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Rosi P, Clausen A, Weber D, Tavabi AH, Frabboni S, Tiemeijer P, Dunin-Borkowski RE, Rotunno E, Grillo V. Automatic Alignment of an Orbital Angular Momentum Sorter in a Transmission Electron Microscope Using a Convolutional Neural Network. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2022; 29:1-9. [PMID: 36082682 DOI: 10.1017/s143192762201248x] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
We report on the automatic alignment of a transmission electron microscope equipped with an orbital angular momentum sorter using a convolutional neural network. The neural network is able to control all relevant parameters of both the electron-optical setup of the microscope and the external voltage source of the sorter without input from the user. It can compensate for mechanical and optical misalignments of the sorter, in order to optimize its spectral resolution. The alignment is completed over a few frames and can be kept stable by making use of the fast fitting time of the neural network.
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Affiliation(s)
- Paolo Rosi
- Istituto Nanoscienze - CNR, via G. Campi 213/A, Modena 41125, Italy
- FIM Department, University of Modena and Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
| | - Alexander Clausen
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Dieter Weber
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Amir H Tavabi
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Stefano Frabboni
- Istituto Nanoscienze - CNR, via G. Campi 213/A, Modena 41125, Italy
- FIM Department, University of Modena and Reggio Emilia, via G. Campi 213/A, Modena 41125, Italy
| | - Peter Tiemeijer
- Thermo Fisher Scientific, PO Box 80066, 5600 KA Eindhoven, The Netherlands
| | - Rafal E Dunin-Borkowski
- Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, Jülich 52425, Germany
| | - Enzo Rotunno
- Istituto Nanoscienze - CNR, via G. Campi 213/A, Modena 41125, Italy
| | - Vincenzo Grillo
- Istituto Nanoscienze - CNR, via G. Campi 213/A, Modena 41125, Italy
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Grillo V, Tavabi AH, Yucelen E, Lu PH, Venturi F, Larocque H, Jin L, Savenko A, Gazzadi GC, Balboni R, Frabboni S, Tiemeijer P, Dunin-Borkowski RE, Karimi E. Towards a holographic approach to spherical aberration correction in scanning transmission electron microscopy. OPTICS EXPRESS 2017; 25:21851-21860. [PMID: 29041477 DOI: 10.1364/oe.25.021851] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2017] [Accepted: 08/11/2017] [Indexed: 06/07/2023]
Abstract
Recent progress in phase modulation using nanofabricated electron holograms has demonstrated how the phase of an electron beam can be controlled. In this paper, we apply this concept to the correction of spherical aberration in a scanning transmission electron microscope and demonstrate an improvement in spatial resolution. Such a holographic approach to spherical aberration correction is advantageous for its simplicity and cost-effectiveness.
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Rotunno E, Lazzarini L, Longo M, Grillo V. Crystal structure assessment of Ge-Sb-Te phase change nanowires. NANOSCALE 2013; 5:1557-1563. [PMID: 23322217 DOI: 10.1039/c2nr32907g] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
Further improvement of phase change memory devices based on Ge-Sb-Te alloys imposes the reduction of the active cell dimensions to the nanoscale. We investigate the atomic arrangement of Ge(1)Sb(2)Te(4) and Ge(2)Sb(2)Te(5) nanowires. We identify the stacking sequence in each crystal structure by combining the direct observation by High Angle Annular Dark Field imaging and proper simulations. We find out that Ge and Sb atoms randomly share the same lattice sites, although this configuration is considered not stable according to the existing theoretical models elaborated for the bulk material.
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Affiliation(s)
- Enzo Rotunno
- IMEM-CNR, Parco Area delle Scienze 37/A, 43124 Parma, Italy.
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STEM_CELL: A software tool for electron microscopy. Part 2 analysis of crystalline materials. Ultramicroscopy 2013; 125:112-29. [DOI: 10.1016/j.ultramic.2012.10.009] [Citation(s) in RCA: 63] [Impact Index Per Article: 5.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/27/2012] [Revised: 10/24/2012] [Accepted: 10/27/2012] [Indexed: 11/15/2022]
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Verbeeck J, Béché A, Van den Broek W. A holographic method to measure the source size broadening in STEM. Ultramicroscopy 2012; 120:35-40. [DOI: 10.1016/j.ultramic.2012.05.007] [Citation(s) in RCA: 27] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/21/2012] [Revised: 05/14/2012] [Accepted: 05/23/2012] [Indexed: 10/28/2022]
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Carlino E. Quantitative Z-contrast atomic resolution studies of semiconductor nanostructured materials. ACTA ACUST UNITED AC 2010. [DOI: 10.1088/1742-6596/209/1/012005] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022]
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Grillo V. The effect of surface strain relaxation on HAADF imaging. Ultramicroscopy 2009; 109:1453-64. [DOI: 10.1016/j.ultramic.2009.07.010] [Citation(s) in RCA: 66] [Impact Index Per Article: 4.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/12/2009] [Revised: 07/14/2009] [Accepted: 07/17/2009] [Indexed: 11/30/2022]
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Measurement of specimen thickness and composition in AlxGa1-xN/GaN using high-angle annular dark field images. Ultramicroscopy 2009; 109:1171-82. [DOI: 10.1016/j.ultramic.2009.05.003] [Citation(s) in RCA: 147] [Impact Index Per Article: 9.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/28/2008] [Revised: 02/06/2009] [Accepted: 05/01/2009] [Indexed: 11/17/2022]
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