noise of the sensor elements can be considered uncorrelated, and the signal amplitude is improved if the resonance frequencies differ by less than approximately half the bandwidth of the resonators. Under these conditions, the averaging results in a maximum improvement in the detection limit by a factor of N. A maximum N≈200 exists, which depends on the read-out electronics and the sensor intrinsic noise. Overall, the results indicate that significant improvement in the limit of detection is possible, and a model is presented for optimizing the design of delta-E effect sensor arrays in the future.
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Affiliation(s)
- Benjamin Spetzler
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Patrick Wiegand
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Phillip Durdaut
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Michael Höft
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Andreas Bahr
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Robert Rieger
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
| | - Franz Faupel
- Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany
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Zhang J, Liu J, Zhang Q, Filippov DA, Li K, Wu J, Tao J, Jiang L, Cao L, Srinivasan G. High-resolution magnetic sensors in ferrite/piezoelectric heterostructure with giant magnetodielectric effect at zero bias field. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2021; 92:045006. [PMID: 34243376 DOI: 10.1063/5.0035059] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2020] [Accepted: 03/23/2021] [Indexed: 06/13/2023]
Abstract
A dielectric AC magnetic sensor in layered ferrites/piezoelectric composites was fabricated and developed, whereby its high magnetodielectric (MDE) effects, the typical magnetic-sensing parameters, were systematically characterized at zero bias. Polycrystalline ferrites were synthesized by the solid-state sintering technique with a composition of Ni0.7Zn0.3Tb0.02Fe1.98O4, and the desired spinel structure and soft magnetic properties were confirmed by x-ray diffraction and VSM, respectively. The field-induced charge order insulating state in piezoelectric ceramics accounts for the suppressed permittivity, which enables the possibility of a highly sensitive magnetic sensor at zero bias field. Experimental results exhibit that a small variation in H as low as 100 mOe can be clearly distinguished with a favorable nonlinearity of 2.24%. Meanwhile, the output stability of the presented sensor under 2h of constant and continuous excitation was tested within a favorable fluctuating tolerance range of 6.14-6.28 nF, and the estimated uncertainty of ∼0.063 038 nF was verified by statistical analysis. The presented ferrite/piezoelectric magnetic sensors exhibiting a high MDE response without the requirement for an external magnetic bias are of importance for use in bio-magnetic field detection due to metrics of miniaturization, high sensitivity, and favorable stabilities.
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Affiliation(s)
- Jitao Zhang
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - Jiahui Liu
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - Qingfang Zhang
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - D A Filippov
- Institute of Electronic and Information Systems, Novgorod State University, Veliky Novgorod 173003, Russia
| | - Kang Li
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - Jie Wu
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - Jiagui Tao
- State Grid of Jiangsu Electric Power Co., Ltd., Nanjing 210024, China
| | - Liying Jiang
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
| | - Lingzhi Cao
- College of Electrical and Information Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China
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