Autofocus on moving object in scanning electron microscope

Robust autofocusing for scanning electron microscopy based on a dual deep learning network

Scanning electron microscopy (SEM) is a high-resolution imaging technique with subnanometer spatial resolution that is widely used in materials science, basic science, and nanofabrication. However, conducting SEM is rather complex due to the nature of using an electron beam and the many parameters that must be adjusted to acquire high-quality images. Only trained operators can use SEM equipment properly, meaning that the use of SEM is restricted. To broaden the usability of SEM, we propose an autofocus method for a SEM system based on a dual deep learning network, which consists of an autofocusing-evaluation network (AENet) and an autofocusing-control network (ACNet). The AENet was designed to evaluate the quality of given images, with scores ranging from 0 to 9 regardless of the magnification. The ACNet can delicately control the focus of SEM online based on the AENet’s outputs for any lateral sample position and magnification. The results of these dual networks showed successful autofocus performance on three trained samples. Moreover, the robustness of the proposed method was demonstrated by autofocusing on unseen samples. We expect that our autofocusing system will not only contribute to expanding the versatility of SEM but will also be applicable to various microscopes.

Autofocus of whole slide imaging based on convolution and recurrent neural networks

During the process of whole slide imaging, it is necessary to focus thousands of fields of view to obtain a high-quality image. To make the focusing procedure efficient and effective, we propose a novel autofocus algorithm for whole slide imaging. It is based on convolution and recurrent neural networks to predict the out-of-focus distance and subsequently update the focus location of the camera lens in an iterative manner. More specifically, we train a convolution neural network to extract focus information in the form of a focus feature vector. In order to make the prediction more accurate, we apply a recurrent neural network to combine focus information from previous search iteration and current search iteration to form a feature aggregation vector. This vector contains more focus information than the previous one and is subsequently used to predict the out-of-focus distance. Our experiments indicate that our proposed autofocus algorithm is able to rapidly determine the optimal in-focus image. The code is available at https://github.com/hezhujun/autofocus-rnn.

Improved autofocus method for human red blood cell images

This paper presents an improved autofocus method for human red blood cell images in a microscope. The products of the sum modulus difference and the real-valued fast Fourier transform function are multiplied to obtain an improved sharpness evaluation using the properties of a Gaussian function. It is superior to traditional evaluations in terms of unimodality, steepness, and sensitivity. A new quantitative criterion is proposed to represent the ability of sharpness evaluation against noise. An adaptive focus window with great robustness is proposed that can reduce the computation cost and adverse effects of the background. The better performances of the proposed algorithms are all proved by experiment results, and they can help to find the quasi-focus position more quickly and accurately.