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Krpenský J, Horák M, Kabát J, Planer J, Kepič P, Křápek V, Konečná A. Analytical electron microscopy analysis of insulating and metallic phases in nanostructured vanadium dioxide. NANOSCALE ADVANCES 2024; 6:3338-3346. [PMID: 38933858 PMCID: PMC11197434 DOI: 10.1039/d4na00338a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/24/2024] [Accepted: 05/02/2024] [Indexed: 06/28/2024]
Abstract
Vanadium dioxide (VO2) is a strongly correlated material that exhibits the insulator-to-metal transition (IMT) near room temperature, which makes it a promising candidate for applications in nanophotonics or optoelectronics. However, creating VO2 nanostructures with the desired functionality can be challenging due to microscopic inhomogeneities that can significantly impact the local optical and electronic properties. Thin lamellas, produced by focused ion beam milling from a homogeneous layer, provide a useful prototype for studying VO2 at the truly microscopic level using a scanning transmission electron microscope (STEM). High-resolution imaging is used to identify structural inhomogeneities while electron energy-loss spectroscopy (EELS) supported by statistical analysis helps to detect V x O y stoichiometries with a reduced oxidation number of vanadium at the areas of thickness below 70 nm. On the other hand, the thicker areas are dominated by vanadium dioxide, where the signatures of the IMT are detected in both core-loss and low-loss EELS experiments with in situ heating. The experimental results are interpreted with ab initio and semi-classical calculations. This work shows that structural inhomogeneities such as pores and cracks present no harm to the desired optical properties of VO2 samples.
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Affiliation(s)
- Jan Krpenský
- Institute of Physical Engineering, Brno University of Technology Technická 2896/2 616 69 Brno Czech Republic
| | - Michal Horák
- Central European Institute of Technology, Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic
| | - Jiří Kabát
- Institute of Physical Engineering, Brno University of Technology Technická 2896/2 616 69 Brno Czech Republic
| | - Jakub Planer
- Central European Institute of Technology, Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic
| | - Peter Kepič
- Central European Institute of Technology, Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic
| | - Vlastimil Křápek
- Institute of Physical Engineering, Brno University of Technology Technická 2896/2 616 69 Brno Czech Republic
- Central European Institute of Technology, Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic
| | - Andrea Konečná
- Institute of Physical Engineering, Brno University of Technology Technická 2896/2 616 69 Brno Czech Republic
- Central European Institute of Technology, Brno University of Technology Purkyňova 123 612 00 Brno Czech Republic
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Stöger-Pollach M, Bukvišova K, Zenz K, Stöger L, Scales Z. Important aspects of investigating optical excitations in semiconductors using a scanning transmission electron microscope. J Microsc 2024; 293:138-145. [PMID: 37924264 DOI: 10.1111/jmi.13242] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/05/2023] [Revised: 10/23/2023] [Accepted: 10/31/2023] [Indexed: 11/06/2023]
Abstract
Since semiconductor structures are becoming smaller and smaller, the examination methods must also take this development into account. Optical methods have long reached their limits here, but small dimensions are also a challenge for electron beam techniques, especially when it comes to determining optical properties. In this paper, electron microscopic methods of investigating optical properties are discussed. Special attention is given to the physical limits and how to deal with them. We will cover electron energy loss spectrometry as well as cathodoluminescence spectrometry. We pay special attention to inelastic delocalisation, radiation damage, the Čerenkov effect, interference effects of optical excitations and higher diffraction orders on a grating analyser for the cathodoluminescence signal.
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Affiliation(s)
- Michael Stöger-Pollach
- University Service Center for TEM, TU Wien, Vienna, Austria
- Institute for Solid State Physics, TU Wien, Vienna, Austria
| | | | - Keanu Zenz
- Institute for Solid State Physics, TU Wien, Vienna, Austria
| | - Leo Stöger
- Institute for Solid State Physics, TU Wien, Vienna, Austria
- Atominstitut der TU Wien, Vienna, Austria
| | - Ze Scales
- University Service Center for TEM, TU Wien, Vienna, Austria
- KAI Kompetenzzentrum Automobil- und Insdustrieelektronik GmbH, Villach, Austria
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Stöger-Pollach M, Zenz K, Ursin F, Schilberg J, Stöger L. A correction for higher-order refraction in cathodoluminescence spectrometry. Ultramicroscopy 2023; 251:113770. [PMID: 37267709 DOI: 10.1016/j.ultramic.2023.113770] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/07/2022] [Revised: 05/12/2023] [Accepted: 05/26/2023] [Indexed: 06/04/2023]
Abstract
Cathodoluminescence (CL) is a developing analytical method in electron microscopy, because of its excellent energy resolution. Usually a Czerny-Turner type spectrometer is employed, having a blazed grating as analyzer. Unlike a prism analyzer, where the dispersion depends on the refractive index of the prism itself leading to a non-linear spectral distribution, the grating has the advantage that the spectral distribution depends linearly on the wavelength. As a draw-back, higher-order refraction alters the measured optical spectrum at larger wavelengths. In general, blazed gratings are used in order to minimize this effect in a certain spectral range. Nevertheless, the higher-order intensities can be still significant. In the present study we present a method for correcting the acquired optical spectra with respect to higher order diffraction intensities and apply it to CaO and GaN CL-spectra.
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Affiliation(s)
- Michael Stöger-Pollach
- University Service Center for Transmission Electron Microscopy (USTEM), Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria; Institute of Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria.
| | - Keanu Zenz
- Institute of Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
| | - Felix Ursin
- Institute of Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
| | - Johannes Schilberg
- Institute of Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
| | - Leo Stöger
- Institute of Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
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Stöger-Pollach M, Pichler CF, Dan T, Zickler GA, Bukvišová K, Eibl O, Brandstätter F. Coherent light emission in cathodoluminescence when using GaAs in a scanning (transmission) electron microscope. Ultramicroscopy 2021; 224:113260. [PMID: 33774193 DOI: 10.1016/j.ultramic.2021.113260] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/05/2020] [Revised: 12/18/2020] [Accepted: 03/09/2021] [Indexed: 11/28/2022]
Abstract
For most materials science oriented applications incoherent cathodoluminescence (CL) is of main interest, for which the recombination of electron-hole pairs yields the emission of light. However, the incoherent signal is superimposed by coherently excited photons, similar to the situation for X-rays in Energy-Dispersive X-ray spectra (EDX). In EDX two very different processes superimpose in each spectrum: Bremsstrahlung and characteristic X-ray radiation. Both processes yield X-rays, however, their origin is substantially different. Therefore, in the present CL study we focus on the coherent emission of light, in particular Čerenkov radiation. We use a 200μm thick GaAs sample, not electron transparent and therefore not acting as a light guide, and investigate the radiation emitted from the top surface of the sample generated by back-scattered electrons on their way out of the specimen. The CL spectra revealed a pronounced peak corresponding to the expected interband transition. This peak was at 892 nm at room temperature and shifted to 845 nm at 80 K. The coherent light emission significantly modifies the shape of CL spectra at elevated beam energies. For the first time, by the systematic variation of current and energy of primary electrons we could distinguish the coherent and incoherent light superimposed in CL spectra. These findings are essential for the correct interpretation of CL spectra in STEM. The Čerenkov intensity as well as the total intensity in a spectrum scales linearly with the beam current. Additionally, we investigate the influence of asymmetric mirrors on the spectral shapes, collecting roughly only half of the whole solid angle. Different emission behaviour of different physical causes thus lead to changes in the overall spectral shape.
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Affiliation(s)
- Michael Stöger-Pollach
- University Service Centre for Transmission Electron Microscopy (USTEM), Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria; Institute for Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria.
| | - Cornelia F Pichler
- Institute for Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
| | - Topa Dan
- Naturhistorisches Museum Wien, Burgring 7, 1010 Wien, Austria
| | - Gregor A Zickler
- Department for Chemistry and Physics of Materials, Paris Lodron Universität Salzburg, Jakob-Haringer Str. 2A, 5020 Salzburg, Austria
| | - Kristýna Bukvišová
- Central European Institute of Technology (CEITEC), Brno University of Technology, Purkyňova 123, Brno 612 00, Czech Republic
| | - Oliver Eibl
- University Service Centre for Transmission Electron Microscopy (USTEM), Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria; Institute for Solid State Physics, Technische Universität Wien, Wiedner Hauptstraße 8-10, 1040 Wien, Austria
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Stöger-Pollach M, Löffler S, Maurer N, Bukvišová K. Using Cˇerenkov radiation for measuring the refractive index in thick samples by interferometric cathodoluminescence. Ultramicroscopy 2020; 214:113011. [DOI: 10.1016/j.ultramic.2020.113011] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/10/2020] [Revised: 04/24/2020] [Accepted: 04/25/2020] [Indexed: 10/24/2022]
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Horák M, Šikola T. Influence of experimental conditions on localized surface plasmon resonances measurement by electron energy loss spectroscopy. Ultramicroscopy 2020; 216:113044. [PMID: 32535410 DOI: 10.1016/j.ultramic.2020.113044] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/10/2020] [Revised: 05/25/2020] [Accepted: 05/27/2020] [Indexed: 10/24/2022]
Abstract
Scanning transmission electron microscopy (STEM) combined with electron energy loss spectroscopy (EELS) has become a standard technique to map localized surface plasmon resonances with a nanometer spatial and a sufficient energy resolution over the last 15 years. However, no experimental work discussing the influence of experimental conditions during the measurement has been published up to now. We present an experimental study of the influence of the primary beam energy and the collection semi-angle on the plasmon resonances measurement by STEM-EELS. To explore the influence of these two experimental parameters we study a series of gold rods and gold bow-tie and diabolo antennas. We discuss the impact on experimental characteristics which are important for successful detection of the plasmon peak in EELS, namely: the intensity of plasmonic signal, the signal to background ratio, and the signal to zero-loss peak ratio. We found that the primary beam energy should be high enough to suppress the scattering in the sample and at the same time should be low enough to avoid the appearance of relativistic effects. Consequently, the best results are obtained using a medium primary beam energy, in our case 120 keV, and an arbitrary collection semi-angle, as it is not a critical parameter at this primary beam energy. Our instructive overview will help microscopists in the field of plasmonics to arrange their experiments.
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Affiliation(s)
- Michal Horák
- CEITEC - Central European Institute of Technology, Brno University of Technology, Purkyňova 123, Brno 612 00, Czech Republic.
| | - Tomáš Šikola
- CEITEC - Central European Institute of Technology, Brno University of Technology, Purkyňova 123, Brno 612 00, Czech Republic; Institute of Physical Engineering, Brno University of Technology, Technická 2, Brno 616 69, Czech Republic
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Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors. Ultramicroscopy 2019; 200:111-124. [DOI: 10.1016/j.ultramic.2019.03.001] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/06/2018] [Revised: 03/01/2019] [Accepted: 03/03/2019] [Indexed: 11/23/2022]
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Castro FC, Dravid VP. Characterization of Lithium Ion Battery Materials with Valence Electron Energy-Loss Spectroscopy. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2018; 24:214-220. [PMID: 29877170 DOI: 10.1017/s1431927618000302] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Cutting-edge research on materials for lithium ion batteries regularly focuses on nanoscale and atomic-scale phenomena. Electron energy-loss spectroscopy (EELS) is one of the most powerful ways of characterizing composition and aspects of the electronic structure of battery materials, particularly lithium and the transition metal mixed oxides found in the electrodes. However, the characteristic EELS signal from battery materials is challenging to analyze when there is strong overlap of spectral features, poor signal-to-background ratios, or thicker and uneven sample areas. A potential alternative or complementary approach comes from utilizing the valence EELS features (<20 eV loss) of battery materials. For example, the valence EELS features in LiCoO2 maintain higher jump ratios than the Li-K edge, most notably when spectra are collected with minimal acquisition times or from thick sample regions. EELS maps of these valence features give comparable results to the Li-K edge EELS maps of LiCoO2. With some spectral processing, the valence EELS maps more accurately highlight the morphology and distribution of LiCoO2 than the Li-K edge maps, especially in thicker sample regions. This approach is beneficial for cases where sample thickness or beam sensitivity limit EELS analysis, and could be used to minimize electron dosage and sample damage or contamination.
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Affiliation(s)
- Fernando C Castro
- 1Department of Materials Science and Engineering,Northwestern University,2220 Campus Drive, Cook Hall, Room 1137, Evanston,IL 60208,USA
| | - Vinayak P Dravid
- 1Department of Materials Science and Engineering,Northwestern University,2220 Campus Drive, Cook Hall, Room 1137, Evanston,IL 60208,USA
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Vatanparast M, Egoavil R, Reenaas TW, Verbeeck J, Holmestad R, Vullum PE. Bandgap measurement of high refractive index materials by off-axis EELS. Ultramicroscopy 2017; 182:92-98. [PMID: 28666140 DOI: 10.1016/j.ultramic.2017.06.019] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/30/2016] [Revised: 06/18/2017] [Accepted: 06/19/2017] [Indexed: 10/19/2022]
Abstract
In the present work Cs aberration corrected and monochromated scanning transmission electron microscopy electron energy loss spectroscopy (STEM-EELS) has been used to explore experimental set-ups that allow bandgaps of high refractive index materials to be determined. Semi-convergence and -collection angles in the µrad range were combined with off-axis or dark field EELS to avoid relativistic losses and guided light modes in the low loss range to contribute to the acquired EEL spectra. Off-axis EELS further supressed the zero loss peak and the tail of the zero loss peak. The bandgap of several GaAs-based materials were successfully determined by simple regression analyses of the background subtracted EEL spectra. The presented set-up does not require that the acceleration voltage is set to below the Čerenkov limit and can be applied over the entire acceleration voltage range of modern TEMs and for a wide range of specimen thicknesses.
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Affiliation(s)
- Maryam Vatanparast
- Department of Physics, NTNU (Norwegian University of Science and Technology), 7491 Trondheim, Norway.
| | - Ricardo Egoavil
- EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium
| | - Turid W Reenaas
- Department of Physics, NTNU (Norwegian University of Science and Technology), 7491 Trondheim, Norway
| | - Johan Verbeeck
- EMAT, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium
| | - Randi Holmestad
- Department of Physics, NTNU (Norwegian University of Science and Technology), 7491 Trondheim, Norway
| | - Per Erik Vullum
- Department of Physics, NTNU (Norwegian University of Science and Technology), 7491 Trondheim, Norway; SINTEF Materials and Chemistry, 7065 Trondheim, Norway
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Wallisch W, Stöger-Pollach M, Navickas E. Consequences of the CMR effect on EELS in TEM. Ultramicroscopy 2017; 179:84-89. [PMID: 28448829 DOI: 10.1016/j.ultramic.2017.04.011] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/21/2016] [Revised: 04/11/2017] [Accepted: 04/14/2017] [Indexed: 11/25/2022]
Abstract
Double perovskite oxides have gained in importance and exhibit negative magnetoresistance, which is known as colossal magnetoresistance (CMR) effect. Using a La2CoMnO6 (LCM) thin film layer, we proved that the physical consequences of the CMR effect do also influence the electron energy loss spectrometry (EELS) signal. We observed a change of the band gap at low energy losses and were able to study the magnetisation with chemical sensitivity by employing energy loss magnetic chiral dichroism (EMCD) below the Curie temperature TC, where the CMR effect becomes significant.
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Affiliation(s)
- Wolfgang Wallisch
- University Service Centre for Transmission Electron Microscopy, Technische Universitát Wien, Wiedner Hauptstraße 8-10, A-1040 Wien, Austria.
| | - Michael Stöger-Pollach
- University Service Centre for Transmission Electron Microscopy, Technische Universitát Wien, Wiedner Hauptstraße 8-10, A-1040 Wien, Austria
| | - Edvinas Navickas
- Institute of Chemical Technologies and Analytics, Technische Universität Wien, Getreidemarkt 9, A-1040 Wien, Austria
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Stöger-Pollach M, Schachinger T, Biedermann K, Beyer V. Valence EELS below the limit of inelastic delocalization using conical dark field EFTEM or Bessel beams. Ultramicroscopy 2017; 173:24-30. [DOI: 10.1016/j.ultramic.2016.11.022] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/08/2016] [Revised: 11/17/2016] [Accepted: 11/20/2016] [Indexed: 10/20/2022]
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Sakaguchi N, Tanda L, Kunisada Y. Improving the measurement of dielectric function by TEM-EELS: avoiding the retardation effect. Microscopy (Oxf) 2016; 65:415-421. [DOI: 10.1093/jmicro/dfw023] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/11/2016] [Accepted: 05/30/2016] [Indexed: 11/12/2022] Open
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On the validity of the Čerenkov limit as a criterion for precise band gap measurements by VEELS. Ultramicroscopy 2016; 160:80-83. [DOI: 10.1016/j.ultramic.2015.10.006] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/10/2015] [Revised: 10/05/2015] [Accepted: 10/06/2015] [Indexed: 11/21/2022]
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