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Kamal S, Hailstone RK. Need for Wavefront Sensing in Scanning Electron Microscopy. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2023; 29:491-492. [PMID: 37613224 DOI: 10.1093/micmic/ozad067.233] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/25/2023]
Affiliation(s)
- Surya Kamal
- Rochester Institute of Technology, Rochester, NY, United States
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Grünewald L, Gerthsen D, Hettler S. Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2019; 10:1290-1302. [PMID: 31293866 PMCID: PMC6604735 DOI: 10.3762/bjnano.10.128] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/07/2019] [Accepted: 05/24/2019] [Indexed: 06/09/2023]
Abstract
Background: Electron-beam shaping opens up the possibility for novel imaging techniques in scanning (transmission) electron microscopy (S(T)EM). Phase-modulating thin-film devices (phase masks) made of amorphous silicon nitride are commonly used to generate a wide range of different beam shapes. An additional conductive layer on such a device is required to avoid charging under electron-beam irradiation, which induces unwanted scattering events. Results: Phase masks of conductive amorphous carbon (aC) were successfully fabricated with optical lithography and focused ion beam milling. Analysis by TEM shows the successful generation of Bessel and vortex beams. No charging or degradation of the aC phase masks was observed. Conclusion: Amorphous carbon can be used as an alternative to silicon nitride for phase masks at the expense of a more complex fabrication process. The quality of arbitrary beam shapes could benefit from the application of phase masks made of amorphous C.
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Affiliation(s)
- Lukas Grünewald
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
| | - Dagmar Gerthsen
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
| | - Simon Hettler
- Laboratory for Electron Microscopy, Karlsruhe Institute of Technology (KIT), Engesserstrasse 7, 76131 Karlsruhe, Germany
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Verbeeck J, Béché A, Müller-Caspary K, Guzzinati G, Luong MA, Den Hertog M. Demonstration of a 2 × 2 programmable phase plate for electrons. Ultramicroscopy 2018; 190:58-65. [DOI: 10.1016/j.ultramic.2018.03.017] [Citation(s) in RCA: 59] [Impact Index Per Article: 9.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/30/2017] [Revised: 03/16/2018] [Accepted: 03/24/2018] [Indexed: 02/03/2023]
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Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film. Ultramicroscopy 2018; 189:46-53. [DOI: 10.1016/j.ultramic.2018.03.016] [Citation(s) in RCA: 20] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/23/2017] [Revised: 03/18/2018] [Accepted: 03/24/2018] [Indexed: 11/19/2022]
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Dries M, Obermair M, Hettler S, Hermann P, Seemann K, Seifried F, Ulrich S, Fischer R, Gerthsen D. Oxide-free aC/Zr 0.65Al 0.075Cu 0.275/aC phase plates for transmission electron microscopy. Ultramicroscopy 2018; 189:39-45. [PMID: 29604501 DOI: 10.1016/j.ultramic.2018.03.003] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/16/2018] [Revised: 02/22/2018] [Accepted: 03/02/2018] [Indexed: 11/28/2022]
Abstract
Thin-film phase plates (PP) have become a valuable tool for the imaging of organic objects in transmission electron microscopy (TEM). The thin film usually consists of amorphous carbon (aC), which undergoes rapid aging under intense illumination with high-energy electrons. The limited lifetime of aC film PPs calls for alternative PP materials with improved material stability. This work presents thin-film PPs fabricated from the metallic glass alloy Zr0.65Al0.075Cu0.275 (ZAC), which was identified as a promising PP material with beneficial properties, such as a large inelastic mean free path. An adverse effect of the ZAC alloy is the formation of a surface oxide layer in ambient air, which reduces the electrical conductivity and causes electrostatic charging in the electron beam. To avoid surface oxidation, the ZAC alloy is enclosed by thin aC layers. The resulting aC/ZAC/aC layer system is used to fabricate Zernike and Hilbert PPs. Phase-contrast TEM imaging is demonstrated for a sample of carbon nanotubes, which show strong contrast enhancement in PP TEM images.
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Affiliation(s)
- M Dries
- Karlsruher Institut für Technologie (KIT), Laboratorium für Elektronenmikroskopie (LEM), Engesserstraße 7, D-76131, Karlsruhe, Germany
| | - M Obermair
- Karlsruher Institut für Technologie (KIT), Laboratorium für Elektronenmikroskopie (LEM), Engesserstraße 7, D-76131, Karlsruhe, Germany.
| | - S Hettler
- Karlsruher Institut für Technologie (KIT), Laboratorium für Elektronenmikroskopie (LEM), Engesserstraße 7, D-76131, Karlsruhe, Germany
| | - P Hermann
- Karlsruher Institut für Technologie (KIT), Laboratorium für Elektronenmikroskopie (LEM), Engesserstraße 7, D-76131, Karlsruhe, Germany
| | - K Seemann
- Karlsruher Institut für Technologie (KIT), Institut für Angewandte Materialien (IAM), Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany
| | - F Seifried
- Karlsruher Institut für Technologie (KIT), Institut für Angewandte Materialien (IAM), Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany
| | - S Ulrich
- Karlsruher Institut für Technologie (KIT), Institut für Angewandte Materialien (IAM), Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany
| | - R Fischer
- Karlsruher Institut für Technologie (KIT), Institut für Physikalische Chemie (IPC), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany
| | - D Gerthsen
- Karlsruher Institut für Technologie (KIT), Laboratorium für Elektronenmikroskopie (LEM), Engesserstraße 7, D-76131, Karlsruhe, Germany
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Linck M, Ercius PA, Pierce JS, McMorran BJ. Aberration corrected STEM by means of diffraction gratings. Ultramicroscopy 2017. [DOI: 10.1016/j.ultramic.2017.06.008] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Grillo V, Tavabi AH, Yucelen E, Lu PH, Venturi F, Larocque H, Jin L, Savenko A, Gazzadi GC, Balboni R, Frabboni S, Tiemeijer P, Dunin-Borkowski RE, Karimi E. Towards a holographic approach to spherical aberration correction in scanning transmission electron microscopy. OPTICS EXPRESS 2017; 25:21851-21860. [PMID: 29041477 DOI: 10.1364/oe.25.021851] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2017] [Accepted: 08/11/2017] [Indexed: 06/07/2023]
Abstract
Recent progress in phase modulation using nanofabricated electron holograms has demonstrated how the phase of an electron beam can be controlled. In this paper, we apply this concept to the correction of spherical aberration in a scanning transmission electron microscope and demonstrate an improvement in spatial resolution. Such a holographic approach to spherical aberration correction is advantageous for its simplicity and cost-effectiveness.
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