|
1
|
Wu B, Zhang Z, Chen B, Zheng Z, You C, Liu C, Li X, Wang J, Wang Y, Song E, Cui J, An Z, Huang G, Mei Y. One-step rolling fabrication of VO 2 tubular bolometers with polarization-sensitive and omnidirectional detection. SCIENCE ADVANCES 2023; 9:eadi7805. [PMID: 37851806 PMCID: PMC10584336 DOI: 10.1126/sciadv.adi7805] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/21/2023] [Accepted: 09/15/2023] [Indexed: 10/20/2023]
Abstract
Uncooled infrared detection based on vanadium dioxide (VO2) radiometer is highly demanded in temperature monitoring and security protection. The key to its breakthrough is to fabricate bolometer arrays with great absorbance and excellent thermal insulation using a straightforward procedure. Here, we show a tubular bolometer by one-step rolling VO2 nanomembranes with enhanced infrared detection. The tubular geometry enhances the thermal insulation, light absorption, and temperature sensitivity of freestanding VO2 nanomembranes. This tubular VO2 bolometer exhibits a detectivity of ~2 × 108 cm Hz1/2 W-1 in the ultrabroad infrared spectrum, a response time of ~2.0 ms, and a calculated noise-equivalent temperature difference of 64.5 mK. Furthermore, our device presents a workable structural paradigm for polarization-sensitive and omnidirectional light coupling bolometers. The demonstrated overall characteristics suggest that tubular bolometers have the potential to narrow performance and cost gap between photon detectors and thermal detectors with low cost and broad applications.
Collapse
Affiliation(s)
- Binmin Wu
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Ziyu Zhang
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Bingxin Chen
- State Key Laboratory of Surface Physics and Institute for Nanoelectronic Devices and Quantum Computing, Department of Physics, Fudan University, Shanghai 200438, People’s Republic of China
| | - Zhi Zheng
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Chunyu You
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Chang Liu
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Xing Li
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Jinlong Wang
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Yunqi Wang
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Enming Song
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China
| | - Jizhai Cui
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Zhenghua An
- State Key Laboratory of Surface Physics and Institute for Nanoelectronic Devices and Quantum Computing, Department of Physics, Fudan University, Shanghai 200438, People’s Republic of China
| | - Gaoshan Huang
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
| | - Yongfeng Mei
- Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People’s Republic of China
- Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People’s Republic of China
- International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People’s Republic of China
- Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People’s Republic of China
| |
Collapse
|
|
2
|
Cheng T, Zhang Q, Jiao B, Chen D, Wu X. Optical readout sensitivity of deformed microreflector for uncooled infrared detector: theoretical model and experimental validation. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA. A, OPTICS, IMAGE SCIENCE, AND VISION 2009; 26:2353-2361. [PMID: 19884932 DOI: 10.1364/josaa.26.002353] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
The authors's group proposed an optical-readout uncooled infrared detector. Primarily because of the bilayer structure of the usual such detector, deformation of the reflector is often unavoidable and seriously degrades the optical readout sensitivity. According to the theoretical analysis and experimental validation, an optical solution to this problem was established, and it was found that for the specific curvature radius, there are many characteristic reflector lengths and filter positions corresponding to the sensitivity peaks. When employing this solution, the sensitivity loss induced by the deformed reflector would be reduced to a minimum level. The strategy of this solution may also be suitable for other micromechanical devices that experience the same problem.
Collapse
Affiliation(s)
- Teng Cheng
- Chinese Academy of Science Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China
| | | | | | | | | |
Collapse
|