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Jemelka J, Palka K, Janicek P, Slang S, Jancalek J, Kurka M, Vlcek M. Solution processed multi-layered thin films of Ge 20Sb 5S 75 and Ge 20Sb 5Se 75 chalcogenide glasses. Sci Rep 2023; 13:16609. [PMID: 37789107 PMCID: PMC10547712 DOI: 10.1038/s41598-023-43772-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/02/2023] [Accepted: 09/28/2023] [Indexed: 10/05/2023] Open
Abstract
Solution processed non-toxic Ge20Sb5Se75 chalcogenide glass thin films were deposited using spin-coating method from n-propylamine-methanol solvent mixture in specular optical quality. Optical properties, composition, structure, and chemical resistance were studied in dependence on the annealing temperature. Significant increase of refractive index and chemical resistance caused by thermoinduced structural polymerization and release of organic residua were observed. The high chemical resistance of hard-baked thin films allowed repeated direct depositions by spin-coating, increasing total thickness. Multilayered thin films of amorphous Ge20Sb5Se75 and Ge20Sb5S75 were also successfully prepared by direct deposition for the first time. Solution based deposition of non-toxic Ge20Sb5Se75 thin films in specular optical quality significantly widens the applicability of solution processed chalcogenide glass thin films. Moreover, solution based direct deposition of different glasses on hard-baked thin films opens the way to simple and cost-effective preparation of more sophisticated optical elements (e.g. beam splitters, photonic mirrors).
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Affiliation(s)
- Jiri Jemelka
- Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
| | - Karel Palka
- Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic.
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic.
| | - Petr Janicek
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
- Faculty of Chemical Technology, Institute of Applied Physics and Mathematics, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
| | - Stanislav Slang
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
| | - Jiri Jancalek
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
| | - Michal Kurka
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
| | - Miroslav Vlcek
- Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
- Faculty of Chemical Technology, Center of Materials and Nanotechnologies, University of Pardubice, Studentska 95, 53210, Pardubice, Czech Republic
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Liu A, Zhu H, Zou T, Reo Y, Ryu GS, Noh YY. Evaporated nanometer chalcogenide films for scalable high-performance complementary electronics. Nat Commun 2022; 13:6372. [PMID: 36289230 PMCID: PMC9605968 DOI: 10.1038/s41467-022-34119-6] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/30/2022] [Accepted: 10/13/2022] [Indexed: 11/09/2022] Open
Abstract
The exploration of stable and high-mobility semiconductors that can be grown over a large area using cost-effective methods continues to attract the interest of the electronics community. However, many mainstream candidates are challenged by scarce and expensive components, manufacturing costs, low stability, and limitations of large-area growth. Herein, we report wafer-scale ultrathin (metal) chalcogenide semiconductors for high-performance complementary electronics using standard room temperature thermal evaporation. The n-type bismuth sulfide delivers an in-situ transition from a conductor to a high-mobility semiconductor after mild post-annealing with self-assembly phase conversion, achieving thin-film transistors with mobilities of over 10 cm2 V-1 s-1, on/off current ratios exceeding 108, and high stability. Complementary inverters are constructed in combination with p-channel tellurium device with hole mobilities of over 50 cm2 V-1 s-1, delivering remarkable voltage transfer characteristics with a high gain of 200. This work has laid the foundation for depositing scalable electronics in a simple and cost-effective manner, which is compatible with monolithic integration with commercial products such as organic light-emitting diodes.
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Affiliation(s)
- Ao Liu
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
| | - Huihui Zhu
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
| | - Taoyu Zou
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
| | - Youjin Reo
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
| | - Gi-Seong Ryu
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
| | - Yong-Young Noh
- grid.49100.3c0000 0001 0742 4007Department of Chemical Engineering, Pohang University of Science and Technology, 77 Cheongam-Ro, Nam-Gu, Pohang, 37673 Republic of Korea
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