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Zheng F, Migunov V, Caron J, Du H, Pozzi G, Dunin-Borkowski RE. Nanoscale Three-Dimensional Charge Density and Electric Field Mapping by Electron Holographic Tomography. NANO LETTERS 2023; 23:843-849. [PMID: 36689622 PMCID: PMC9912371 DOI: 10.1021/acs.nanolett.2c03879] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/03/2022] [Revised: 01/18/2023] [Indexed: 06/17/2023]
Abstract
The operation of nanoscale electronic devices is related intimately to the three-dimensional (3D) charge density distributions within them. Here, we demonstrate the quantitative 3D mapping of the charge density and long-range electric field associated with an electrically biased carbon fiber nanotip with a spatial resolution of approximately 5 nm using electron holographic tomography in the transmission electron microscope combined with model-based iterative reconstruction. The approach presented here can be applied to a wide range of other nanoscale materials and devices.
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Affiliation(s)
- Fengshan Zheng
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
- Spin-X
Institute, Electron Microscopy Center, School of Physics and Optoelectronics,
State Key Laboratory of Luminescent Materials and Devices, Guangdong-Hong
Kong-Macao Joint Laboratory of Optoelectronic and Magnetic Functional
Materials, South China University of Technology, Guangzhou 511442, China
| | - Vadim Migunov
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
- Central
Facility for Electron Microscopy (GFE), RWTH Aachen University, Ahornstrasse 55, 52074 Aachen, Germany
| | - Jan Caron
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
| | - Hongchu Du
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
- Central
Facility for Electron Microscopy (GFE), RWTH Aachen University, Ahornstrasse 55, 52074 Aachen, Germany
| | - Giulio Pozzi
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
- Department
FIM, University of Modena and Reggio Emilia, via G. Campi 213/a, 41125 Modena, Italy
| | - Rafal E. Dunin-Borkowski
- Ernst
Ruska-Centre for Microscopy and Spectroscopy with Electrons and Peter
Grünberg Institute, Forschungszentrum
Jülich, 52425 Jülich, Germany
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Almeida TP, Lequeux S, Palomino A, Sousa RC, Fruchart O, Prejbeanu IL, Dieny B, Masseboeuf A, Cooper D. Quantitative Visualization of Thermally Enhanced Perpendicular Shape Anisotropy STT-MRAM Nanopillars. NANO LETTERS 2022; 22:4000-4005. [PMID: 35576455 DOI: 10.1021/acs.nanolett.2c00597] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Perpendicular shape anisotropy (PSA) offers a practical solution to downscale spin-transfer torque magnetoresistive random-access memory (STT-MRAM) beyond the sub-20 nm technology node while retaining thermal stability. However, our understanding of the thermomagnetic behavior of PSA-STT-MRAM is often indirect, relying on magnetoresistance measurements and micromagnetic modeling. Here, the magnetism of a NiFe PSA-STT-MRAM nanopillar is investigated using off-axis electron holography, providing spatially resolved magnetic information as a function of temperature. Magnetic induction maps reveal the micromagnetic configuration of the NiFe storage layer (∼60 nm high, ≤20 nm diameter), confirming the PSA induced by its 3:1 aspect ratio. In situ heating demonstrates that the PSA of the storage layer is maintained up to at least 250 °C, and direct quantitative measurements reveal a moderate decrease of magnetic induction. Hence, this study shows explicitly that PSA provides significant stability in STT-MRAM applications that require reliable performance over a range of operating temperatures.
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Affiliation(s)
- Trevor P Almeida
- University of Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
- SUPA, School of Physics and Astronomy, University of Glasgow, Glascow G12 8QQ, United Kingdom
| | - Steven Lequeux
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Alvaro Palomino
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Ricardo C Sousa
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Olivier Fruchart
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Ioan-Lucian Prejbeanu
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Bernard Dieny
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - Aurélien Masseboeuf
- University of Grenoble Alpes, CEA, CNRS, Grenoble INP, SPINTEC, 38000 Grenoble, France
| | - David Cooper
- University of Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France
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Boureau V, Nguyen VD, Masseboeuf A, Palomino A, Gautier E, Chatterjee J, Lequeux S, Auffret S, Vila L, Sousa R, Prejbeanu L, Cooper D, Dieny B. An electron holography study of perpendicular magnetic tunnel junctions nanostructured by deposition on pre-patterned conducting pillars. NANOSCALE 2020; 12:17312-17318. [PMID: 32789322 DOI: 10.1039/d0nr03353g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
The fabrication of multi-gigabit magnetic random access memory (MRAM) chips requires the patterning of magnetic tunnel junctions at very small dimensions (sub-30 nm) and a very dense pitch. This remains a challenge due to the difficulty in etching magnetic tunnel junction stacks. We previously proposed a strategy to circumvent this problem by depositing the magnetic tunnel junction material on prepatterned metallic pillars, resulting in the junction being naturally shaped during deposition. Upon electrical contact, the deposit on top of the pillars constitutes the magnetic storage element of the memory cell. However, in this process, the magnetic material is also deposited in the trenches between the pillars that might affect the memory cell behaviour. Here we study the magnetic interactions between the deposit on top of the pillars and in the trenches by electron holography, at room temperature and up to 325 °C. Supported by models, we show that the additional material in the trenches is not perturbing the working principle of the memory chip and can even play the role of a flux absorber which reduces the crosstalk between neighboring dots. Besides, in the studied sample, the magnetization of the 1.4 nm thick storage layer of the dots is found to switch from out-of-plane to an in-plane configuration above 125 °C, but gradually decreases with temperature. Electron holography is shown to constitute a very efficient tool for characterizing the micromagnetic configuration of the storage layer in MRAM cells.
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Affiliation(s)
- V Boureau
- Univ. Grenoble Alpes, CEA-LETI, F-38000 Grenoble, France.
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Jaafar M, Pablo-Navarro J, Berganza E, Ares P, Magén C, Masseboeuf A, Gatel C, Snoeck E, Gómez-Herrero J, de Teresa JM, Asenjo A. Customized MFM probes based on magnetic nanorods. NANOSCALE 2020; 12:10090-10097. [PMID: 32348391 DOI: 10.1039/d0nr00322k] [Citation(s) in RCA: 16] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
Focused Electron Beam Induced Deposition (FEBID) for magnetic tip fabrication is presented in this work as an alternative to conventional sputtering-based Magnetic Force Microscopy (MFM) tips. FEBID enables the growth of a high-aspect-ratio magnetic nanorod with customized geometry and composition to overcome the key technical limitations of MFM probes currently on the market. The biggest advantage of these tips, in comparison with CoCr coated pyramidal probes, lies in the capability of creating sharp ends, nearly 10 nm in diameter, which provides remarkable (topographic and magnetic) lateral resolution in samples with magnetic features close to the resolution limits of the MFM technique itself. The shape of the nanorods produces a very confined magnetic stray field, whose interaction with the sample is extremely localized and perpendicular to the surface, with negligible in-plane components. This effect can lead to a better analytical and numerical modelling of the MFM probes and to an increase in the sensitivity without perturbing the magnetic configuration of soft samples. Besides, the high-aspect ratio achievable in FEBID nanorod tips makes them magnetically harder than the commercial ones, reaching coercive fields higher than 900 Oe. According to the results shown, tips based on magnetic nanorods grown by FEBID can be eventually used for quantitative analysis in MFM measurements. Moreover, the customized growth of Co- or Fe-based tips onto levers with different mechanical properties allows MFM studies that demand different measuring conditions. To showcase the versatility of this type of probe, as a last step, MFM is performed in a liquid environment, which still remains a challenge for the MFM community largely due to the lack of appropriate probes on the market. This opens up new possibilities in the investigation of magnetic biological samples.
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Affiliation(s)
- Miriam Jaafar
- Departamento de Física de la Materia Condensada and Condensed Matter Physics Center (IFIMAC), Universidad Autónoma de Madrid, 28049 Madrid, Spain.
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Fernández-Pacheco A, Streubel R, Fruchart O, Hertel R, Fischer P, Cowburn RP. Three-dimensional nanomagnetism. Nat Commun 2017; 8:15756. [PMID: 28598416 PMCID: PMC5494189 DOI: 10.1038/ncomms15756] [Citation(s) in RCA: 168] [Impact Index Per Article: 24.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/24/2016] [Accepted: 04/20/2017] [Indexed: 01/18/2023] Open
Abstract
Magnetic nanostructures are being developed for use in many aspects of our daily life, spanning areas such as data storage, sensing and biomedicine. Whereas patterned nanomagnets are traditionally two-dimensional planar structures, recent work is expanding nanomagnetism into three dimensions; a move triggered by the advance of unconventional synthesis methods and the discovery of new magnetic effects. In three-dimensional nanomagnets more complex magnetic configurations become possible, many with unprecedented properties. Here we review the creation of these structures and their implications for the emergence of new physics, the development of instrumentation and computational methods, and exploitation in numerous applications. Nanoscale magnetic devices play a key role in modern technologies but current applications involve only 2D structures like magnetic discs. Here the authors review recent progress in the fabrication and understanding of 3D magnetic nanostructures, enabling more diverse functionalities.
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Affiliation(s)
| | - Robert Streubel
- Division of Materials Sciences, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
| | - Olivier Fruchart
- Univ. Grenoble Alpes, CNRS, CEA, Grenoble INP, INAC, SPINTEC, F-38000 Grenoble, France
| | - Riccardo Hertel
- Université de Strasbourg, CNRS, Institut de Physique et Chimie des Matériaux de Strasbourg, UMR 7504, Department of Magnetic Objects on the Nanoscale, F-67000 Strasbourg, France
| | - Peter Fischer
- Division of Materials Sciences, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.,Department of Physics, UC Santa Cruz, Santa Cruz, California 95064, USA
| | - Russell P Cowburn
- Cavendish Laboratory, University of Cambridge, JJ Thomson Avenue, Cambridge CB3 0HE, UK
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