A revised manuscript submitted to sensors and actuators B: Chemical illumination modification from an LED to a laser to improve the spatial resolution of IGZO thin film light-addressable potentiometric sensors in pH detections

Light Addressable Potentiometric Sensors for Biochemical Imaging on Microscale: A Review on Optimization of Imaging Speed and Spatial Resolution

Light addressable potentiometric sensors (LAPS) are a competitive tool for unmarked biochemical imaging, especially imaging on microscale. It is essential to optimize the imaging speed and spatial resolution of LAPS since the imaging targets of LAPS, such as cell, microfluidic channel, etc., require LAPS to image at the micrometer level, and a fast enough imaging speed is a prerequisite for the dynamic process involved in biochemical imaging. In this study, we discuss the improvement of LAPS in terms of imaging speed and spatial resolution. The development of LAPS in imaging speed and spatial resolution is demonstrated by the latest applications of biochemistry monitoring and imaging on the microscale.

Time-Dependent Sensitivity Tunable pH Sensors Based on the Organic-Inorganic Hybrid Electric-Double-Layer Transistor

In this study, we propose tunable pH sensors based on the electric-double-layer transistor (EDLT) with time-dependent sensitivity characteristics. The EDLT is able to modulate the drain current by using the mobile ions inside the electrolytic gate dielectric. This property allows the implementation of a device with sensitivity characteristics that are simply adjusted according to the measurement time. An extended gate-type, ion-sensitive, field-effect transistor consisting of a chitosan/Ta2O5 hybrid dielectric EDLT transducer, and an SnO2 sensing membrane, were fabricated to evaluate the sensing behavior at different buffer pH levels. As a result, we were able to achieve tunable sensitivity by only adjusting the measurement time by using a single EDLT and without additional gate electrodes. In addition, to demonstrate the unique sensing behavior of the time-dependent tunable pH sensors based on organic−inorganic hybrid EDLT, comparative sensors consisting of a normal FET with a SiO2 gate dielectric were prepared. It was found that the proposed pH sensors exhibit repeatable and stable sensing operations with drain current deviations <1%. Therefore, pH sensors using a chitosan electrolytic EDLT are suitable for biosensor platforms, possessing tunable sensitivity and high-reliability characteristics.

Light-Addressable Electrochemical Sensors toward Spatially Resolved Biosensing and Imaging Applications

The light-addressable electrochemical sensor (LAES) is a recently emerged bioanalysis technique combining electrochemistry with the photoelectric effect in a semiconductor. In an LAES, a semiconductor substrate is illuminated locally to generate charge carriers in a well-defined area, thereby confining the electrochemical process to a target site. Benefiting from the unique light addressability, an LAES can not only detect multiple analytes in parallel within a single sensor plate but also act as a bio(chemical) imaging sensor to visualize the two-dimensional distribution of specific analytes. An LAES usually has three working modes: a potentiometric mode using light-addressable potentiometric sensors (LAPS) and an impedance mode using scanning photoinduced impedance microscopy (SPIM), while an amperometric mode refers to light-addressable electrochemistry (LAE) and photoelectrochemical (PEC) sensing. In this review, we describe the detection principles of each mode of LAESs and the concept of light addressability. In addition, we highlight the recent progress and advance of LAESs in spatial resolution, sensor system design, multiplexed detection, and bio(chemical) imaging applications. An outlook on current research challenges and future prospects is also presented.

A dual-functional flexible sensor based on defects-free Co-doped ZnO nanorods decorated with CoO clusters towards pH and glucose monitoring of fruit juices and human fluids

Herein, ZnO nanorods were doped with Co and decorated with CoO clusters through an in situ technique to create a CoO/Co-doped ZnO (CO/CZO) heterostructure at low temperatures (150 °C) on a flexible PET substrate. In the CO/CZO heterostructure, the Co dopant has a low energy barrier to substitute Zn atoms and adsorb over oxygen atoms and their vacancies. Therefore, it decreased the charge density (ND = 2.64 × 1019 cm-3) on non-active sites of ZnO and lowered the charge transfer resistance (317 Ω) at Co-doped-ZnO/electrolyte interface by suppressing the native defects and reducing the Schottky barrier height (- 0.35 eV), respectively. Furthermore, CoO clusters induced a p-n heterostructure with Co-doped ZnO, prevented corrosion, increased the active sites for analyte absorption, and increased the ultimate tensile strength (4.85 N m-2). These characteristics enabled the CO/CZO heterostructure to work as a highly sensitive, chemically stable, and flexible pH and glucose oxidation electrode. Therefore, CO/CZO heterostructure was explored for pH monitoring in human fluids and fruit juices, demonstrating a near-Nernst-limit pH sensitivity (52 mV/pH) and fast response time (19 s) in each human fluid and fruit juice. Also, it demonstrated high sensitivity (4656 µM mM-1 cm-2), low limit of detection (0.15 µM), a broad linear range (0.04 mM to 8.85 mM) and good anti-interference capacity towards glucose-sensing. Moreover, it demonstrated excellent flexibility performances, retained 53% and 69% sensitivity of the initial value for pH and glucose sensors, respectively, after 500 bending, stretching, and warping cycles.

Light-Addressable Potentiometric Sensors in Microfluidics

The light-addressable potentiometric sensor (LAPS) is an electrochemical sensor based on the field-effect principle of semiconductors. It is able to sense the change of Nernst potential on the sensor surface, and the measuring area can be controlled by the illumination of a movable light. Due to the unique light-addressable ability of the LAPS, the chemical imaging system constructed with the LAPS can realize the two-dimensional image distribution detection of chemical/biomass. In this review, the advantages of the LAPS as a sensing unit of the microelectrochemical analysis system are summarized. Then, the most recent advances in the development of the LAPS analysis system are explained and discussed. In particular, this review focused on the research of ion diffusion, enzymatic reaction, microbial metabolism, and droplet microfluidics using the LAPS analysis system. Finally, the development trends and prospects of the LAPS analysis system are illustrated.

High Spatial Resolution Ion Imaging by Focused Electron-Beam Excitation with Nanometric Thin Sensor Substrate

We developed a high spatially-resolved ion-imaging system using focused electron beam excitation. In this system, we designed a nanometric thin sensor substrate to improve spatial resolution. The principle of pH measurement is similar to that of a light-addressable potentiometric sensor (LAPS), however, here the focused electron beam is used as an excitation carrier instead of light. A Nernstian-like pH response with a pH sensitivity of 53.83 mV/pH and linearity of 96.15% was obtained. The spatial resolution of the imaging system was evaluated by applying a photoresist to the sensing surface of the ion-sensor substrate. A spatial resolution of 216 nm was obtained. We achieved a substantially higher spatial resolution than that reported in the LAPS systems.

Laser Illumination Adjustments for Signal-to-Noise Ratio and Spatial Resolution Enhancement in Static 2D Chemical Images of NbOx/IGZO/ITO/Glass Light-Addressable Potentiometric Sensors

In a previous study, a thin In-Ga-Zn-oxide light addressable potentiometric sensor (IGZO LAPS) was indicated to have the advantages of low interference from ambient light, a high photocurrent and transfer efficiency, and a low cost. However, illumination optimization to obtain two-dimensional (2D) chemical images with better spatial resolutions has not been fully investigated. The trigger current and AC-modulated frequency of a 405-nm laser used to illuminate the fabricated IGZO LAPS were modified to check the photocurrent of the sensing area and SU8–2005 masking area, obtaining spatial resolution-related functions for the first time. The trigger current of illumination was adjusted from 0.020 to 0.030 A to compromise between an acceptable photocurrent and the integrity of the SU8–2005 masking layer. The photocurrent (PC) and differential photocurrent (DPC) versus scanning length (SL) controlled by an X-Y stage were used to check the resolved critical dimensions (CDs). The difference between resolved CD and optically measured CD (e.g., delta CD) measured at an AC frequency of 500 Hz revealed overall smaller values, supporting precise measurement in 2D imaging. The signal-to-noise ratio (SNR) has an optimized range of 2.0 to 2.15 for a better resolution for step spacings of both 10 and 2 μm in the scanning procedure to construct static 2D images. Under illumination conditions with a trigger current of 0.025 A and at an AC frequency of 500 Hz, the spatial resolution can be reduced to 10 μm from the pattern width of 6 μm. This developed methodology provides a quantitative evaluation with further optimization in spatial resolution without an extra cost for applications requiring a high spatial resolution, such as single-cell activity.