X-ray analysis and mapping by wavelength dispersive X-ray spectroscopy in an electron microscope

Deep learning in electron microscopy

Deep learning is transforming most areas of science and technology, including electron microscopy. This review paper offers a practical perspective aimed at developers with limited familiarity. For context, we review popular applications of deep learning in electron microscopy. Following, we discuss hardware and software needed to get started with deep learning and interface with electron microscopes. We then review neural network components, popular architectures, and their optimization. Finally, we discuss future directions of deep learning in electron microscopy.

Combination of high spatial resolution and low minimum detection limit using thinned specimens in cutting-edge electron probe microanalysis

The effect of sample thickness on the spatial resolution and minimum detection limit (MDL) has been investigated for field-emission electron probe microanalysis with wavelength dispersive X-ray spectroscopy (FE-EPMA-WDX). Indium gallium phosphide samples thinned to thicknesses of about 100, 130, 210, 310, and 430 nm provided effective thin-sample FE-EPMA-WDX in the resolution range of 40-350 nm and MDL range of 13,000-600 ppm (mass). A comparison of the FE-EPMA results for thin and bulk samples demonstrated that thin-sample FE-EPMA can achieve both higher sensitivity and better spatial resolution than is possible using bulk samples. Most of the X-rays that determine the MDL are generated in a surface region of the sample with a depth of approximately 300 nm. The spatial resolution and MDL can be tuned by the sample thickness. Furthermore, analysis of small amounts of Cl in SiO2 indicated that thin-sample FE-EPMA can realize a spatial resolution and MDL of 41 nm and 446 ppm at Iprob=50 nA, respectively, whereas bulk-sample FE-EPMA offers a resolution of only 348 nm and MDL of 426 ppm.

An examination of kernite (Na2B4O6(OH)2·3H2O) using X-ray and electron spectroscopies: quantitative microanalysis of a hydrated low-Z mineral

Mineral borates, the primary industrial source of boron, are found in a large variety of compositions. One such source, kernite (Na2B4O6(OH)2·3H2O), offers an array of challenges for traditional electron-probe microanalysis (EPMA)-it is hygroscopic, an electrical insulator, composed entirely of light elements, and sensitive to both low pressures and the electron beam. However, the approximate stoichiometric composition of kernite can be analyzed with careful preparation, proper selection of reference materials, and attention to the details of quantification procedures, including correction for the time dependency of the sodium X-ray signal. Moreover, a reasonable estimation of the mineral's water content can also be made by comparing the measured oxygen to the calculated stoichiometric oxygen content. X-ray diffraction, variable-pressure electron imaging, and visual inspection elucidate the structural consequences of high vacuum treatment of kernite, while Auger electron spectroscopy and X-ray photoelectron spectroscopy confirm electron beam-driven migration of sodium and oxygen out of the near-surface region (sampling depth ≈ 2 nm). These surface effects are insufficiently large to significantly affect the EPMA results (sampling depth ≈ 400 nm at 5 keV).

The Progress in Electron Microscopy Studies of Particulate Matters to Be Used as a Standard Monitoring Method for Air Dust Pollution

The present article reviews studies on air solid particles carried out with the use of electron microscopy. Particle analysis combining scanning and transmission electron microscopy (SEM and TEM) can be used to derive size-resolved information of the composition, mixing state, morphology, and complex refractive index of atmospheric aerosol particles. It seems that electron microscopy is more widely used in atmospheric particulate matter analysis, but the usage of this method is sometimes problematic. First of all, there is no standard methodology adapted for dust analysis, and it is difficult to compare the results coming from different laboratories. Nevertheless, it was shown that this method has potential to be used in the future as a standard monitoring procedure of air solid particles.

Analysis of airborne metal containing particles with EDX/EDS detectors in electron microscopes

In years 2006–2010 particulate matter analysis was undertaken for dust samples collected from Gdansk and London area in order to compare their morphology and composition. Part of those studies was devoted to analysis of particulate matter (PM) bearing metals. Characterization of the morphology and size of the particles collected onto the filters was performed using a scanning electron microscope (SEM) and transmission electron microscope (TEM). Both electron microscopes were equipped with energy dispersive X-ray spectrometers to identify the elemental composition of the particles. On analysis of the X-ray spectra acquired by both TEM and SEM, the particles were divided into 10 groups as follows: Al-rich, Ba-rich, C-rich, Ca-rich, Cl-rich, Fe-rich, Mg-rich, Na-rich, S-rich, Si-rich. Speciation of the particles based on the major element and accompanying minor elements yielded 34 particle types. However, some pairs of elements repeat, for instance: Na-Cl and Cl-Na, Al-S and S-Al, Si-Al and Al-Si, S-Ca and Ca-S. These are undoubtedly the same types of particles; variation in peak heights of the major and minor elements is normal in a mixed particle population.