Three dimensional analysis of the composition in solid alloys by variable probe in scanning transmission electron microscopy

Combining quantitative ADF STEM with SiNx membrane-based MEMS devices: A simulation study with Pt nanoparticles

Computer simulations are used to assess the influence of a 20-nm-thick SiN_x membrane on the quantification of atomic-resolution annular dark-field (ADF) scanning transmission electron microscopy images of Pt nanoparticles. The discussions include the effect of different nanoparticle/membrane arrangements, accelerating voltage, nanoparticle thickness and the presence of adjacent atomic columns on the accuracy with which the number of Pt atoms in each atom column can be counted. The results, which are based on the use of ADF scattering cross-sections, show that an accuracy of better than a single atom is attainable at 200 and 300 kV. At 80kV, the scattering in a typical SiN_x membrane is sufficiently strong that the best possible atom counting accuracy is reduced to +/- 2 atoms. The implications of the work for quantitative studies of Pt nanoparticles imaged through SiN_x membranes are discussed.

Three-dimensional characterization of Guinier-Preston zones in an Al-Cu alloy using depth-sectioning technique

Guinier-Preston (GP) zones formed as nanometer-sized Cu-rich monolayers in α-Al matrix phase during aging process have been investigated using depth-sectioning technique, where through-focal high-angle annular dark-field (HAADF) images were recorded along a <001> zone axis of the α-Al phase using aberration-corrected scanning transmission electron microscopy (STEM). HAADF intensities of the GP zones in the through-focal series vary with defocus settings, depending on the depths of the GP zones in the sample. Determination of the depth of a GP zone is not straightforward because the electron wave function of the STEM probe in the aligned crystalline material is affected by electron channeling. The depths of GP zones were then estimated via comparison with multislice simulations where GP zones were arranged at various depths in a supercell, and HAADF intensities were simulated with various defocus values. We show that the depth-sectioning technique can be used to investigate three-dimensional configurations of GP zones in the sample.

Optimizing experimental parameters for the projection requirement in HAADF-STEM tomography

Tomographic reconstruction algorithms offer a means by which a tilt-series of transmission images can be combined to yield a three dimensional model of the specimen. Conventional reconstruction algorithms assume that the measured signal is a linear projection of some property, typically the density, of the material. Here we report the use of multislice simulations to investigate the extent to which this assumption is met in HAADF-STEM imaging. The use of simulations allows for a systematic survey of a range of materials and microscope parameters to inform optimal experimental design. Using this approach it is demonstrated that the imaging of amorphous materials is in good agreement with the projection assumption in most cases. Images of crystalline specimens taken along zone-axes are found to be poorly suited for conventional linear reconstruction algorithms due to channelling effects which produce enhanced intensities compared with off-axis images, and poor compliance with the projection requirement. Off-axis images are found to be suitable for reconstruction, though they do not strictly meet the linearity requirement in most cases. It is demonstrated that microscope parameters can be selected to yield improved compliance with the projection requirement.