Development of in situ optical-electrical MEMS platform for semiconductor characterization

In Situ TEM Characterization and Modulation for Phase Engineering of Nanomaterials

Solid-state phase transformation is an intriguing phenomenon in crystalline or noncrystalline solids due to the distinct physical and chemical properties that can be obtained and modified by phase engineering. Compared to bulk solids, nanomaterials exhibit enhanced capability for phase engineering due to their small sizes and high surface-to-volume ratios, facilitating various emerging applications. To establish a comprehensive atomistic understanding of phase engineering, in situ transmission electron microscopy (TEM) techniques have emerged as powerful tools, providing unprecedented atomic-resolution imaging, multiple characterization and stimulation mechanisms, and real-time integrations with various external fields. In this Review, we present a comprehensive overview of recent advances in in situ TEM studies to characterize and modulate nanomaterials for phase transformations under different stimuli, including mechanical, thermal, electrical, environmental, optical, and magnetic factors. We briefly introduce crystalline structures and polymorphism and then summarize phase stability and phase transformation models. The advanced experimental setups of in situ techniques are outlined and the advantages of in situ TEM phase engineering are highlighted, as demonstrated via several representative examples. Besides, the distinctive properties that can be obtained from in situ phase engineering are presented. Finally, current challenges and future research opportunities, along with their potential applications, are suggested.

In Situ Device-Level TEM Characterization Based on Ultra-Flexible Multilayer MoS2 Micro-Cantilever

Current state-of-the-art in situ transmission electron microscopy (TEM) characterization technology has been capable of statically or dynamically nanorobotic manipulating specimens, affording abundant atom-level material attributes. However, an insurmountable barrier between material attributes investigations and device-level application explorations exists due to immature in situ TEM manufacturing technology and sufficient external coupled stimulus. These limitations seriously prevent the development of in situ device-level TEM characterization. Herein, a representative in situ opto-electromechanical TEM characterization platform is put forward by integrating an ultra-flexible micro-cantilever chip with optical, mechanical, and electrical coupling fields for the first time. On this platform, static and dynamic in situ device-level TEM characterizations are implemented by utilizing molybdenum disulfide (MoS₂ ) nanoflake as channel material. E-beam modulation behavior in MoS₂  transistors is demonstrated at ultra-high e-beam acceleration voltage (300 kV), stemming from inelastic scattering electron doping into MoS₂  nanoflakes. Moreover, in situ dynamic bending MoS₂  nanodevices without/with laser irradiation reveals asymmetric piezoresistive properties based on electromechanical effects and secondary enhanced photocurrent based on opto-electromechanical coupling effects, accompanied by real-time monitoring atom-level characterization. This approach provides a step toward advanced in situ device-level TEM characterization technology with excellent perception ability and inspires in situ TEM characterization with ultra-sensitive force feedback and light sensing.

In Situ TEM under Optical Excitation for Catalysis Research

In situ characterization of materials in their operational state is a highly active field of research. Investigating the structure and response of materials under stimuli that simulate real working environments for technological applications can provide new insight and unique input to the synthesis and design of novel materials. Over recent decades, experimental setups that allow different stimuli to be applied to a sample inside an electron microscope have been devised, built, and commercialized. In this review, we focus on the in situ investigation of optically active materials using transmission electron microscopy. We illustrate two different approaches for exposing samples to light inside the microscope column, explaining the importance of different aspects of their mechanical construction and choice of light source and materials. We focus on the technical challenges of the setups and provide details of the construction, providing the reader with input on deciding which setup will be more useful for a specific experiment. The use of these setups is illustrated using examples from the literature of relevance to photocatalysis and nanoparticle synthesis.

Microreactor-Based TG-TEM Synchronous Analysis

It is challenging to measure the heating-induced mass change of the material during its morphological/structural evolution process. Herein, a silicon microreactor is developed for thermogravimetric-transmission electron microscopy synchronous analysis (TG-TEM synchronous analysis). A self-heating resonant microcantilever for mass-change detection and a dummy microcantilever with electron-beam transparent SiN_x windows for in situ TEM imaging are integrated back-to-back inside the microreactor. The TEM resolution of the microreactor reaches the Ångström level in an air atmosphere of 100 mbar, and the TGA function is realized by the heatable resonant microcantilever. The TG-TEM synchronous analysis has been successfully used to characterize two Ni(OH)₂ samples. During the in situ TEM observing process, the desorption of the intercalated H₂O molecules and dehydration of the lattice OH groups in the amorphous Ni(OH)₂·xH₂O nanosheets can be clearly distinguished from the microcantilever-based TGA. For single-crystal Ni(OH)₂ nanosheets, the TG-TEM synchronous analysis can distinguish the desorption of physiosorbed water, the condensation of surface OH groups, and the dehydration of lattice OH groups. The amorphous Ni(OH)₂ nanosheets transformed to polycrystalline NiO completed at 290 °C, and the decomposition from the single-crystalline Ni(OH)₂ nanoplates to NiO at 315 °C is also clearly recognized. The proposed microreactor-based TG-TEM synchronous analysis provides an interrelated characterization platform to obtain more comprehensive information on materials.